Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

Autoria(s): Zicheng Qiu; Xiangzhao Wang; Qiongyan Yuan; and Fan Wang
Data(s)

2009
Identificador

http://ir.siom.ac.cn/handle/181231/6587

http://www.irgrid.ac.cn/handle/1471x/10748
Idioma(s)

中文
Fonte

Zicheng Qiu, Xiangzhao Wang, Qiongyan Yuan, and Fan Wang.Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width.Applied Optics,2009,48(19):
Palavras-Chave #光学
Tipo

期刊论文
Acesso ao item digital