Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system


Autoria(s): Zhao WR; Jiang PF; Xie FZ
Data(s)

2002

Resumo

An external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. In the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. Its coherent length exceeds 200 meters. The angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. Also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. A feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.

An external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. In the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. Its coherent length exceeds 200 meters. The angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. Also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. A feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.

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SPIE.; Chinese Opt Soc.

Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China

SPIE.; Chinese Opt Soc.

Identificador

http://ir.semi.ac.cn/handle/172111/13615

http://www.irgrid.ac.cn/handle/1471x/104989

Idioma(s)

英语

Publicador

SPIE-INT SOC OPTICAL ENGINEERING

1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA

Fonte

Zhao WR; Jiang PF; Xie FZ .Real-time far distance micro-vibration measurement using an external cavity semiconductor laser interferometer with a feedback control system .见:SPIE-INT SOC OPTICAL ENGINEERING .OPTICAL DESIGN AND TESTING, 4927,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2002,770-774

Palavras-Chave #光电子学 #external cavity semiconductor laser interferometer #far distance #micro-vibration measurement #feedback control #DISPLACEMENT MEASUREMENT #DIODE INTERFEROMETER #PHASE
Tipo

会议论文