微电子与微电子机械系统(MEMS)中的现代光学测试技术

介绍了微电子和微电子机械系统 (MEMS)中几种常用的变形和形貌测量方法以及相关的测量设备。其中相移云纹干涉技术用于微电子器件的面内位移测量 ,灵敏度可达到纳米量级。显微栅线投影技术用于MEMS的离面变形和形貌测量 ,灵敏度可达 0 .1微米。

Information preservation (IP) method in simulation of internal rarefied gas flows in MEMS

This paper reviews firstly methods for treating low speed rarefied gas flows: the linearised Boltzmann equation, the Lattice Boltzmann method (LBM), the Navier-Stokes equation plus slip boundary conditions and the DSMC method, and discusses the difficulties in simulating low speed transitional MEMS flows, especially the internal flows. In particular, the present version of the LBM is shown unfeasible for simulation of MEMS flow in transitional regime. The information preservation (IP) method overcomes the difficulty of the statistical simulation caused by the small information to noise ratio for low speed flows by preserving the average information of the enormous number of molecules a simulated molecule represents. A kind of validation of the method is given in this paper. The specificities of the internal flows in MEMS, i.e. the low speed and the large length to width ratio, result in the problem of elliptic nature of the necessity to regulate the inlet and outlet boundary conditions that influence each other. Through the example of the IP calculation of the microchannel (thousands m ? long) flow it is shown that the adoption of the conservative scheme of the mass conservation equation and the super relaxation method resolves this problem successfully. With employment of the same measures the IP method solves the thin film air bearing problem in transitional regime for authentic hard disc write/read head length ( 1000 L m ? = ) and provides pressure distribution in full agreement with the generalized Reynolds equation, while before this the DSMC check of the validity of the Reynolds equation was done only for short ( 5 L m ? = ) drive head. The author suggests degenerate the Reynolds equation to solve the microchannel flow problem in transitional regime, thus provides a means with merit of strict kinetic theory for testing various methods intending to treat the internal MEMS flows.

EXPERIMENTAL AND THEORETICAL STUDY OF BINARY DROPLET HEAD-ON COLLISIONS IN MEMS

The experimental and theoretical investigations into the head-on collision between a landing droplet with another one resting on the PDMS substrate were addressed in this talk. The colliding process of the two droplets was recorded with highspeed camera. Four different responses after collision were observed in our experiments: complete rebound, coalescence, partial rebound with conglutination, and coalescence accompanied by conglutination. The contact time between the two colliding droplets was found to be in the range of 10-20 milliseconds. For the complete bouncing case, Hertz contact model was applied to estimate the contact time of the binary head-on colliding droplets with both the droplets considered as elastic bodies. The estimated contact time was in good agreement with the experimental result.

模拟MEMS中气体流动的工具——信息保存法

MEMS中气体流动因特征尺度小而是稀薄气体的领域,本文首先介绍处理低速稀薄气体流动的一些方法:线化Boltzmann方程,Lattice Boltzmann方法,加滑移边界的Navier-Stoks方程,以及DSMC方法,并讨论它们模拟MEMS中过渡领域低速流动所遇到的困难。信息保存法克服了流速低使得信息噪声比小引起统计模拟的困难,已成功模拟了一些一维和二维问题。MEMS中流速低和大的长宽比的特点还引起出入口边界条件相互影响需要协调的问题,通过微槽道流动的算例,在模拟中采用守恒形式的质量守恒方程和超松弛法成功地解决了这一问题。处理有温度变化的MEMS流动问题和跨越领域的混合算法是重要的问题,本文用信息保存法也进行了有益的尝试。

MEMS结构残余变形的SEM电镜云纹法实验研究

<正>微电子机械系统(MEMS)是集机械电子元件为一体具有传感、动作、控制操纵功能的集成系统。其结构由多层薄膜构成。它的制作工艺与宏观构件不同,是由薄膜刻蚀而制得的。制作过程中就可能形成残余应力。在去除牺牲层过程中残余应力释放而使得构件形状尺寸发生变化。实验结果表明,过大的残余应力致使MEMS构件发生翘曲破坏。由此可见,研究MEMS构件的残余应力是其设计中相当重要的问题。残余应力一般是通过残余变形即残余应变的量测而间接获得,因此,如何测量残余应变是十分重要问题。

MEMS basados en aleaciones con memoria de forma magnética

Estudio del comportamiento frente a campos magnéticos y cambios de temperatura de unas aleaciones de NiMnGa depositadas en forma de película delgada sobre voladizos esculpidos en Silicio

Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force

The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, eta, is defined, and the critical gap distance, g(cr), between the mainplate and the substrate is derived. According to the values of eta and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed. (C) 2008 Elsevier Inc. All rights reserved.

MEMS for Diabetic Retinopathy

As the worldwide prevalence of diabetes mellitus continues to increase, diabetic retinopathy remains the leading cause of visual impairment and blindness in many developed countries. Between 32 to 40 percent of about 246 million people with diabetes develop diabetic retinopathy. Approximately 4.1 million American adults 40 years and older are affected by diabetic retinopathy. This glucose-induced microvascular disease progressively damages the tiny blood vessels that nourish the retina, the light-sensitive tissue at the back of the eye, leading to retinal ischemia (i.e., inadequate blood flow), retinal hypoxia (i.e., oxygen deprivation), and retinal nerve cell degeneration or death. It is a most serious sight-threatening complication of diabetes, resulting in significant irreversible vision loss, and even total blindness.

Unfortunately, although current treatments of diabetic retinopathy (i.e., laser therapy, vitrectomy surgery and anti-VEGF therapy) can reduce vision loss, they only slow down but cannot stop the degradation of the retina. Patients require repeated treatment to protect their sight. The current treatments also have significant drawbacks. Laser therapy is focused on preserving the macula, the area of the retina that is responsible for sharp, clear, central vision, by sacrificing the peripheral retina since there is only limited oxygen supply. Therefore, laser therapy results in a constricted peripheral visual field, reduced color vision, delayed dark adaptation, and weakened night vision. Vitrectomy surgery increases the risk of neovascular glaucoma, another devastating ocular disease, characterized by the proliferation of fibrovascular tissue in the anterior chamber angle. Anti-VEGF agents have potential adverse effects, and currently there is insufficient evidence to recommend their routine use.

In this work, for the first time, a paradigm shift in the treatment of diabetic retinopathy is proposed: providing localized, supplemental oxygen to the ischemic tissue via an implantable MEMS device. The retinal architecture (e.g., thickness, cell densities, layered structure, etc.) of the rabbit eye exposed to ischemic hypoxic injuries was well preserved after targeted oxygen delivery to the hypoxic tissue, showing that the use of an external source of oxygen could improve the retinal oxygenation and prevent the progression of the ischemic cascade.

The proposed MEMS device transports oxygen from an oxygen-rich space to the oxygen-deficient vitreous, the gel-like fluid that fills the inside of the eye, and then to the ischemic retina. This oxygen transport process is purely passive and completely driven by the gradient of oxygen partial pressure (pO₂). Two types of devices were designed. For the first type, the oxygen-rich space is underneath the conjunctiva, a membrane covering the sclera (white part of the eye), beneath the eyelids and highly permeable to oxygen in the atmosphere when the eye is open. Therefore, sub-conjunctival pO₂ is very high during the daytime. For the second type, the oxygen-rich space is inside the device since pure oxygen is needle-injected into the device on a regular basis.

To prevent too fast or too slow permeation of oxygen through the device that is made of parylene and silicone (two widely used biocompatible polymers in medical devices), the material properties of the hybrid parylene/silicone were investigated, including mechanical behaviors, permeation rates, and adhesive forces. Then the thicknesses of parylene and silicone became important design parameters that were fine-tuned to reach the optimal oxygen permeation rate.

The passive MEMS oxygen transporter devices were designed, built, and tested in both bench-top artificial eye models and in-vitro porcine cadaver eyes. The 3D unsteady saccade-induced laminar flow of water inside the eye model was modeled by computational fluid dynamics to study the convective transport of oxygen inside the eye induced by saccade (rapid eye movement). The saccade-enhanced transport effect was also demonstrated experimentally. Acute in-vivo animal experiments were performed in rabbits and dogs to verify the surgical procedure and the device functionality. Various hypotheses were confirmed both experimentally and computationally, suggesting that both the two types of devices are very promising to cure diabetic retinopathy. The chronic implantation of devices in ischemic dog eyes is still underway.

The proposed MEMS oxygen transporter devices can be also applied to treat other ocular and systemic diseases accompanied by retinal ischemia, such as central retinal artery occlusion, carotid artery disease, and some form of glaucoma.