Technology of Silicon-Based MEMs

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Autoria(s): 郝一龙; 张立宪; 李婷

Data(s)	2001
Identificador	http://dspace.imech.ac.cn/handle/311007/16769 http://www.irgrid.ac.cn/handle/1471x/1416
Idioma(s)	英语
Palavras-Chave	#力学
Tipo	期刊论文