450 resultados para MBE
Resumo:
采用MBE设备生长了多层InAs/GaAs量子点结构,测量了其变温光致发光谱和时间分辨光致发光谱。结果表明多层量子点结构有利于减小发光峰的半高宽,并且可以提高发光峰半高宽和发光寿命的温度稳定性。实验发现,加InGaAs盖层后,量子点发光峰的半高宽进一步减小,最小达到23.6meV,并且发光峰出现红移。原因可能在于InGaAS盖层减小了InAs岛所受的应力,阻止了In组分的偏析,提高了InAs量子点尺寸分布的均匀性和质量,导致载流子在不同量子点中的迁移效应减弱。
Resumo:
对1064nm谐振腔增强型(RCE)光电探测器(PD)的光电响应特性进行了分析研究.利用MBE生长技术得到有源区分别为量子阱和量子点的1064nm RCE探测器的外延片,并对制作的探测器进行了各种光电特性测试.结果表明量子阱结构的RCE探测器量子效率峰值达到57%,谱线半宽6~7nm,峰值波长1059nm;而量子点结构的RCE探测器量子效率峰值达到30%,谱线半宽5nm,峰值波长1056nm.通过分析量子效率和吸收系数之间的关系,对两种结构器件的吸收进行了比较,发现虽然量子点探测器的吸收小,但通过合理设计共振腔等方法也可以达到较高的量子效率.两种结构的器件都有很好的I-V特性.
Resumo:
报道了一种具有高速响应特性的GaAs基长波长谐振强增强型(RCE)光探测器,它采用分子束外延技术(MBE)在GaAs衬底上直接生长GaAs/AlAs布拉格反射镜(DBR)和GaInNAs/GaAs多量子阱吸收层而形成,解决了GaAs系材料只能对短波长光响应的问题,实现了GaAs基探测器对长波长光的响应.该器件在峰值响应波长1 296.5 nm处获得了17.4%的量子效率,响应谱线半宽为11 nm,零偏置时的暗电流密度8.74×10-15 A/μm~2,具有良好的暗电流特性.通过RC常数测量计算得到器件的3 dB带宽为4.82 GHz.
Resumo:
50mm SiC films with high electrical uniformity are grown on Si(111) by a newly developed vertical low-pressure chemical vapor deposition (LPCVD) reactor.Both in-situ n- and p-type doping of 3C-SiC are achieved by intentional introduction of ammonia and boron into the precursor gases.The dependence of growth rate and surface morphology on the C/Si ratio and optimized growth conditions is obtained.The best electrical uniformity of 50mm 3C-SiC films obtained by non-contact sheet resistance measurement is ±2.58%.GaN films are grown atop the as-grown 3C-SiC/Si(111) layers using molecular beam epitaxy (MBE).The data of both X-ray diffraction and low temperature photoluminescence of GaN/3C-SiC/Si(111) show that 3C-SiC is an appropriate substrate or buffer layer for the growth of Ⅲ-nitrides on Si substrates with no cracks.
Resumo:
使用MBE方法在Si(111)衬底和Si-SiO2-Si柔性衬底上生长了GaN外延层,并对在两种衬底上生长的样品进行了对比分析.在柔性衬底上获得了无裂纹的外延层,其表面粗糙度为0.6nm.研究了GaN外延层中的应力及其光学性质,光致发光测试结果表明柔性衬底上生长的外延层中应力和杂质浓度明显低于直接生长在Si衬底上的样品的值.研究结果显示了所用柔性衬底有助于改善GaN外延膜的质量.
Resumo:
分析了MBE生长的GaInNAs/GaAs单量子阱样品的光致荧光谱(PL),细致地研究了在弱激发功率下GaInNAs/GaAs样品的发光峰位的 s-型反常温度依赖关系。并对材料进行了退火处理,结果发现退火有效地改善材料的发光特性,并且会造成s-型的转变温度降低,从而说明退火可以有效地减少局域态。
Resumo:
利用固源分子束外延(MBE)的方法经SK模式自组装生长由多层InAs/GaAs量子点组成的柱形岛.具体分析了GaAs间隔层厚度,生长停顿时间以及InAs淀积量对发光峰波长的影响.原子力显微镜(AFM)结果显示柱形岛表面的形状和尺寸都比较均匀;室温下不同高度的柱形岛样品的发光波长分别达到1.32和1.4μm,而单层量子点的发光波长仅为1.1μm,充分说明了量子点高度对发光波长的决定性影响,这为调节量子点发光波长提供了一种直观且行之有效的方法.
Resumo:
用MBE生长设备制造了GaAs/Si/AlAs异质结,通过CV法研究了异质结的带阶和GaAs层在不同温度下生长对0.5分子层Si夹层的影响,得到Si夹层的空间分布随GaAs层生长温度的升高而由局域变为弥散的温度效应。
Resumo:
AlGaN/GaN high electron mobility transistor (HEMT) materials are grown by RF plasma-assisted molecular beam epitaxy (RF-MBE) and HEMT devices are fabricated and characterized. The HEMT materials have a mobility of 1035cm~2/(V ? s) at sheet electron concentration of 1.0 * 10~(13)cm~(-2) at room temperature. For the de-vices fabricated using the malt-rials,a maximum saturation drain-current density of 925mA/mm and a peak extrinsic iransecmductance of IHfimS/mm are obtained on devices with gate length and width of l/-im and 80/im respectively. The f_t, unit-current-gain frequency of the devices,is about 18. 8GHz.
Resumo:
用分子束外延(MBE)设备制备了GaAs/AlAs和GaAs/Si/AlAs异质结,通过XPS分别研究了异质结界面处Si层厚度为0.5ML和1ML对异质结带阶的调节,得到最大调节量为0.2eV;通过C-V法研究了异质结的GaAs层在不同温度下生长对0.5MLSi夹层的影响,得到Si夹层的空间分布随GaAs层生长温度的升高而扩散增强的温度效应,通过深能级瞬态谱(DLTLS)研究了在上述不同温度下生长的GaAs层的晶体质量。
Resumo:
在GaAs(100)的衬底上,采用MBE自组织方法生长了单层层厚分别为2和2.5ML的InAs层。通过原子力显微镜(AFM)观察,证实已在InAs层中形成量子点。采用光致发光谱及时间分辨谱对InAs量子点及浸润层开展研究和对比,分析了单层InAs量子点和浸润层中的载流子迁移过程,较好地解释了实验结果。
Resumo:
Self-organized In_(0.5)Ga_(0.5)As/GaAs quantum island structure emitting at 1. 35 (im at room temperature has been successfully fabricated by molecular beam epitaxy (MBE) via cycled (InAs)_1/( GaAs)_1 monolayer deposition method. Photoluminescence (PL) measurement shows that very narrow PL linewidth of 19.2 meV at 300 K has been reached for the first time, indicating effective suppression of inhomogeneous broadening of optical emission from the In_(0.5)Ga_(0.5)As islands structure. Our results provide important information for optimizing the epitaxial structures of 1.3 μm wavelength quantum dot (QD) devices.
Resumo:
Self-assembled In_0.35Ga_0.65As/GaAs quantum dots with low indium content are grown under different growth temperature and investigated using contact atomic force microscopy(AFM). In order to obtain high density and high uniformityu of quantum dots, optimized conditions are concluded for MBE growth. Optimized growth condi-tions also compared with these of InAs/GaAs quantum dots. This will be very useful for InGaAs/GaAs QDs opto-electronic applications, such as quantum dots lasers and quantum dots infrared photodetectors.
Resumo:
应用深能级瞬态谱(DLTS)技术研究分子束外延(MBE)生长的high electron mobility transistors (HEMT)和Pseudomorphic high electron mobility transistors (P-HEMT)结构深中心行为。样品的DLTS谱表明,在HEMT和P-HEMT结构的n-AlGaAs层里存在着较大浓度(10~(15)-10~(17)cm~(-3))和俘获截面(10~(-16)cm~2)的近禁带中部电子争阱。它们可能与AlGaAs层的氧含量有关。同时还观察到P-HEMT结构晶格不匹配的AlGaAs/InGaAs/GaAs系统在AlGaAs里产生的应力引起DX中心(与硅有关)能级位置的有序移动。其移动量可作为应力大小的一个判据,表明DLTS技术是定性识别此应力的可靠和简便的工具。
Resumo:
研究分子束外延(MBE)生长的应变In_(0.2)Ga_(0.8)As/GaAs折射率梯度变化异质结单量子阱激光二极管的快速热处理(RTA)效应。结果表明,RTA移除了InCaAs/GaAs界面非辐射中心,提高77K光致发光效率和有源层电子发射。同时Al和Ga原子互扩散,也增加了AlGaAs波导层DX中心浓度。RTA处理后样品电流冲击老化实验证明DX中心浓度呈现出相应的增加。这表明DX中心可能是激光二极管性能退化的原因之一。