Fabrication of 1.3 mu m Si-based MEMS tunable optical filter
| Data(s) |
2002
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|---|---|
| Resumo |
In this paper we report the fabrication of 1.3 mum Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them. In this paper we report the fabrication of 1.3 mum Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them. 于2010-10-29批量导入 Made available in DSpace on 2010-10-29T06:36:26Z (GMT). No. of bitstreams: 1 2796.pdf: 162592 bytes, checksum: 1f3fd0f6fc50256ce5c62c268a481ebc (MD5) Previous issue date: 2002 SPIE.; Chinese Opt Soc. Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China SPIE.; Chinese Opt Soc. |
| Identificador | |
| Idioma(s) |
英语 |
| Publicador |
SPIE-INT SOC OPTICAL ENGINEERING 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
| Fonte |
Zuo YH; Huang CJ; Cheng BW; Mao RW; Luo LP; Gao JH; Bai YX; Wang LC; Yu JZ; Wang QM .Fabrication of 1.3 mu m Si-based MEMS tunable optical filter .见：SPIE-INT SOC OPTICAL ENGINEERING .MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS, 4928,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2002,73-76 |
| Palavras-Chave | #光电子学 #Fabry-Perot #tunable filter #surface micromaching #CAVITY |
| Tipo |
会议论文 |
