纳米硬度计在MEMS力学检测中的应用

纳米硬度计是一种能提供103mm-10-2mm尺度材料或结构微力学性能检测的先进仪器。采用纳米压痕技术，研究薄膜材料的弹性模量和硬度随压痕深度的变化规律以及薄膜厚度测量，微桥弯曲变形测量的方法。采用纳米划痕技术，研究薄膜的表面粗糙度、临界附着力和摩擦系数测量的方法。该仪器能广泛应用于MEMS的力学检测，并有望成为这一领域内的标准力学检测设备。

微电子与微机械系统（MEMS）中的现代光学测试技术

介绍了微电子和微电子机械系统（MEMS）中几种常用的变形和形貌测量方法以及相关的测量设备。其中相移云纹干涉技术用于微电子器件的面内位移测量，灵敏度可达到纳米量级。显微栅线投影技术用于MEMS的离面变形和形貌测量，灵敏度可达0.1微米。

Squeeze-film Effects in MEMS Devices with Perforated Plates for Small Amplitude Vibration

Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modified Reynolds equation (MRE). The analytical analysis reckons in most important influential factors: compressibility of the air, border effects, and the resistance caused by vertical air flow passing through perforated holes. It is found that consideration of air compressibility is necessary for high operating frequency and small ratio of the plate width to the attenuation length. The analytical results presented in this paper agree with ANSYS simulation results better than that under the air incompressibility assumption. The analytical analysis can be used to estimate the squeeze-film effects causing damping and stiffness added to the system. Since the value of Reynolds number involved in this paper is low (< 1), inertial effects are neglected.

Size Effects in Micro-bending Deformation of MEMS Devices Based on the Discrete Dislocation Theory

In the present research, the discrete dislocation theory is used to analyze the size effect phenomena for the MEMS devices undergoing micro-bending load. A consistent result with the experimental one in literature is obtained. In order to check the effectiveness to use the discrete dislocation theory in predicting the size effect, both the basic version theory and the updated one are adopted simultaneously. The normalized stress-strain relations of the material are obtained for different plate thickness or for different obstacle density. The prediction results are compared with experimental results.

A moving-coil designed micro-mechanics tester with application on MEMS

A moving-coil designed micro-mechanics tester, named as MicroUTM (universal testing machine), is in-house developed in this paper for micro-mechanics tests. The main component is a moving coil suspended in a uniform magnetic field through a set of springs. When a current passes through the coil, the electromagnetic force is proportional to the magnitude of the current, so the load can easily be measured by the current. The displacement is measured using a capacitive sensor. The load is calibrated using a Sartorius BP211D analytical balance, with a resolution/range of 0.01 mg/80 g or 0.1 mg/210 g. The displacement is calibrated using a HEIDENHAIN CT-6002 length gauge with an accuracy of +/- 0.1 mu m. The calibration results show that the load range is +/- 1 N and the displacement range is +/- 300 mu m. The noise levels of the load and displacement are 50 mu N and 150 nm, respectively. The nonlinearity of the load is only 0.2%. Several in-plane load tests of the MEMS micro-cantilever are performed using this tester. Experimental results, with excellent repeatability, demonstrate the reliability of the load measurement as well as the flexible function of this tester.

Deflections and curvatures of a film-substrate structure with the presence of gradient stress in MEMS applications

The close form solutions of deflections and curvatures for a film-substrate composite structure with the presence of gradient stress are derived. With the definition of more precise kinematic assumption, the effect of axial loading due to residual gradient stress is incorporated in the governing equation. The curvature of film-substrate with the presence of gradient stress is shown to be nonuniform when the axial loading is nonzero. When the axial loading is zero, the curvature expressions of some structures derived in this paper recover the previous ones which assume the uniform curvature. Because residual gradient stress results in both moment and axial loading inside the film-substrate composite structure, measuring both the deflection and curvature is proposed as a safe way to uniquely determine the residual stress state inside a film-substrate composite structure with the presence of gradient stress.

Stability and bifurcation behaviour of electrostatic torsional NEMS varactor influenced by dispersion forces

The influences of Casimir and van der Waals forces on the nano-electromechanical systems (NEMS) electrostatic torsional varactor are studied. A one degree of freedom, the torsional angle, is adopted, and the bifurcation behaviour of the NEMS torsional varactor is investigated. There are two bifurcation points, one of which is a Hopf bifurcation point and the other is an unstable saddle point. The phase portraits are also drawn, in which periodic orbits are around the Hopf bifurcation point, but the periodic orbit will break into a homoclinic orbit when meeting the unstable saddle point.

MEMS材料力学性能的测试技术

微电子机械系统（MEMS）技术的迅速崛起，推动了所用材料微尺度力学性能测试技术的发展，首先按作用方式将实验分成压痕／划痕、弯曲、拉伸、扭转四大类，系统介绍检测MEMS材料微尺度力学性能的微型试样、测试方法及其实验结果。测试材料主要有硅、氧化硅、氮化硅和一些金属。实验结果主要包括基本的力学性能参数如弹性模量、残余应力、屈服强度、断裂强度和疲劳强度等。最后，简要分析了未来的发展需求。

MEMS器件的计算机辅助设计与模拟

概要论述了微电子机械系统的计算机辅助设计和模拟过程，分析了MEMS CAD系统所应具有的主要内容和系统模拟中的关键问题，讨论了目前经常采用的各种模拟系 统的模拟形式和应 用范围。并结合静电微马达与微米/纳米镊子实例，分析了模块化的CAD软件结构形式以及所用MEMS材料的数据库建立和应用连接，所提出并采用的开发方式适用于微传感器及微执行器等微系统器件的设计与模拟。

硅基MEMS技术

结合MEMS技术的发展历史 ,概括了当今硅基MEMS加工技术的发展方向。指出表面牺牲层技术和体硅加工技术是硅基MEMS加工技术的两条发展主线 ;表面牺牲层技术向多层、集成化方向发展 ;体硅工艺主要表现为键合与深刻蚀技术的组合 ,追求大质量块和低应力以及三维加工。SOI技术是新一代的体硅工艺发展方向 ;标准化加工是MEMS研究的重要手段

微电子与微电子机械系统(MEMS)中的现代光学测试技术

介绍了微电子和微电子机械系统 (MEMS)中几种常用的变形和形貌测量方法以及相关的测量设备。其中相移云纹干涉技术用于微电子器件的面内位移测量 ,灵敏度可达到纳米量级。显微栅线投影技术用于MEMS的离面变形和形貌测量 ,灵敏度可达 0 .1微米。

Information preservation (IP) method in simulation of internal rarefied gas flows in MEMS

This paper reviews firstly methods for treating low speed rarefied gas flows: the linearised Boltzmann equation, the Lattice Boltzmann method (LBM), the Navier-Stokes equation plus slip boundary conditions and the DSMC method, and discusses the difficulties in simulating low speed transitional MEMS flows, especially the internal flows. In particular, the present version of the LBM is shown unfeasible for simulation of MEMS flow in transitional regime. The information preservation (IP) method overcomes the difficulty of the statistical simulation caused by the small information to noise ratio for low speed flows by preserving the average information of the enormous number of molecules a simulated molecule represents. A kind of validation of the method is given in this paper. The specificities of the internal flows in MEMS, i.e. the low speed and the large length to width ratio, result in the problem of elliptic nature of the necessity to regulate the inlet and outlet boundary conditions that influence each other. Through the example of the IP calculation of the microchannel (thousands m ? long) flow it is shown that the adoption of the conservative scheme of the mass conservation equation and the super relaxation method resolves this problem successfully. With employment of the same measures the IP method solves the thin film air bearing problem in transitional regime for authentic hard disc write/read head length ( 1000 L m ? = ) and provides pressure distribution in full agreement with the generalized Reynolds equation, while before this the DSMC check of the validity of the Reynolds equation was done only for short ( 5 L m ? = ) drive head. The author suggests degenerate the Reynolds equation to solve the microchannel flow problem in transitional regime, thus provides a means with merit of strict kinetic theory for testing various methods intending to treat the internal MEMS flows.

EXPERIMENTAL AND THEORETICAL STUDY OF BINARY DROPLET HEAD-ON COLLISIONS IN MEMS

The experimental and theoretical investigations into the head-on collision between a landing droplet with another one resting on the PDMS substrate were addressed in this talk. The colliding process of the two droplets was recorded with highspeed camera. Four different responses after collision were observed in our experiments: complete rebound, coalescence, partial rebound with conglutination, and coalescence accompanied by conglutination. The contact time between the two colliding droplets was found to be in the range of 10-20 milliseconds. For the complete bouncing case, Hertz contact model was applied to estimate the contact time of the binary head-on colliding droplets with both the droplets considered as elastic bodies. The estimated contact time was in good agreement with the experimental result.

模拟MEMS中气体流动的工具——信息保存法

MEMS中气体流动因特征尺度小而是稀薄气体的领域,本文首先介绍处理低速稀薄气体流动的一些方法:线化Boltzmann方程,Lattice Boltzmann方法,加滑移边界的Navier-Stoks方程,以及DSMC方法,并讨论它们模拟MEMS中过渡领域低速流动所遇到的困难。信息保存法克服了流速低使得信息噪声比小引起统计模拟的困难,已成功模拟了一些一维和二维问题。MEMS中流速低和大的长宽比的特点还引起出入口边界条件相互影响需要协调的问题,通过微槽道流动的算例,在模拟中采用守恒形式的质量守恒方程和超松弛法成功地解决了这一问题。处理有温度变化的MEMS流动问题和跨越领域的混合算法是重要的问题,本文用信息保存法也进行了有益的尝试。