Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

On certain discrete inequalities and their continous analogues

In a 1955 paper, Ky Fan, Olga Taussky, and John Todd presented discrete analogues of inequalities of Wirtinger type, and by taking limits they were able to recover the continuous inequalities. We generalize their techniques to mixed and higher derivatives and inequalities with weight functions in the integrals. We have also considered analogues of inequalities of Müller and Redheffer and have used these inequalities to derive a necessary and sufficient condition on ordered pairs of numbers so that the first number is the square norm of the k^th derivative of some periodic function and the second number is the square norm of the m^th derivative of the same periodic function.

A novel method to measure coma aberration of projection system

A novel method to measure coma aberration by pattern displacements at different defocus positions is proposed in this paper. The effect of defocus on coma-induced pattern displacement is analyzed. The measuring principle of the method is described in detail. Using the simulation program PROLITH, the proportionality factors between pattern displacement and coma aberration at different defocus positions are calculated. It is proved that the method is simple to perform and the measurement accuracy of coma can increase approximately by 25% by this novel method. (c) 2006 Elsevier GmbH. All rights reserved.

Fluid-structure Interactions of Inverted Leaves and Flags

Interactions between fluid flows and elastic bodies are ubiquitous in nature. One such phenomena that is encountered on a daily basis is the flapping and fluttering of leaves in the wind. The fluid-structure interaction that governs the physics of a leaf in the wind is poorly understood at best and has potential applications in biomechanics, vehicle design, and energy conversion. We build upon previous work on the flapping dynamics of inverted flags, which are cantilevered elastic sheets with free leading edge and fixed trailing edge that display unique large amplitude oscillatory behaviors. We model a leaf in the laboratory using modified inverted flags, experimentally probing the governing parameters behind leaf fluttering as well as shedding light on the physics behind the inverted flag phenomena. The behavior of these "inverted leaves" studied here display sensitive dependence on two biomechanically relevant parameters, stem-to-leaf rigidity and stem-to-leaf length. In addition, leaves on a tree are not often found alone. We seek to understand the complex interactions of multiple fluttering and flapping leaves by way of examining the interactions between pairs of inverted flags. Coupling through their flow fields, pairs of inverted flags exhibit striking emergent phenomena. We report these observed dynamical behaviors and the conditions upon which they arise.

Wavefront measurement of double-clad pulsed ytterbium fiber laser

Because of high efficiencies, compact structure, and excellent heat dissipation, high-power fiber lasers are extremely useful for applications such as cutting, welding, precision drilling, trimming, sensing, optical transmitter, material processing, micromachining, and so on. However, the wavefront of the double clad fiber laser doped with ytterbium is still unknown. In this paper, wavefront of a fiber laser is measured and the traditional Hartmann-shack wavefront sensing method is adopted. We measured a double clad fiber laser doped with ytterbium which produces pulse wave output at infrared wavelength. The wavefront shape and contour are reconstructed and the result shows that wavefront is slightly focused and not an ideal plane wavefront. Wavefront measurement of fiber laser will be useful to improving the lasers' performance and developing the coherent technique for its applications.

Turbulent buoyant jets into stratified or flowing ambient fluids

Theoretical and experimental studies were made on two classes of buoyant jet problems, namely:

1) an inclined, round buoyant yet in a stagnant environment with linear density-stratification;

2) a round buoyant jet in a uniform cross stream of homogenous density.

Using the integral technique of analysis, assuming similarity, predictions can be made for jet trajectory, widths, and dilution ratios, in a density-stratified or flowing environment. Such information is of great importance in the design of disposal systems for sewage effluent into the ocean or waste gases into the atmosphere.

The present study of a buoyant jet in a stagnant environment has extended the Morton type of analysis to cover the effect of the initial angle of discharge. Numerical solutions have been presented for a range of initial conditions. Laboratory experiments were conducted for photographic observations of the trajectories of dyed jets. In general the observed jet forms agreed well with the calculated trajectories and nominal half widths when the value of the entrainment coefficient was taken to be α = 0.082, as previously suggested by Morton.

The problem of a buoyant jet in a uniform cross stream was analyzed by assuming an entrainment mechanism based upon the vector difference between the characteristic jet velocity and the ambient velocity. The effect of the unbalanced pressure field on the sides of the jet flow was approximated by a gross drag term. Laboratory flume experiments with sinking jets which are directly analogous to buoyant jets were performed. Salt solutions were injected into fresh water at the free surface in a flume. The jet trajectories, dilution ratios and jet half widths were determined by conductivity measurements. The entrainment coefficient, α, and drag coefficient, C_d, were found from the observed jet trajectories and dilution ratios. In the ten cases studied where jet Froude number ranged from 10 to 80 and velocity ratio (jet: current) K from 4 to 16, α varied from 0.4 to 0.5 and C_d from 1.7 to 0.1. The jet mixing motion for distance within 250D was found to be dominated by the self-generated turbulence, rather than the free-stream turbulence. Similarity of concentration profiles has also been discussed.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks

A novel method for measuring the coma of a lithographic projection system is proposed and the principle of the method is described. By utilizing mirror-symmetry marks, the adverse effects of axial aberrations on the coma measurement are avoided. Experimental results demonstrated that the method has high accuracy. Compared with TAMIS, the conventional technique used for coma measurement, the method is more reliable because the influences of the process factors on the lateral displacements have been considered. (c) 2006 Elsevier Ltd. All rights reserved.

Transonic wind tunnel for investigation of turbomachinery blades

The design of a two-stream wind tunnel was undertaken to allow the simulation and study of certain features of the flow field around the blades of high-speed axial-flow turbomachineries. The mixing of the two parallel streams with designed Mach numbers respectively equal to 1.4 and 0.7 will simulate the transonic Mach number distribution generally obtained along the tips of the first stage blades in large bypass-fan engines.

The GALCIT hypersonic compressor plant will be used as an air supply for the wind tunnel, and consequently the calculations contained in the first chapter are derived from the characteristics and the performance of this plant.

The transonic part of the nozzle is computed by using a method developed by K. O. Friedrichs. This method consists essentially of expanding the coordinates and the characteristics of the flow in power series. The development begins with prescribing, more or less arbitrarily, a Mach number distribution along the centerline of the nozzle. This method has been programmed for an IBM 360 computer to define the wall contour of the nozzle.

A further computation is carried out to correct the contour for boundary layer buildup. This boundary layer analysis included geometry, pressure gradient, and Mach number effects. The subsonic nozzle is calculated {including boundary layer buildup) by using the same computer programs. Finally, the mixing zone downstream of the splitter plate was investigated to prescribe the wall contour correction necessary to ensure a constant-pressure test section.

A kinetic theory description for external spherical flows with arbitrary Knudsen number by a moment method

The Maxwell integral equations of transfer are applied to a series of problems involving flows of arbitrary density gases about spheres. As suggested by Lees a two sided Maxwellian-like weighting function containing a number of free parameters is utilized and a sufficient number of partial differential moment equations is used to determine these parameters. Maxwell's inverse fifth-power force law is used to simplify the evaluation of the collision integrals appearing in the moment equations. All flow quantities are then determined by integration of the weighting function which results from the solution of the differential moment system. Three problems are treated: the heat-flux from a slightly heated sphere at rest in an infinite gas; the velocity field and drag of a slowly moving sphere in an unbounded space; the velocity field and drag torque on a slowly rotating sphere. Solutions to the third problem are found to both first and second-order in surface Mach number with the secondary centrifugal fan motion being of particular interest. Singular aspects of the moment method are encountered in the last two problems and an asymptotic study of these difficulties leads to a formal criterion for a "well posed" moment system. The previously unanswered question of just how many moments must be used in a specific problem is now clarified to a great extent.

Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

Even aberration measurement of lithographic projection system based on optimized phase-shifting marks

In the present paper, we propose a novel method for measuring the even aberrations of lithographic projection optics by use of optimized phase-shifting marks on the test mask. The line/space ratio of the phase-shifting marks is optimized to obtain the maximum sensitivities of Zernike coefficients corresponding to even aberrations. Spherical aberration and astigmatism can be calculated from the focus shifts of phase-shifting gratings oriented at 0 degrees, 45 degrees, 90 degrees and 135 degrees at multiple illumination settings. The PROLITH simulation results show that, the measurement accuracy of spherical aberration and astigmatism obviously increase, after the optimization of the measurement mark. (C) 2008 Elsevier B.V. All rights reserved.