高温退火处理提高半绝缘VGF-GaAs单晶的电学性能

垂直梯度凝固法（VGF）生长的低位错半绝缘（SI）GaAs单晶存在电阻率和迁移率低、电学补偿度小、均匀性差等问题.在3种不同温度条件下,对VGF-SI-GaAs晶片进行了加As压的闭管退火处理.结果表明,经过1160℃/12h的高温退火处理后,VGF-SI-GaAs单晶的电阻率、迁移率和均匀性均得到了显著提高.利用Hall、热激电流谱（TSC）、红外吸收法分别测试分析了原生和退火VGF-SI-GaAs单晶样品的电学性质、深能级缺陷、EL2浓度和C浓度,并与常规液封直拉法（LEC）SI-GaAs单晶样品进行了比较.原生VGF-SI-GaAs单晶中的EL2浓度明显低于LEC-SI-GaAs单晶,经过退火处理后其EL2浓度显著增加,电学补偿增强,而且能级较浅的一些缺陷的浓度降低,因而有效提高了其电学性能.

显微光谱研究半绝缘GaAs带边以上E_0+△_0光学性质

通过显微光致发光技术和显微拉曼(Raman)技术研究了半绝缘GaAs(SI-GaAs)晶体的带边附近的发光.在光荧光谱中,观察到在高于GaAs带边0.348 eV处有一个新的荧光峰.结合Raman谱指认此发光峰来源于GaAs的E_0+△_0能级的非平衡荧光发射.同时,通过研究E_0+△_0能级的偏振、激发光强度依赖关系,以及温度依赖关系说明E_0+△_0能级与带边E_0共享了共同的导带位置Г_6,同时这也说明在GaAs中主要是导带的性质决定了材料的光学行为.同时,通过与n-GaAs和δ掺杂GaAs相比较,半绝缘GaAs晶体的E_0+△_0能级的发光峰更能反映GaAs电子能级高临界点E_0+△_0的能量位置和物理性质.研究结果说明显微光致发光技术是研究半导体材料带边以上能级光学性质的一种非常有力的研究工具.

GaAs衬底生长的立方GaN晶片键合技术

利用晶片键合技术通过多层金属膜成功地把立方相GaN LED结构键合到新衬底Si上，并又利用湿法腐蚀技术去掉了原GaAs衬底．SEM和PL观察表明，利用键合技术可以完整地把立方相GaN以外延薄膜转移到新的衬底上而不改变外延层的物理和光学性质．XRD(x射线衍射)结果分析显示，键合后的样品中出现了新的合金和化合物

半绝缘 GaAs的表面光伏谱研究

利用表面光伏法(SPV)研究了半绝缘GaAs(SI-GaAs)的缺陷态。通过加直流光偏置测量了室温下带边以下的光伏响应，发现带隙内缺陷态的光伏响应主要是由于表面而形成载流子浓度梯度引起的，通过实验表明SPV是一种对SI-GaAs晶片表面质量进行检测的非常灵敏的无损检测方法。

空间生长GaAs材料多孔部分的俄歇能谱分析与阴极荧光形貌观察

在空间生长SI-GaAs的某些部位有汽泡产生，经俄歇分析，汽泡表面约有10nm的砷层，它从半绝缘砷化镓内部逸出，导致其成为半导体。用阴极荧光形貌观测了其多晶结构。

半绝缘GaAs衬底中位错对MESFETs旁栅效应的影响

在位错密度不同的LEC半绝缘(SI)GaAs衬底上离子注入制做MESFETs,观察衬底位错对MESFETs旁栅效应的影响。结果表明，衬底中高位错密度可以拟制旁栅效应。

低温分子束外延生长GaAs单晶的材料特性

对低温分子束外延生长的GaAs单晶进行了理论分析的实验研究,结果表明,低温分子束外延长的GaAs单晶中密度大约为10~(20)cm~(-3)的过量As原子,这些As原子主要以间隙原子对As的形式位于正常的As格点位置,使LTMBEGaAs单晶的晶格常数相对于SI-GaAs单晶衬底增加约为0.1%.高于300℃的退火即可命名使间隙原子对As_(2i)离解,使过量的As原子形成沉淀.随着退火温度的增加,As沉淀向外延层界面处集中.在外延层界面处As沉淀团与GaAs单晶形成的载流子耗尽区相互重叠,呈现出高阻特性,有效地抑制了FET的背栅和侧栅效应.

MBE生长轻掺硅GaAs材料光荧光谱杂质特性研究

采用低温荧光光谱测试方法，研究了MBE生长的轻掺硅GaAs材料的杂质特性，并结合Hall测量结果，讨论了MBE关键生长条件V/II束流比等对Si在GaAs中掺杂特性的影响，研究表明掺杂元素Si在GaAs中起两性（施主或受主）杂质作用，适当提高V/II束流比可以抑制Si的自补偿效应，从而减小载流子的补偿度，进一步提高迁移率。通过优化生长条件，本实验已获得了杂质浓度小于10~(13) cm~(-3)，77 K下迁移率大于1.6 X 10~5cm~2/V.s的高纯、高迁移率GaAs材料。

Stoichiometry in GaAs grown in outer space measured nondestructively

A semi-insulating (SI) GaAs single crystal ingot was successfully grown in a recoverable satellite. The two-dimensional distribution of stoichiometry in space-grown SI-GaAs single crystal wafer was studied nondestructively based upon x-ray Band diffraction. The avenge stoichiometry in the space-grown crystal is 0.50007 with mean square deviation of 6 x 10(-6), and shows a better stoichiametric property than the ground-grown SI-GaAs. The average etch pit density (EPD) of dislocations in the crystal revealed by molten KOH is 2.0 x 10(4) cm(-2), and the highest EPD is 3.1 x 10(4) cm(-2). This result indicates that the structural properly of the crystal is quite good.

Photoluminescence behaviors from stoichiometric gadolinium oxide films

Stoichiometric gadolinium oxide thin films have been grown on silicon (100) substrates with a low-energy dual ion-beam epitaxial technique. Gadolinium oxide shares Gd2O3 structures although the ratio of gadolinium and oxygen in the film is about 2:1 and a lot of oxygen deficiencies exist. Photoluminescence (PL) measurements have been carried out within a temperature range of 5-300 K. The detailed characters of the PL emission integrated intensity, peak position, and peak width at different temperature were reported and an anomalous photoluminescence behavior was observed. The character of PL emission integrated intensity is similar to that of some other materials such as porous silicon and silicon nanocrystals in silicon dioxide. Four peaks relative to alpha band and beta band were observed also. Therefore we suggest that the nanoclusters with the oxygen deficiencies contribute to the PL emission and the model of singlet-triplet exchange splitting of exciton was employed for discussion. (C) 2003 American Institute of Physics.

Space grown semi-insulating gallium arsenide single crystal and its application

Low noise field effect transistors and analogue switch integrated circuits (ICs) have been fabricated in semi-insulating gallium arsenide (SI-GaAs) wafers grown in space by direct ion-implantation. The electrical behaviors of the devices and the ICs have surpassed those fabricated in the terrestrially grown SI-GaAs wafers. The highest gain and the lowest noise of the transistors made from space-grown SI-GaAs wafers are 22.8 dB and 0.78 dB, respectively. The threshold back-gating voltage of the ICs made from space-grown SI-GaAs wafers is better than 8.5 V The con-elation between the characterizations of materials and devices is studied systematically. (C) 2002 COSPAR. Published by Elsevier Science Ltd. All rights reserved.

Novel coupled multi-active region high power semiconductor lasers cascaded via tunnel junction

A novel semiconductor laser structure is put forward to resolve the major difficulties of high power laser diodes. In this structure, several active regions are cascaded by tunnel junctions to form a large optical cavity and to achieve super high efficiency. This structure can solve the problems of catastrophic optical damage of facet, thermal damage and poor light beam quality effectively. Low-pressure metalorganic chemical vapor deposition method is adopted to grow the novel semiconductor laser structures, which are composed of Si:GaAs/C:GaAs tunnel junctions, GaAs/InGaAs strain quantum well active regions. External differential quantum efficiency as high as 2.2 and light power output of 2.5 W per facet (under 2A drive current) are achieved from an uncoated novel laser device with three active regions.

Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity

A semi-insulating (SI) GaAs single crystal was recently grown in a retrievable satellite. The average etch pit density (EPD) of dislocations in the crystal revealed by molten KOH is 2.0 x 10(4) cm(-2), and the highest EPD is 3.1 x 10(4) cm(-2) This result indicates a quite good homogenity of the EPD which is much better than the ground-grown crystals. A similar better homogenity of the stoichiometry i.e., the [As]/([As] + [Ga]) ratio has been found in the space-grown SI-GaAs single crystal studied nondestructively using a new mapping method based upon X-ray Bond diffraction. The average stoichiometry in the space-grown crystal is 0.50007 with mean-square deviation of 6x10(-6), while the average stoichiometry in ground-grown SI-GaAs crystal is more than 0.50010. (C) 1998 Elsevier Science B.V. All rights reserved.

Quantum confinement effect in thin quantum wires

The electronic states and optical transition properties of three semiconductor wires Si? GaAs, and ZnSe are studied by the empirical pseudopotential homojunction model. The energy levels, wave functions, optical transition matrix elements, and lifetimes are obtained for wires of square cross section with width from 2 to 5 (root 2a/2), where a is the lattice constant. It is found that these three kinds of wires have different quantum confinement properties. For Si wires, the energy gap is pseudodirect, and the wave function of the electronic ground state consists mainly of four bulk Delta states. The optical transition matrix elements are much smaller than that of a direct transition, and increase with decreasing wire width. Where the width of wire is 7.7 Angstrom, the Si wire changes from an indirect energy gap to a direct energy gap due to mixing of the bulk Gamma(15) state. For GaAs wires. the energy gap is also pseudodirect in the width range considered, but the optical transition matrix elements are larger than those of Si wires by two orders of magnitude for the same width. However, there is no transfer to a direct energy gap as the wire width decreases. For ZnSe wires, the energy gap is always direct, and the optical transition matrix elements are comparable to those of the direct energy gap bulk semiconductors. They decrease with decreasing wire width due to mixing of the bulk Gamma(1) state with other states. All quantum confinement properties are discussed and explained by our theoretical model and the semiconductor energy band structures derived. The calculated lifetimes of the Si wire, and the positions of photoluminescence peaks, are in good agreement with experimental results.

Dislocations and precipitates in semi-insulating gallium arsenide revealed by ultrasonic Abrahams-Buiocchi etching

The dislocations and precipitates in SI-GaAs single crystals are revealed by ultrasonic-aided Abrahams-Buiocchi etching (USAB), and the etch pits are observed and measured by metalloscope and scanning electron microscope (SEM) equipped with an energy dispersive X-ray spectrometer (EDS), respectively. The size of etch pit revealed by USAB etching is about 1 order of magnitude smaller than that revealed by molten KOH. The amount of arsenic atoms in the dislocation-dense zone is about 1% larger than that in an adjacent dislocation-free zone measured by EDS attached to SEM, which indicates that the excess arsenic atoms adjacent to the dislocation-dense zone are attracted to the dislocations and precipitate there due to the deformation energy.