Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

Autoria(s): Zicheng Qiu; Xiangzhao Wang; Qiongyan Yuan; and Fan Wang
Data(s)

10/01/2009
Identificador

http://ir.siom.ac.cn/handle/181231/6344

http://www.irgrid.ac.cn/handle/1471x/10720
Idioma(s)

中文
Fonte

Zicheng Qiu,Xiangzhao Wang,Qiongyan Yuan,and Fan Wang.Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width.APPLIED OPTICS,2009,48(2):261-269
Palavras-Chave #光学::物理光学 #光学::物理光学::干涉与衍射 #激光技术 #激光技术::光检测技术
Tipo

期刊论文
Acesso ao item digital