The Nonlinear Phenomena Of Thin Polydimethylsiloxane (Pdms) Films In Electrowetting

Electrowetting (EW) is an effective way to manipulate small volume liquid in micro- and nano-devices, for it can improve its wettability. Since the late 1990s, electrowetting-on-dielectric (EWOD) has been used widely in bio-MEMS, lab-on-a-chip, etc. Polydimethlsiloxane (PDMS) is extensively utilized as base materials in the fabrication of biomedical micro- and nano-devices. The properties of thin PDMS films used as dielectric layer in EW are studied in this paper. The experimental results show that the thin PDMS films exhibit good properties in EWOD. As to PDMS films with different thicknesses, a threshold voltage and a hysteresis were observed in the EIWOD experiments.

Experimental Observation Of Electrical Instability Of Droplets On Dielectric Layer

Polydimethylsiloxane ( PDMS) has become the most widely used silicon-based organic polymer in bio-MEMS/NEMS devices. However, the inherent hydrophobic nature of PDMS hinders its wide applications in bio-MEMS/NEMS for efficient transport of liquids. Electrowetting is a useful tool to reduce the apparent contact angle of partially wetting conductive liquids and has been utilized widely in bio-MEMS/NEMS. Our experimental results show that the thin PDMS membranes exhibit good properties in electrowetting-on-dielectric. The electrical instability phenomenon of droplets was observed in our experiment. The sessile droplet lying on the PDMS membrane will lose its stability with the touch of the wire electrode to make the apparent contact angle change suddenly larger than 35 degrees. Contact mode can protect the dielectric layer from electrical breakdown effectively. Electrical breakdown process of dielectric layer was recorded by a high speed camera. It is found experimentally that a PDMS membrane of 4.8 mu m thick will not be destroyed due to the electric breakdown even at 800 V in the contact mode.

Influence Of Different Amount Of Au On The Wetting Behavior Of Pdms Membrane

Polydimethylsiloxane (PDMS) has been widely used as a base material for bio-MEMS/NEMS devices. It is difficult for PDMS to transfer and spread aqueous solution as a kind of highly hydrophobic material. Therefore, surface modification is necessary for PDMS to make it hydrophilic. In this paper, a method of hydrophilization of PDMS surface is proposed. Gold is sputtered to the PDMS substrate by sputter coater in different average thicknesses. Relationship between the average thickness of gold on the PDMS substrate and the contact angle of the surface was studied. It was found that even gold of average thickness less than 1 nm can result in about 25 degrees change of contact angle. AFM is also used to get topographic information of PDMS surface coated with gold. Three cases are classified with different amount of Au: (1) Heterogeneous zone; (2) Transition zone; (3) Film zone. For heterogeneous zone, a simple model about heterogeneous phase wetting is put forward to interpret this phenomenon.

聚二甲基硅氧烷（PDMS）表面液滴动力学的实验研究

液滴是自然界中普遍存在的一种物质形态。非连续微流体（液滴）是近年来微流体技术重要发展方向之一。对液滴的产生、启动、移动、合并、分离和碰撞过程的研究对于航天、微纳系统、电子显示、计算机冷却、喷墨、生物医学等学科领域有着重要的应用价值。液滴属于软物质，其力学性质介于流体和固体之间，其类固体（solid-like）行为来自于曲率产生的Laplace压力和表面张力的约束。对液滴动力学行为的研究有着重要的学术价值。 本文的主要工作是针对生物微电子机械系统（Bio-MEMS）以及柔性微纳电子加工中常用的材料聚二甲基硅氧烷（Polydimethylsiloxane，PDMS）为基底的液滴动力学实验研究。 液滴是一个理想的微反应器，许多实验可以集成在一个液滴或多个液滴内完成。液滴本身的动力学特性对于实验的完成效率和质量有着重要的影响。液滴的微操控技术包括多相流法、电润湿法、热毛细管法、介电泳法等。液滴的动力学特性受到基底的影响非常大，包括基频、振动模态、运动过程等均随基底的润湿性、弹性模量的变化而有所变化。 在Bio-MEMS以及柔性微纳电子加工当中，PDMS扮演着越来越重要的角色，尤其是PDMS的润湿性和电润湿特性。目前的PDMS在Bio-MEMS当中主要是用于制备各种微流道。常见的问题主要是一方面PDMS是疏水材料，影响流体的输运。另一方面是液体在这种低Reynolds数情况下不易混合，反应效率低。本文提出了在PDMS表面溅射纳米厚度的金来减小PDMS表观接触角的方法。这种方式在特定喷金量的情况下可以在PDMS表面产生多层次的压应力波纹。这种压应力波纹对于柔性微纳电子加工，以及微流道中加速流体混合有着非常重要的作用。 电润湿是另一种可以使PDMS亲水化的方法。实验证明，PDMS具有较好的电润湿性质。此外电润湿也是目前操纵液滴的主要方式。目前一个常见的问题是电击穿现象阻碍了驱动电压的低压化，且低Reynolds数情况下液滴的混合效率偏低。此外电极还会由于少量电解的发生导致腐蚀及对液体样品的污染。本文提出了接触式的电润湿，在电极逐渐触碰液滴的过程中，液滴发生百Hz的失稳振动，稳定后接触角减小。这种电润湿模式可以有效的提高临界击穿电压，避免液滴被腐蚀后的电极污染，同时可以加快液滴的混合效率。其失稳特征时间在10 ms量级，这恰是所用液滴特征尺度在1 mm左右的电润湿器件的最快响应时间。并采用液滴振动的理论估算了液滴的失稳时间，同时还考虑了基底润湿性对液滴振动过程的影响。 液滴的启动是电润湿操控液滴过程中的重要环节。通常的液滴启动都是在非连续基底上依靠逻辑电路产生的电势变化来驱动液滴。无论是逻辑电路的设计还是驱动装置的加工都非常复杂。本文首次实现了在超疏水生物样品荷叶上的液滴启动，启动速度为数十毫米/秒，启动时间为10 ms量级。并利用PDMS成功的仿制了荷叶结构实现了超疏水的PDMS表面，荷叶同仿荷叶的PDMS超疏水表面具有相近的润湿性。 在数字微流体操控液滴的过程中，液滴的合并涉及液滴的碰撞，而且MEMS系统当中利用液滴撞击进行冷却的实验已经有所开展。同时理解液滴碰撞还对许多领域包括生物、化学、喷墨、大气物理等有着非常重要的作用。本文实验研究了Weber数和毛细数对液滴碰撞过程的影响，通过改变Weber数和毛细数得到了四种不同的响应模式。

Numerical Analysis of Theoretical Model of the Rf MEMs Switches

An improved electromechanical model of the RF MEMS (radio frequency microelectromechanical systems) switches is introduced, in which the effects of intrinsic residual stress from fabrication processes, axial stress due to stretching of beam, and fringing field are taken into account. Four dimensionless numbers are derived from the governing equation of the developed model. A semi-analytical method is developed to calculate the behavior of the RF MEMS switches. Subsequently the influence of the material and geometry parameters on the behavior of the structure is analyzed and compared, and the corresponding analysis with the dimensionless numbers is conducted too. The quantitative relationship between the presented parameters and the critical pull-in voltage is obtained, and the relative importance of those parameters is given.

Nano-Hardness Tester and its Application in MEMS

微机电系统(MEMS)技术的迅速崛起,推动了对其所用材料和结构的力学性能研究。简要介绍纳米硬度技术的发展展、理论模型和MTS公司的Nano Indenter XP系统的配置、测量原理及功能。并根据我们的一些研究结果,说明它在微机电系统中的应用。

Mechanics of Adhesion in MEMS-a Review

A review is presented of the mechanics of microscale adhesion in microelectromechanical systems (MEMS). Some governing dimensionless numbers such as Tabor number, adhesion parameter and peel number for microscale elastic adhesion contact are discussed in detail. The peel number is modified for the elastic contact between a rough surface in contact with a smooth plane. Roughness ratio is introduced to characterize the relative importance of surface roughness for microscale adhesion contact, and three kinds of asperity height distributions are discussed: Gaussian, fractal, and exponential distributions. Both Gaussian and exponential distributions are found to be special cases of fractal distribution. Casimir force induced adhesion in MEMS, and adhesion of carbon nanotubes to a substrate are also discussed. Finally, microscale plastic adhesion contact theory is briefly reviewed, and it is found that the dimensionless number, plasticity index of various forms, can be expressed by the roughness ratio.

Deflections and Curvatures of a Film–Substrate Structure with the Presence of Gradient Stress in MEMS Applications

The close form solutions of deflections and curvatures for a film–substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film–substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film–substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film–substrate composite structure with the presence of gradient stress.

Analysis of residual stress gradient in MEMS multi-layer structure

Residual stress and its gradient through the thickness are among the most important properties of as-deposited films. Recently, a new mechanism based on a revised Thomas-Fermi-Dirac (TFD) model was proposed for the origin of intrinsic stress in solid film

Failure modes of doubly supported capacitive RF MEMS switches

For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.

Electromechanical Model of RF MEMS Switches

With the recent rapid growth of Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS) switches, there has developed an emergent requirement for more accurate theoretical models to predict their electromechanical behaviors. Many parameters exist in the analysis of the behavior of the switch, and it is inconvenient for further study. In this paper, an improved model is introduced, considering simultaneously axial stress, residual stress, and fringing-field effect of the fixed-fixed bridge structure. To avoid any unnecessary repetitive model tests and numerical simulation for RF MEMS switches, some dimensionless numbers are derived by making governing equation dimensionless. The electromechanical behavior of the fixed-fixed bridge structure of RF MEMS switches is totally determined by these dimensionless numbers.

材料磨损与MEMS中的磨损现象

　磨损是材料和机械失效的主要原因之一。本文介绍了近年来材料磨损性能研究的进展,磨损的几种破坏机 制以及相应的磨损理论模型,并介绍了MEMS 中磨损研究的现状。

Measurement of Mechanical Properties of MEMS Materials

微电子机械系统（MEMS）技术的迅速崛起,推动了所用材料微尺度力学性能测试技术的发展.首先按作用方式将实验分成压痕/划痕、弯曲、拉伸、扭转四大类,系统介绍检测MEMS材料微尺度力学性能的微型试样、测试方法及其实验结果.测试材料主要有硅、氧化硅、氮化硅和一些金属.实验结果主要包括基本的力学性能参数如弹性模量、残余应力、屈服强度、断裂强度和疲劳强度等.最后,简要分析了未来的发展需求.

Stiction and Anti-Stiction in Mems and Nems

Stiction in microelectromechanical systems (MEMS) has been a major failure mode ever since the advent of surface micromachining in the 80s of the last century due to large surface-area-to-volume ratio. Even now when solutions to this problem are emerging, such as self-assembled monolayer (SAM) and other measures, stiction remains one of the most catastrophic failure modes in MEMS. A review is presented in this paper on stiction and anti-stiction in MEMS and nanoelectromechanical systems (NEMS). First, some new experimental observations of stiction in radio frequency (RF) MEMS switch and micromachined accelerometers are presented. Second, some criteria for stiction of microstructures in MEMS and NEMS due to surface forces (such as capillary, electrostatic, van der Waals, Casimir forces, etc.) are reviewed. The influence of surface roughness and environmental conditions (relative humidity and temperature) on stiction are also discussed. As hydrophobic films, the self-assembled monolayers (SAMs) turn out able to prevent release-related stiction effectively. The anti-stiction of SAMs in MEMS is reviewed in the last part.