Dependence of wet etch rate on deposition, annealing conditions and etchants for PECVD silicon nitride film

The influence of deposition, annealing conditions, and etchants on the wet etch rate of plasma enhanced chemical vapor deposition (PECVD) silicon nitride thin film is studied. The deposition source gas flow rate and annealing temperature were varied to decrease the etch rate of SiN_x:H by HF solution. A low etch rate was achieved by increasing the SiH_4 gas flow rate or annealing temperature, or decreasing the NH_3 and N_2 gas flow rate. Concen-trated, buffered, and dilute hydrofluoric acid were utilized as etchants for SiO_2 and SiN_x:H. A high etching selectivity of SiO_2 over SiN_x:H was obtained using highly concentrated buffered HF.

A High-Efficiency Fiber-to-Waveguide Coupler with Low Polarization Dependence Using a Diluted Waveguide in InP Substrate with a 1.55μm Wavelength

We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP （1.05μm bandgap） multiple layers. Using the semi-vectorial three dimensional beam propagation method （BPM） with the central difference scheme,the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes,the calculated maximum coupling efficiency is higher than 94% and 92% ,respectively. The calculated polarization dependence is less than 0. ldB,showing good polarization independence.

Optimal distance from high power laser diode to cylindrical microlens in a coupling system

In a practical coupling system, a cylindrical microlens is used to collimate the emission of a high powerlaser diode (LD) in the dimension perpendicular to the junction plane. Using passive alignment, the LD isplaced in the focus of the cylindrical microlens generally, regardless of the performance of the multimodeoptical fiber and the LD. In this paper, a more complete analysis is arrived at by ray-tracing technique,by which the angle θ of the ray after refraction is computed as a function of the angle θo of the ray beforerefraction. The focus of the cylindrical microlens is not always the optimal position of the LD. In fact, inorder to achieve a higher coupling efficiency, the optimal distance from the LD to the cylindrical microlensis dependent on not only the radius R and the index of refraction n of the cylindrical microlens, but alsothe divergence angle of the LD in the dimension perpendicular to the junction plane and the numericalaperture (NA) of the multimode optical fiber. The results of this discussion are in good agreement withexperimental results.

Temperature Dependence of Characteristics for Multimode Interference Based 3-dB Coupler in SOI

The temperature dependence of characteristics for multimode interference (MMI) based 3-dB coupler in silicon-on-insulator is analyzed, which originates from the relatively high thermo-optic coefficient of silicon. For restricted interference 3-dB MMI coupler, the output power uniformity is ideally 0 at room temperature and becomes 0. 32 dB when temperature rises up to 550 K. For symmetric interference 3-dB MMI coupler, the power uniformity keeps ideally 0 due to its intrinsic symmetric interference mechanism. With the temperature rising, the excess loss of the both devices increases. The performance deterioration due to temperature variety is more obvious to restricted interference MMI 3-dB coupler, comparing with that of symmetric interference MMI 3-dB coupler.

The Incident Angle Dependence of Quantum Efficiency of GaAs Based RCE Photodetectors

The theoretical analysis and experimental measurement on the incident angle dependence of quantum efficiency of GaAs based resonant cavity enhanced (RCE) photodetector is presented. By changing the angle of incoming light, about 40 nm wavelength variation of peak quantum efficiency is obtained. The peak quantum efficiency and optical bandwidth at different mode corresponding to different angle incidence is characterized with different absorption dependence on wavelength. The convenient angle tuning of resonant mode will be helpful to relax the strict constraint of RCE photodetector to light source with narrow emission spectrum such applications in space optical detections and communications.

Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system

An external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. In the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. Its coherent length exceeds 200 meters. The angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. Also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. A feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.

Analysis for the angle dependence of GaAs based RCE photodetectors

The theoretical analysis and experimental measurement on the angle dependence of quantum efficiency of GaAs based resonant cavity enhanced (RCE) photodetector is presented. By changing the angle of incoming light, about 40mn wavelength variation of peak quantum efficiency has been experimentally obtained. The peak quantum efficiency and optical bandwidth at different mode corresponding to different angle incidence have been characterized with different absorption dependence on wavelength. The convenient angle tuning of resonant mode will be helpful to relax the strict constraint of RCE photodetector to light source with narrow emission spectrum while especially applied in space optical detections and communications.

Dependence of ultra-thin gate oxide reliability on surface cleaning approach

In this paper, we investigate the effect of silicon surface cleaning prior to oxidation on the reliability of ultra-thin oxides. It is demonstrated that chemical preoxide grown in H2SO4/H2O2 (SPM) solution prior to oxidation provides better oxide integrity than both HF-based solution dipping and preoxide grown in RCA SC1 or SC2 solutions. It is also found that the oxides with SPM preoxide exhibit better hot-carrier immunity than the RCA cleaned oxides.

Large excitation-power dependence of pressure coefficients of InxGa1-xN/InyGa1-yN quantum wells

Excitation-power dependence of hydrostatic pressure coefficients (dE/dP) of InxGa1-xN/InyGa1-yN multiple quantum wells is reported. When the excitation power increases from 1.0 to 33 mW, dE/dP increases from 26.9 to 33.8 meV/GPa, which is an increase by 25%. A saturation behavior of dE/dP with the excitation power is observed. The increment of dE/dP with increasing carrier density is explained by an reduction of the internal piezoelectric field due to an efficient screening effect of the free carriers on the field.

Temperature dependence of photoluminescence of flat and undulated SiGe/Si multiple quantum wells

Photoluminescence (PL) of strained SiGe/Si multiple quantum wells (MQW) with flat and undulated SiGe well layers was studied at different temperature. With elevated temperature from 10K, the no-phonon (NP) peak of the SiGe layers in the flat sample has firstly a blue shift due to the dominant transition converting from bound excitons (BE) to free excitons (FE), and then has a red shift when the temperature is higher than 30K because of the narrowing of the band gap. In the undulated sample, however, monotonous blue shift was observed as the temperature was elevated from 10 K to 287 K. The thermally activated electrons, confined in Si due to type-II band alignment, leak into the SiGe crest regions, and the leakage is enhanced with the elevated temperature. It results in a blue shift of the SiGe luminescence spectra.

若尔盖湿地公路对两栖类的生态影响

本文考察了若尔盖高寒泥炭湿地公路对高原林蛙（Rana kukunoris）、倭蛙（Narorana pleskei）和岷山蟾蜍（Bufo minshanicus）的生态影响。分析了公路对两栖动物空间分布和栖息地利用的影响，并用IBM模型探讨其可能作用机制，考察了两栖动物公路死亡的季节差异及影响公路死亡空间分布的景观因素。最后通过对若尔盖高寒湿地两栖动物陆地核心栖息地的分析，为若尔盖路域栖息地的管理提供依据。 1. 对公路周边6个沼泽水凼群进行了调查，每个样地设置5条样线（距离公路10m、20m、50m、100m和150m）。调查表明，在繁殖季节(5月)，距离公路距离对高原林蛙和倭蛙的相对数量都有显著作用，其效应明显大于其他各项栖息地环境参数。公路导致高原林蛙和倭蛙在公路周边种群密度降低，其相对数量从距离公路100m处到公路边缘一直呈现逐渐降低的趋势。在繁殖季节，若尔盖高寒湿地的公路生态影响域大约在100-150m之间，这一距离远远大于森林栖息地中公路对两栖类的生态影响域（35-40 m）。 在繁殖后期（9月），对公路周边16个草地样点的样线调查表明，公路对周边高原林蛙和倭蛙密度分布并未造成显著影响。 2. 二次模型的拟合表明繁殖季节高原林蛙和倭蛙在公路周边的密度分布符合钟型曲线。前人对森林公路两侧两栖类分布的研究也显示了类似的规律。我们通过基于个体的模型，模拟在了公路边缘100单位距离内的栖息地空间，栖息地环境质量呈梯度变化，动物个体在其中通过随机运动寻找适宜的栖息地。拟合结果表明，动物个体仅仅依照简单的运动规则寻找适宜栖息地，这种活动就可以导致公路周边栖息地中的动物分布曲线出现3个局部峰。公路周边两栖动物的钟型分布曲线可能仅仅是个体寻找适宜栖息地过程中出现的临时性群体分布模式。 3. 在若尔盖高寒湿地，公路交通造成了大量两栖类死亡。但是公路两栖类动物死亡的季节分布很不均匀：5月、8月和9月死亡数量很高，而7月和10月死亡数量却很低。这种季节性差异和两栖类各个生活史阶段的迁移运动有密切的关系。利用景观参数的逻辑斯蒂回归模型显示，距离公路1000-2000m范围内的湿草地比例对三种两栖类公路死亡概率均有很强的贡献。湿草地这一栖息地类型分类中有大量的沼泽水体，是两栖类重要的繁殖点和取食点。两栖类公路死亡概率湿草地的关系从一个侧面表明，要维持一个区域较高的两栖类种群数量，需要1000-2000m半径范围内存在大面积的湿草地。 4. 高原林蛙和岷山蟾蜍不同性别和年龄个体分布点的水体距离存在显著差异。不同种类、年龄的两栖类分布点距离水体距离的差异可能是由于对水体的依赖性造成的。而相同种类、年龄段的个体中，高原林蛙雌性、岷山蟾蜍亚成体和雌性的体重与分布点距水体距离有显著负相关，这可能是因为体重更大的个体对水体的依赖性更弱。考虑到过大的陆地核心栖息地面积在实际保护工作中存在操作上的困难，因此我们认为可以以水体周边90%个体的分布区为低限确定3种两栖类的最小陆地核心栖息地。但是，在同样的水体距离-两栖类密度分布格局下，水体的面积和分形参数对最小陆地核心栖息地半径的确定有一定影响。 Ecological effects of alpine wetland road on Rana kukunoris, Narorana pleskei, Bufo minshanicus was studied in Zoige wetland. The effects of road on distribution of amphibians and its possible underline mechanism was discussed based on empirical data and computer simulation. Road killed amphibians was surveyed in different season and those landscape factor which could have impact on road killing distribution was analyses. Core terrestrial habitat of amphibians in Zoige wetland was discussed in the consideration of conservation management. 1. Six pool groups was investigated in breeding season (May) of R. kukunoris, N. pleskei. Five transects at distance of 10m, 20m, 50m, 100m and 150m from road edge was surveyed in each pool groups. There was a significant effects of distance from road edge on relative counts of R. kukunoris, N. pleskei, which is much important than effects of other environmental factors. Road caused the density of R. kukunoris, N. pleskei decreased from distance of 100m from road to 10m from road. Road ecological effect zone of alpine wetland for amphibians is about 100-150m. It is much wider than those of forest roads, which is about 35-40m. However, studies on 16 grassland near road showed no significant effect of road on amphibians after breeding season (Sep.). 2. Quadratic model fit indicated that the distribution of R. kukunoris and N. Pleskei followed a hump like curve. Previous studies on forest road showed similar results. A 100×100 habitat with gradual environment besides road was simulated with a individual-based model, and animal seek for suitable habitat with stochastic locomotion in it. Simulation results indicated that 3 density peak of animal distribution can emergent followed a simply rules. The hump like density cure could be a temporal swarm pattern during the process of individual seeking for habitat. 3. Road traffic caused mass death of amphibians in Zoige wetland. There was much road killed amphibians in May, Aug and Sep than those in July and Oct. The fluctuation of road kill could be related with migration of amphibians between seasons. Logistic regression of landscape variables indicated that wet grassland in 1000-2000m is essential to predict the probability of road kill. Wet grassland is an important breeding and forage habitat for amphibians. It also indicated that mass wet grassland in 1000-2000m is essential for maintain a big amphibian population. 4. There was significant differences among distance from aquatic site of subadults, female and males of R. kukunoris and B. Minshanicus. Possibly, it was because of their dependence on water. There was a significant negative relationship between distance from aquatic site and individuals body mass. Estimates of core habitat that are too large may make it difficult to establish protective regulations. The smallest suitable terrestrial core habitats were defined as the terrestrial habitats used during migration to and from the wetlands, and for foraging by 90% of any life stage (adults, and subadults) in a season. However, even with the same amphibian distribution pattern along the distance from aquatic sites, the radii of smallest suitable terrestrial core habitats will be varied with the fractal parameters of aquatic site.