1.3μm低阈值InGaAsP/InP应变补偿MQW激光器的LP-MOCVD生长

报道了用低压金属有机物化学气相淀积(LP-MOCVD)方法外延生长InGaAsP/InP应变补偿多量子阱结构。用此材料制备的掩埋异质结(BH)条形结构多量子阱激光器具有极低阈值电流4～6mA。20～40℃时特征温度T_0高达67K，室温下外量子效率为0.3mW/mA。

低阈值1.3μm InGaAsP/InP应变补偿多量子阱DFB激光器LP-MOCVD生长

报道了用低压－金属有机化学气相淀积(LP-MOCVD)方法制作1.3μm应变补偿多量子阱结构材料。X射线双晶衍射摇摆曲线可清晰地看到±4级卫星峰和卫星峰间的Pendellosong条纹。整个有源区的平均应变量几乎为零。用掩埋异质结(BH)条形工艺制备的含一级光栅的DFB激光器室温下阈值电流2～4mA,外量子效率0.33mW/mA,线性输出光功率达30mW,边模抑制比(SMSR)大于35dB。20～40℃下的特征温度T_0为67K。

LP-MOCVD制备AlGaInP高亮度橙横色发光二极管

利用LP-MOCVD外延生长AlGaInP DH 结构橙黄色发光二极管。引入厚层Al_(0.7)Ga_(0.3)As电流扩展层和Al_(0.5)Ga_(0.5)As-AlAs分布布拉格反射器(KBR)。20mA工作条件下，工作电压1.9V,发光波长峰值在605nm,峰值半宽为18.3nm,管芯平均亮度达到20mcd,最大29.4mcd,透明封装成视角(2θ_(1/2)15°的LED灯亮度达到1cd。

MOVPE生长GaN的准热力学模型及其相图

基于准热力学平衡模型对以TMGa和NH_3为源的MOVPE生长GaN的过程进行了分析,并在此基础上计算了MOVPE生长GaN的相图。Gan的MOVPE相图由GaN(s)单凝聚相区、GaN(s)+Ga(1)双凝聚相区、表面会形成Ga滴和不会形成Ga滴的两个腐蚀区构成。着重讨论了生长温度、反应室压力、载气组分、NH_3分解率和V/III比对GaN单凝聚相区边界的影响。

MOVPE生长Al（0.35）Ga（0.65）As/GaAs量子阱结构的光致发光

于2010-11-23批量导入

InP的MOVPE生长

利用常压MOVPE设备和国产的三甲基铟以及进口的磷烷生长了InP处延材料,其77K迁移 率为65300cm~2/V·s,是国内迄今为止用各种方法获得的InP薄膜的最大低温迁移率值.

ZnSe的MOVPE生长相图以DMZn和H2Se为源

基于热力学平衡计算,首次给出以DMZn和H_2Se为源,MOVPE生长ZnSe的相图.文中讨论了ZnSe单一凝聚相区的范围,以及可能出ZnSe(s)+Zn(s)或ZnSe(s)+Se(1)两种双凝聚相区的条件.

GaN的MOVPE生长和m-i-n型蓝光LED的试制

国家863计划

注入电流对于MOVPE生长GaAs薄层光透射特性的影响

于2010-11-23批量导入

MOVPE生长GaAs薄层的线偏振光吸收系数的电流感生变化

于2010-11-23批量导入

Yellow luminescence mechanism and persistent photoconductivity in n-GaN single crystal films grown on alpha-Al2O3(0001) substrates by LP-MOCVD

Unintentionally doped and Si-doped single crystal n-GaN films have been grown on alpha-Al2O3 (0001) substrates by LP-MOCVD. Room temperature photoluminescence measurement showed that besides the bandedges, the spectrum of an undoped sample was a broad deep-level emission band peaking from 2.19 to 2.30eV, whereas the spectrum for a Si-doped sample was composed of a dominant peak of 2.19eV and a shoulder of 2.32eV. At different temperatures, photoconductance buildup and its decay were also observed for both samples.. The likely origins of persistent photoconductivity and yellow luminescence, which might be associated with deep defects inclusive of either Ga vacancy(V-Ga)/Ga vacancy complex induced by impurities or N antisite (N-Ga), will be proposed.

Growth of Fe doped semi-insulating InP by LP-MOCVD

The semi-insulating InP has been grown using ferrocene as a dopant source by low pressure MOCVD. Fe doped semiinsulating InP material whose resistivity is equal to 2.0x10(8)Omega*cm and the breakdown field is Beater than 4.0x10(4)Vcm(-1) has been achieved. It is found that the magnitude of resistivity increases with growing pressure enhancement under keeping TMIn, PH3, ferrocene (Fe(C5H5)(2)) flow constant at 620 degrees C growth temperature. Moreover, the experimental results which resistivity varies with ferrocene mole fraction are given. It is estimated that active Fe doping efficiency; eta, is equal to 8.7x10(-4) at 20mbar growth pressure and 620 degrees C growth temperature by the comparison of calculated and experimental results.