微桥结构Ni膜杨氏模量和残余应力研究

采用MEMS(MicroelectromechanicalSystems)技术研制了镍(Ni)膜微桥结构试样,应用陶瓷压条为承力单元,与纳米压痕仪XP系统的Berkovich三棱锥压头相结合,解决了较宽Ni膜微桥加载问题。测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜微桥的杨氏模量及残余应力,其值分别为190.5GPa和146MPa,与应用纳米压痕仪直接测得的带有Si基底的Ni膜杨氏模量186.8±7.34GPa相吻合。

纳米硬度计及其在微机电系统中的应用

微机电系统 (MEMS)技术的迅速崛起 ,推动了对其所用材料和结构的力学性能研究。本文简要介绍纳米硬度技术的发展、理论模型和MTS公司的NanoIndenterXP系统的配置、测量原理及功能。并根据我们的一些研究结果 ,说明它在微机电系统中的应用

微桥结构铜膜杨氏模量和残余应力研究

采用MEMS(MicroelectromechanicalSystems)技术研制了铜 (Cu)膜微桥结构试样 ,应用陶瓷压条为承力单元 ,并与纳米压痕仪XP系统的Berkovich三棱锥压头相结合 ,解决了较宽Cu膜微桥加载问题。测量了微桥载荷与位移的关系 ,并结合微桥力学理论模型得到了Cu膜微桥的杨氏模量及残余应力 ,其值分别为 115 .2GPa和 19.3MPa ,与应用纳米压痕仪直接测得的带有Si基底的Cu膜杨氏模量 110± 1.6 7GPa相吻合。

微桥结构镍膜的弹性模量和残余应力研究

采用MEMS(MicroelectromechanicalSystems)技术研制了宽度在微米尺度的镍(Ni)膜微桥结构试样。采用纳米压痕仪(Nanoindenter)XP系统的楔形压头测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了Ni膜的弹性模量及残余应力,分别为190GPa和87MPa。与采用纳米压痕仪直接测得的带有硅(Si)基底的Ni膜弹性模量(186.8±7.5)GPa相符合。

微机电系统多场耦合仿真分析

在微电子机械系统(MEMS)研究和设计中,微系统数值仿真分析是一个重要研究领域.本文对MEMS 中多种能量场耦合问题的各种数值仿真分析方法进行了综合评述.分析了该领域目前的研究现状并指出了其今后的发展方向.

用于多参数生化检测微系统的葡萄糖传感器的研究

基于生物酶催化的电化学电流检测原理对人体血液生化参数进行测试.利用MEMS技术将电极、酶、反应室以及微型流路等单片集成,研制单一生物芯片的多电极酶传感器目的是同时测定人体血液的多个生化参数.本文主要介绍传感器芯片的工作原理、结构设计、加工技术及初步实验结果,其中葡萄糖在磷酸盐缓冲盐水(PBS)中的测试范围为1～30 m*mol/L,可以满足临床血糖检测的要求.

Information Preservation (IP) Method in Simulation

This paper reviews firstly methods for treating low speed rarefied gas flows: the linearised Boltzmann equation, the Lattice Boltzmann method (LBM), the Navier-Stokes equation plus slip boundary conditions and the DSMC method, and discusses the difficulties in simulating low speed transitional MEMS flows, especially the internal flows. In particular, the present version of the LBM is shown unfeasible for simulation of MEMS flow in transitional regime. The information preservation (IP) method overcomes the difficulty of the statistical simulation caused by the small information to noise ratio for low speed flows by preserving the average information of the enormous number of molecules a simulated molecule represents. A kind of validation of the method is given in this paper. The specificities of the internal flows in MEMS, i.e. the low speed and the large length to width ratio, result in the problem of elliptic nature of the necessity to regulate the inlet and outlet boundary conditions that influence each other. Through the example of the IP calculation of the microchannel (thousands long) flow it is shown that the adoption of the conservative scheme of the mass conservation equation and the super relaxation method resolves this problem successfully. With employment of the same measures the IP method solves the thin film air bearing problem in transitional regime for authentic hard disc write/read head length ( ) and provides pressure distribution in full agreement with the generalized Reynolds equation, while before this the DSMC check of the validity of the Reynolds equation was done only for short ( ) drive head. The author suggests degenerate the Reynolds equation to solve the microchannel flow problem in transitional regime, thus provides a means with merit of strict kinetic theory for testing various methods intending to treat the internal MEMS flows.

Experiments about Simple Liquid Flows in Microtubes

The behavior of micro-scale flow is significant for the performance of Micro-Electro-Mechanical- Systems (MEMS) devices. Some experiments about liquid flow through microtubes with diameters about 3similar to20mum are presented here. The liquids used in our experiments include some simple liquids with small molecules, such as non-ion water and several kinds of organic liquids (CCL4, C6H5C2H5 and Isopropanol etc.). The flow rate and the normalized friction cocfficients were measured in micro-flow experimental apparatus. The results show that when the driven pressure varies from 0 to 1Mpa, the flow behaviors in 20mum microtube for both polar and non-polar liquids are in agreement with Hagen-Poiseuille law of the classical theory. It means that N-S equation based on continuous medium still acts well in this case. For higher pressure drop from 1 to 30Mpa, in the microtubes with diameter of 3similar to10mum, the normalized friction coefficients of organic liquids can't keep constant with pressure increases. However the non-ion water reveals different trends.

Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film

Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.

薄膜/基体界面的撕裂实验研究

新型材料大都离不开薄膜。薄膜材料广泛应用在表面工程、界面工程、生物材料以及微纳米机电系统(MEMS)等领域。研究和评估薄膜/基体界面的力学性能-特别是在微尺度下,具有重要的科学研究价值和应用价值。划痕和撕裂是微/纳米尺度薄膜力学性能测量的两种主要方法,而撕裂实验相对简单可行,理论分析模型也相对方便建立。本文系统研究了Al/epoxy/Al2O3体系和Cu/Al2O3体系的撕裂实验,开发出一套微尺度薄膜撕裂的实验设备和方法,得出薄膜厚度、撕裂角度、epoxy层厚度等因素对撕裂力的影响。应用微梁弯曲模型和粘聚力(EPZ)模型,本文从总撕裂力中分离薄膜塑性变形耗散能量,得出了所考察薄膜/基体界面的粘结韧性等力学性能。

Rarefied gas dynamics: fundamentals, simulations and micro flows

形状记忆合金的微尺度力学行为

与常规合金相比，形状记忆合金具有形状记忆效应（S ME）和超弹性（SE）等特性。利用这些特性，形状记忆合金被广泛地应用在MEMS中，微机器人领域及医疗器械等方面。为了充分发挥材料性能和优化设计以形状记忆合金为材料制成的MEMS器件及医疗器械，十分需要深入地研究并掌握形状记忆合金微尺度下的相变过程及变形行为。形状记忆合金的形状记忆效应和超弹性等特性都与马氏体相变有着十分密切的关系。本文对CuAINi单晶形状记忆合金中温度变化形成的热变马氏体和应力诱发的形变马氏体进行了观察并研究了其室温下和升温过程中的微尺度力学行为。同时还研究了NITi纳米多晶形状记忆合金体材料和NITi形状记忆合金薄膜室温下压痕尺寸效应。研究内容包括以下几个方面：1）自行设计出能够配合纳米硬度仪、AFM及光学显微镜使用的微型拉伸装置，实现应力诱发马氏体相变的观测及研究；2）使用光学显微镜和AFM对热变马氏体和形变马氏体进行观察，并用摄像机记录了光学显微镜下观察到的应力诱发马氏体相变的全过程；3）使用带有加热台的纳米压痕仪研究了室温下及高温下形状记忆合金独特的纳米压痕行为，包括室温下形状记忆合金的纳米压痕尺寸效应及微分硬度分布情况和升温后形状记忆合金在不同温度下纳米压痕的恢复情况及纳米硬度随温度的变化情况。本研究工作得到的结果如下：1）CuAINi单晶形状记忆合金压痕实验中，由于压头尖端的应力水平很高，不仅会在奥氏体中产生应力诱发马氏体相变，在马氏体中产生应力诱发马氏体重取向，而且在奥氏体和马氏体中还会产生位错引起的塑性变形。位错将对压痕形状的恢复起阻碍作用，当温度高于Af点时，奥氏体和马氏体中的压痕仍不能完全恢复。2）当所施加的压痕载荷较小（≤1000ON）时，CuAINi单晶形状记忆合金中的非弹性变形以相变引起的变形为主，并将对高温下材料的变形产生主要的影响。100℃时奥氏体中压痕在深度方向上的恢复率（60）在0.7～0.8之间，马氏体中孙大约为0.9；纳米硬度随温度升高而明显增加。3）CuAINi单晶形状记忆合金中奥氏体和马氏体中均存在压痕尺寸效应，随压头压入深度减小，纳米硬度均升高。NITi纳米多晶形状记忆合金体材料和NITi形状记忆合金薄膜中也存在压痕尺寸效应。4）CuAINi单晶形状记忆合金中奥氏体的加载曲线的斜率大于马氏体的加载曲线的斜率，而奥氏体和马氏体的卸载曲线则几乎平行。使用尖锐的棱锥压头，用纳米压痕法不能得到纯粹的奥氏体的纳米硬度和模量。

Deformation Of Pdms Membrane And Microcantilever By A Water Droplet: Comparison Between Mooney-Rivlin And Linear Elastic Constitutive Models

In this paper, we studied the role of vertical component Of Surface tension of a water droplet on the deformation of membranes and microcantilevers (MCLs) widely used in lab-on-a-chip and micro-and nano-electromechanical system (MEMS/NEMS). Firstly, a membrane made of a rubber-like material, poly(dimethylsiloxane) (PDMS), was considered. The deformation was investigated using the Mooney-Rivlin (MR) model and the linear elastic constitutive relation, respectively. By comparison between the numerical solutions with two different models, we found that the simple linear elastic model is accurate enough to describe such kind of problem, which would be quite convenient for engineering applications. Furthermore, based on small-deflection beam theory, the effect of a liquid droplet on the deflection of a MCL was also studied. The free-end deflection of the MCL was investigated by considering different cases like a cylindrical droplet, a spherical droplet centered on the MCL and a spherical droplet arbitrarily positioned on the MCL. Numerical simulations demonstrated that the deflection might not be neglected, and showed good agreement with our theoretical analyses. (C) 2008 Elsevier Inc. All rights reserved.

A comparative study of Young's modulus of single-walled carbon nanotube by CPMD, MD, and first principle simulations

Carbon nanotubes (CNTs), due to their exceptional magnetic, electrical and mechanical properties, are promising candidates for several technical applications ranging from nanoelectronic devices to composites. Young's modulus holds the special status in material properties and micro/nano-electromechanical systems (MEMS/NEMS) design. The excellently regular structures of CNTs facilitate accurate simulation of CNTs' behavior by applying a variety of theoretical methods. Here, three representative numerical methods, i.e., Car-Parrinello molecular dynamics (CPMD), density functional theory (DFT) and molecular dynamics (MD), were applied to calculate Young's modulus of single-walled carbon nanotube (SWCNT) with chirality (3,3). The comparative studies showed that the most accurate result is offered by time consuming DFT simulation. MID simulation produced a less accurate result due to neglecting electronic motions. Compared to the two preceding methods the best performance, with a balance between efficiency and precision, was deduced by CPMD.

聚二甲基硅氧烷（PDMS）表面液滴动力学的实验研究

液滴是自然界中普遍存在的一种物质形态。非连续微流体（液滴）是近年来微流体技术重要发展方向之一。对液滴的产生、启动、移动、合并、分离和碰撞过程的研究对于航天、微纳系统、电子显示、计算机冷却、喷墨、生物医学等学科领域有着重要的应用价值。液滴属于软物质，其力学性质介于流体和固体之间，其类固体（solid-like）行为来自于曲率产生的Laplace压力和表面张力的约束。对液滴动力学行为的研究有着重要的学术价值。 本文的主要工作是针对生物微电子机械系统（Bio-MEMS）以及柔性微纳电子加工中常用的材料聚二甲基硅氧烷（Polydimethylsiloxane，PDMS）为基底的液滴动力学实验研究。 液滴是一个理想的微反应器，许多实验可以集成在一个液滴或多个液滴内完成。液滴本身的动力学特性对于实验的完成效率和质量有着重要的影响。液滴的微操控技术包括多相流法、电润湿法、热毛细管法、介电泳法等。液滴的动力学特性受到基底的影响非常大，包括基频、振动模态、运动过程等均随基底的润湿性、弹性模量的变化而有所变化。 在Bio-MEMS以及柔性微纳电子加工当中，PDMS扮演着越来越重要的角色，尤其是PDMS的润湿性和电润湿特性。目前的PDMS在Bio-MEMS当中主要是用于制备各种微流道。常见的问题主要是一方面PDMS是疏水材料，影响流体的输运。另一方面是液体在这种低Reynolds数情况下不易混合，反应效率低。本文提出了在PDMS表面溅射纳米厚度的金来减小PDMS表观接触角的方法。这种方式在特定喷金量的情况下可以在PDMS表面产生多层次的压应力波纹。这种压应力波纹对于柔性微纳电子加工，以及微流道中加速流体混合有着非常重要的作用。 电润湿是另一种可以使PDMS亲水化的方法。实验证明，PDMS具有较好的电润湿性质。此外电润湿也是目前操纵液滴的主要方式。目前一个常见的问题是电击穿现象阻碍了驱动电压的低压化，且低Reynolds数情况下液滴的混合效率偏低。此外电极还会由于少量电解的发生导致腐蚀及对液体样品的污染。本文提出了接触式的电润湿，在电极逐渐触碰液滴的过程中，液滴发生百Hz的失稳振动，稳定后接触角减小。这种电润湿模式可以有效的提高临界击穿电压，避免液滴被腐蚀后的电极污染，同时可以加快液滴的混合效率。其失稳特征时间在10 ms量级，这恰是所用液滴特征尺度在1 mm左右的电润湿器件的最快响应时间。并采用液滴振动的理论估算了液滴的失稳时间，同时还考虑了基底润湿性对液滴振动过程的影响。 液滴的启动是电润湿操控液滴过程中的重要环节。通常的液滴启动都是在非连续基底上依靠逻辑电路产生的电势变化来驱动液滴。无论是逻辑电路的设计还是驱动装置的加工都非常复杂。本文首次实现了在超疏水生物样品荷叶上的液滴启动，启动速度为数十毫米/秒，启动时间为10 ms量级。并利用PDMS成功的仿制了荷叶结构实现了超疏水的PDMS表面，荷叶同仿荷叶的PDMS超疏水表面具有相近的润湿性。 在数字微流体操控液滴的过程中，液滴的合并涉及液滴的碰撞，而且MEMS系统当中利用液滴撞击进行冷却的实验已经有所开展。同时理解液滴碰撞还对许多领域包括生物、化学、喷墨、大气物理等有着非常重要的作用。本文实验研究了Weber数和毛细数对液滴碰撞过程的影响，通过改变Weber数和毛细数得到了四种不同的响应模式。