Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity


Autoria(s): Lin LY; Zhong XR; Chen NF
Data(s)

1998

Resumo

A semi-insulating (SI) GaAs single crystal was recently grown in a retrievable satellite. The average etch pit density (EPD) of dislocations in the crystal revealed by molten KOH is 2.0 x 10(4) cm(-2), and the highest EPD is 3.1 x 10(4) cm(-2) This result indicates a quite good homogenity of the EPD which is much better than the ground-grown crystals. A similar better homogenity of the stoichiometry i.e., the [As]/([As] + [Ga]) ratio has been found in the space-grown SI-GaAs single crystal studied nondestructively using a new mapping method based upon X-ray Bond diffraction. The average stoichiometry in the space-grown crystal is 0.50007 with mean-square deviation of 6x10(-6), while the average stoichiometry in ground-grown SI-GaAs crystal is more than 0.50010. (C) 1998 Elsevier Science B.V. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/13156

http://www.irgrid.ac.cn/handle/1471x/65548

Idioma(s)

英语

Fonte

Lin LY; Zhong XR; Chen NF .Improvement of stoichiometry in semi-insulating gallium arsenide grown under microgravity ,JOURNAL OF CRYSTAL GROWTH ,1998,191(3):586-588

Palavras-Chave #半导体材料 #SI-GaAs #stoichiometry #microgravity #DEFECTS
Tipo

期刊论文