Surface Morphology and Photoluminescence of 1.3 μm Wavelength In(Ga)As/GaAs Quantum Dots

Self-organized In_(0.5)Ga_(0.5)As/GaAs quantum island structure emitting at 1. 35 (im at room temperature has been successfully fabricated by molecular beam epitaxy (MBE) via cycled (InAs)_1/( GaAs)_1 monolayer deposition method. Photoluminescence (PL) measurement shows that very narrow PL linewidth of 19.2 meV at 300 K has been reached for the first time, indicating effective suppression of inhomogeneous broadening of optical emission from the In_(0.5)Ga_(0.5)As islands structure. Our results provide important information for optimizing the epitaxial structures of 1.3 μm wavelength quantum dot (QD) devices.

1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm

Optical filters capable of single control parameter-based wide tuning are implemented and studied. A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90 nm at 50 V tuning voltage. The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band.

1.3微米发光自组织InAs/GaAs量子点的电致发光研究

用优化的MBE参数生长了1.3μm发光的InAs/GaAs量子点材料，并制成发光二极管，对不同温度和有源区长度下样品的电致发光谱进行了细致的研究。观察到两个明显的电致发光峰，分别对应于量子点基态和激发态的辐射复合发光。实验表明，由于能态填充效应的影响，适当增大量子点发光器件有源区长度，更有利于获得基态的光发射。这个结果提供了一种控制和调节InAs/GaAs量子点发光二极管和激光器的工作波长的方法。

巨磁电阻材料La_(2/3)Ca_(1/3)Mn(O_(1-x),F_x)_3的研究

主要采用了X射线衍射、Mossbauer谱、磁测量等方法系统研究了块体巨磁电阻材料La_(2/3)Ca_(1/3)Mn_(1-x)Fe_xO_3在不同铁含量(0≤x≤0.84)时结构、性能、磁性的变化，并给予合理的解释。在0

1.3μm低阈值InGaAsP/InP应变补偿MQW激光器的LP-MOCVD生长

报道了用低压金属有机物化学气相淀积(LP-MOCVD)方法外延生长InGaAsP/InP应变补偿多量子阱结构。用此材料制备的掩埋异质结(BH)条形结构多量子阱激光器具有极低阈值电流4～6mA。20～40℃时特征温度T_0高达67K，室温下外量子效率为0.3mW/mA。

3～5.3μmIn_xGa_(1-x)As/Al_yGa_(1-y)As/Al_zGa_(1-z)As非对称台阶量子阱红外探测器

于2010-11-23批量导入

低阈值1.3μm InGaAsP/InP应变补偿多量子阱DFB激光器LP-MOCVD生长

报道了用低压－金属有机化学气相淀积(LP-MOCVD)方法制作1.3μm应变补偿多量子阱结构材料。X射线双晶衍射摇摆曲线可清晰地看到±4级卫星峰和卫星峰间的Pendellosong条纹。整个有源区的平均应变量几乎为零。用掩埋异质结(BH)条形工艺制备的含一级光栅的DFB激光器室温下阈值电流2～4mA,外量子效率0.33mW/mA,线性输出光功率达30mW,边模抑制比(SMSR)大于35dB。20～40℃下的特征温度T_0为67K。

1.3μm InGaAsP/InP应变多量子阱部分增益耦合DFB激光器

在国内首次报道了采用直接刻蚀有源区技术在应变多量子阱有源区结构基础上制作了1.3μm InGaAsP/InP部分增益耦合DFB激光器，器件采用全MOVPE生长，阈值电流10mA,边模抑制比(SMSR)大于35dB,在端面未镀膜情况下器件单纵模成品率较高。

LP-MOVPE生长的低阈值1.3μm InGaAsP/InP 压、张应变交替 MQW 激光器特性

国内首次报道了LP-MOVPE法生长高质量的高、张应变交替InGaAsP多量子阱结构的研制过程及其材料的高精度X-ray双晶摇摆衍射曲线和荧光光谱特性表征。经过双腔面镀增透射膜后，其TE模与TM模自发发射谱光强差为3dBm，呈现偏振补偿特性。

LP-MOVPE生长的1.3μmInGaAsP/InP张压应变交替MQW特性

于2010-11-23批量导入

新型结构的1.3μm GexSi（1-x）/Si MQW 波导探测器的优化设计

首次提出了一种新型的环形1.3μm Ge_xSi_(1-x)/Si波导探测器结构.器件的主体由3μm宽环形波导构成.器件的输入端是8μm宽的波导.这两部分通过劈形波导过渡连接.各部分经过优化设计,可以同时实现高的耦合效率和高内量子效率.对于器件的材料结构、电学和光学特性进行了仔细的分析与设计.结果表明,优化设计的器件其外量子效率可达28%,比已经报道的直波导探测器的外量子效率提高2～3倍.而上升下降时间仍然保持在110ps左右.

三端1.3μm InGaAsP/Inp双区共腔激光器

于2010-11-23批量导入

Fabrication of 1.3 mu m Si-based MEMS tunable optical filter

In this paper we report the fabrication of 1.3 mum Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them.

1.3 mu m GaInNAs/GaAs quantum well lasers and photodetectors

The growth of GalnNAs/GaAs quantum well (QW) has been investigated by solid-source molecular beam epitaxy (MBE). N was introduced by a dc-active plasma source. Highest N concentration of 2.6% in GaInNAs/GaAs QW was obtained, corresponding to the photoluminescence peak wavelength of 1.57 mum at 10K. The nitrogen incorporation behavior in MBE growth and the quality improvement of the QW have been studied in detail. 1.3 mum GaInNAs/GaAs SQW laser and MQW resonant-cavity enhanced photodetector have been achieved.

1.3 mu m GaInNAs/GaAs multiple-quantum-wells resonant-cavity-enhanced photodetectors

A GaInNAs/GaAs multiple quantum well (MQW) resonant-cavity enhanced (RCE) photodetector operating at 1.3 mum with the full-width at half-maximum of 5.5 nm was demonstrated. The GaInNAs RCE photodetector was grown by molecular-beam epitaxy using an ion-removed dc-plasma cell as nitrogen source. GaInNAs/GaAs MQW shows a strong exciton peak at room temperature that is very beneficial for applications in long-wavelength absorption devices. For a 100-mum diameter RCE photodetector, the dark current is 20 and 32 pA at biases of 0 and 6 V, respectively, and the breakdown voltage is -18 V. The measured 3-dB bandwidth is 308 MHz. The reasons resulting in the poor high speed property were analyzed. The tunable wavelength of 18 nm with the angle of incident light was observed.