Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools
Data(s) |
2006
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Resumo |
As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Wang Fan;王向朝;马明英.,Appl. Optics,2006,45(24):6086-6093 |
Palavras-Chave | #LENS ABERRATIONS #METROLOGY #ALIGNMENT #IMAGE |
Tipo |
期刊论文 |