Analysis of residual stress gradient in MEMS multi-layer structure
| Data(s) |
2002
|
|---|---|
| Resumo |
Residual stress and its gradient through the thickness are among the most important properties of as-deposited films. Recently, a new mechanism based on a revised Thomas-Fermi-Dirac (TFD) model was proposed for the origin of intrinsic stress in solid film |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
International Journal of Nonlinear Sciences and Numerical Simulation,2002,3(0):727-730 |
| Palavras-Chave | #力学 |
| Tipo |
期刊论文 |
