486 resultados para InP material


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InP(001)基衬底上用分子束外延方法生长InAs纳米结构材料,通过衬底的旋转与否及混合生长模式,得到了两种InAs量子点和量子线,并研究了量子点、线的光学性质。结果表明,两种方式都可生长出较强发光的量子点(线);由量子点排列构成的量子线的光致发光光谱呈现出多峰结构,分析和理论计算表明这是InAs量子线上各量子点在垂直方向上不同高度分布和非连续性而造成的。

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研制了脊形波导结构的10*10InGaAsP/InP阵列波导光栅器件(AWG),并采用掺饵光纤放大器(EDFA)作宽带光源测量了AWG的近场图以及分光特性。

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文章给出了光电子材料InP的(100)和(111)晶面质谱分析的结果,对(100)晶面做了光荧光分析。在300和77 K温度下测量了(100)晶面的电子浓度及电子迁移率。研究表明玷污主要来自硅。

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采用窄条宽选区生长化学气相沉积(NSAG-MOCVD)技术在掩膜宽度0~40 μm范围内,获得波长漂移达177.5 nm的高质量的InGaAsP材料,经推导,获得各个生长区域的组份、应变和In,Ga的气相浓度增加因子的比值随掩膜条宽的变化关系,并且认为该比值在阈值掩膜宽度范围内,与III族分压比相关,大于阈值掩膜宽度范围内,与III族源无关,此外,对材料富In现象作了合理解释。

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Properties of Fe-doped semi-insulating (SI) InP with different iron concentrations are studied by using Hall effect, current-voltage (I-V), photoluminescence spectroscopy (PL) and photocurrent spectroscopy (PC) measurements. I-V characteristics of SI InP strongly depend on Fe doping concentration. Fe doping concentration also influences optical properties and defective formation in as-grown SI InP. Band-gap narrowing phenomenon and defects in Fe doped SI InP are studied using PI and PC.

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报道了窄条宽选区生长有机金属化学气相沉积(NSAG-MOCVD)成功生长的InP系材料,并提出在NSAG-MOCVD生长研究中,引入填充因子的必要性,给出速率增强因子随填充因子变化的经验公式,计算得出速率增强因子随填充因子的变化关系。与实验结果作了比较,发现InP的速率增强因子主要取决于掩膜宽度,InGaAsP的速率增强因子不仅与掩膜宽度有关,同时也依赖于生长厚度,且这种依赖性随掩膜宽度的增加而增加。

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The electrical properties of annealed undoped n-type InP are studied by temperature dependent Hall effect (TDH) and current-voltage (I-V) measurements for semiconducting and semi-insulating samples, receptively. Defect band conduction in annealed semiconducting InP can be observed from TDH measurement, which is similar to those of as-grown unintentionally doped InP with low carrier concentration and moderate compensation. The I-V curves of annealed undoped SI InP exhibit ohmic property in the applied field region up to the onset of breakdown. Such a result is different from that of as-grown Fe-doped SI InP which has a nonlinear region in I-V curve explained by the theory of space charge limited current.

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The free electron concentration of as-grown liquid encapsulated Czochralski (LEC) InP measured by Hall effect is much higher than the concentration of net donor impurity determined by glow discharge mass spectroscopy. Evidence of the existence of a native donor hydrogen-indium vacancy complex in LEC undoped and Fe-doped InP materials can be observed with infrared absorption spectra. The concentration increase of the donor complex correlates with the increase of ionized deep acceptor iron impurity Fe~(2+) concentration in Fe-doped semi-insulating (SI) InP. These results indicate that the hydrogen-indium vacancy complex is an important donor defect in as-grown LEC InP, and that it has significant influence on the compensation in Fe-doped SI InP.

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过去的几年中,由于1.31和1.55μm波长半导体激光器在光纤通信领域得到了广泛的应用,磷化铟(InP)衬底材料的研究和规模化生产因此受到了极大的推动,并已逐步成为继硅(Si)和砷化镓(GaAs)之后又一重要的化合物半导体材料。与GaAs相比,InP晶体具有高的饱和电场漂移速度、良好的导热性和较强的抗辐射能力等优点,因此更适合于制造高频、高速、大功率及外层空间用微波器件和电路。从实际使用的情况看,n和p型InP衬底的性能已基本满足要求,而半绝缘类型衬底则无论从一致性还是均匀性方面都需要较大程度地改善。相应地,这种改善的途径和方法已成为半导体材料的研究热点之一。

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国家自然科学基金

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北京市基金,国家自然科学基金

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于2010-11-23批量导入

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研究不同生长温度下的InP/AlGaInAs/InP材料LP-MOCVD生长,用光致发光和X射线双晶衍射等测试手段分析了其材料特性,得到了室温脉冲激射1.3μm AlGaInAs有源区SCH-MQW结构材料,为器件制作研究打下了基础。

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该文介绍了用电子回旋共振(ECR)H_2/N_2等离子体去除InP衬底表面的氧、碳原子的方法,并保持了InP衬底表面原有的有序结构,给出了这种处理方法的工艺条件,对这种方法的优越性进行了系统的分析和讨论,得出了一些有价值的结论。

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报道了用低压金属有机物化学气相淀积(LP-MOCVD)方法外延生长InGaAsP/InP应变补偿多量子阱结构。用此材料制备的掩埋异质结(BH)条形结构多量子阱激光器具有极低阈值电流4~6mA。20~40℃时特征温度T_0高达67K,室温下外量子效率为0.3mW/mA。