Applications of a nuclear technique for depth-sensitive hydrogen analysis : trapped H in lunar samples and the hydration of terrestrial obsidian

The resonant nuclear reaction ¹⁹F(p,αy)¹⁶O has been used to perform depth-sensitive analyses for both fluorine and hydrogen in solid samples. The resonance at 0.83 MeV (center-of-mass) in this reaction has been applied to the measurement of the distribution of trapped solar protons in lunar samples to depths of ~1/2µm. These results are interpreted in terms of a redistribution of the implanted H which has been influenced by heavy radiation damage in the surface region. Fluorine determinations have been performed in a 1-µm surface layer on lunar and meteoritic samples using the same ¹⁹F(p,αy)¹⁶O resonance. The measurement of H depth distributions has also been used to study the hydration of terrestrial obsidian, a phenomenon of considerable archaeological interest as a means of dating obsidian artifacts. Additional applications of this type of technique are also discussed.

一种新的光刻机像质参数热漂移检测技术

提出了一种新的光刻机像质参数热漂移原位检测技术（TDFM）。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移（FFT）与放大倍率热漂移（MFT）的精确测量。与现有的放大倍率热漂移检测技术相比，该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题，简化了光刻机像质参数前馈校正的测试过程，测试成本与耗时均减少50％。

Small-dynamic-angle measurement using tangent relationship and phase-modulating technique

A method using two prisms for measurement of small dynamic angles is proposed in which the measurement is based on a simple tangent equation and a phase-modulating interferometer with a laser diode to measure dynamic optical path differences with higher accuracy. Owing to the simple tangent equation, the symmetry requirement on the two prisms in the optical configuration is eliminated, and easy measurement of the separations between two parallel beams with a position-sensitive detector is achieved. Small-dynamic-angle measurements are experimentally demonstrated with high accuracy. (C) 2007 Society of Photo-Optical Instrumentation Engineers.

A scaling technique for the design of idealized electromagnetic lenses

A technique is developed for the design of lenses for transitioning TEM waves between conical and/or cylindrical transmission lines, ideally with no reflection or distortion of the waves. These lenses utilize isotropic but inhomogeneous media and are based on a solution of Maxwell's equations instead of just geometrical optics. The technique employs the expression of the constitutive parameters, ɛ and μ, plus Maxwell's equations, in a general orthogonal curvilinear coordinate system in tensor form, giving what we term as formal quantities. Solving the problem for certain types of formal constitutive parameters, these are transformed to give ɛ and μ as functions of position. Several examples of such lenses are considered in detail.

A high-speed image sensing technique with adjustable frame rate based on an ordinary CCD

In the sinusoidal phase modulating interferometer technique, the high-speed CCD is necessary to detect the interference signals. The reason of ordinary CCD's low frame rate was analyzed, and a novel high-speed image sensing technique with adjustable frame rate based on ail ordinary CCD was proposed. And the principle of the image sensor was analyzed. When the maximum frequency and channel bandwidth were constant, a custom high-speed sensor was designed by using the ordinary CCD under the control of the special driving circuit. The frame rate of the ordinary CCD has been enhanced by controlling the number of pixels of every frame; therefore, the ordinary of CCD can be used as the high frame rate image sensor with small amount of pixels. The multi-output high-speed image sensor has the deficiencies of low accuracy, and high cost, while the high-speed image senor with small number of pixels by using this technique can overcome theses faults. The light intensity varying with time was measured by using the image sensor. The frame rate was LIP to 1600 frame per second (f/s), and the size of every frame and the frame rate were adjustable. The correlation coefficient between the measurement result and the standard values were higher than 0.98026, and the relative error was lower than 0.53%. The experimental results show that this sensor is fit to the measurements of sinusoidal phase modulating interferometer technique. (c) 2007 Elsevier GmbH. All rights reserved.

Even aberration measurement of lithographic projection system based on optimized phase-shifting marks

In the present paper, we propose a novel method for measuring the even aberrations of lithographic projection optics by use of optimized phase-shifting marks on the test mask. The line/space ratio of the phase-shifting marks is optimized to obtain the maximum sensitivities of Zernike coefficients corresponding to even aberrations. Spherical aberration and astigmatism can be calculated from the focus shifts of phase-shifting gratings oriented at 0 degrees, 45 degrees, 90 degrees and 135 degrees at multiple illumination settings. The PROLITH simulation results show that, the measurement accuracy of spherical aberration and astigmatism obviously increase, after the optimization of the measurement mark. (C) 2008 Elsevier B.V. All rights reserved.

Technique for diagnosing x-ray laser beam quality by use of the moire signal

We present what we believe is a novel technique based on the moire effect for fully diagnosing the beam quality of an x-ray laser. Using Fresnel diffraction theory, we investigated the intensity profile of the moire pattern when a general paraxial beam illuminates a pair of Ronchi gratings in the quasi-far field. Two formulas were derived to determine the beam quality factor M-2 and the effective radius of curvature R-e from the moire pattern. On the basis of the results, the far-field divergence, the waist location, and the radius can be calculated further. Finally, we verified the approach by use of numerical simulation. (C) 1999 Optical Society of America [S0740-3232(99)01502-1].

Improved uniformity of target illumination by combining a lens array and the technique of spectral dispersion

A scheme using a lens array and the technique of spectral dispersion is presented to improve target illumination uniformity in laser produced plasmas. Detailed two-dimensional simulation shows that a quasi-near-field target pattern, of steeper edges and without side lobes, is achieved with a lens array, while interference stripes inside the pattern are smoothed out by the use of the spectral dispersion technique. Moving the target slightly from the exact focal plane of the principal focusing lens can eliminate middle-scale-length intensity fluctuation further. Numerical results indicate that a well-irradiated laser spot with small nonuniformity and great energy efficiency can be obtained in this scheme. (c) 2007 American Institute of Physics.