Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

Phase-space analysis of wavefront coding imaging systems

We explore the use of the Radon-Wigner transform, which is associated with the fractional Fourier transform of the pupil function, for determining the point spread function (PSF) of an incoherant defocused optical system. Then we introduce these phase-space tools to analyse the wavefront coding imaging system. It is shown that the shape of the PSF for such a system is highly invarient to the defocous-related aberrations except for a lateral shift. The optical transfer function of this system is also investigated briefly from a new understanding of ambiguity function.

一种基于编码孔径成像原理的三维成像方法

三维成像技术因其应用广泛而备受关注。根据编码孔径成像的基本原理，提出了一种非相干可见光三维成像方法。这种两步成像方法的第一步采用空间位置编码的照相机阵列对物体拍照，在第二步中，首先将照相机阵列拍照得到的物体照片根据拍照时的位置关系合成为一幅图像，然后采用计算机程序模拟光学反投影解码方法解码再现出物体不同深度的表面分层图像。设计了初步的实验，该实验采用1部照相机依次在各编码位置对物体模型拍照，编码形式是包含9个点的无冗余阵列形式，物体模型只包含2个深度层次，布置在距离照相机阵列1．5m的地方。实验得到了信噪

Collimation testing using axial intensity

We proposed a new method of measuring the degree of collimation of laser beam using axial intensity information near paraxial focus. Preceding methods for collimation testing are mainly either based on self-imaging or interferometric techniques. The new method is to employ the diffraction behavior of noncollimated wave in circular aperture diaphragm. The principle of the proposed method and experiment results are presented. Due to simplicity of the method and its low cost, it is a promising method for checking the collimation of laser beam. (c) 2005 Published by Elsevier GmbH.

Imaging the earth with ambient noise and earthquakes

In this thesis, I develop the velocity and structure models for the Los Angeles Basin and Southern Peru. The ultimate goal is to better understand the geological processes involved in the basin and subduction zone dynamics. The results are obtained from seismic interferometry using ambient noise and receiver functions using earthquake- generated waves. Some unusual signals specific to the local structures are also studied. The main findings are summarized as follows:

(1) Los Angeles Basin

The shear wave velocities range from 0.5 to 3.0 km/s in the sediments, with lateral gradients at the Newport-Inglewood, Compton-Los Alamitos, and Whittier Faults. The basin is a maximum of 8 km deep along the profile, and the Moho rises to a depth of 17 km under the basin. The basin has a stretch factor of 2.6 in the center decreasing to 1.3 at the edges, and is in approximate isostatic equilibrium. This "high-density" (~1 km spacing) "short-duration" (~1.5 month) experiment may serve as a prototype experiment that will allow basins to be covered by this type of low-cost survey.

(2) Peruvian subduction zone

Two prominent mid-crust structures are revealed in the 70 km thick crust under the Central Andes: a low-velocity zone interpreted as partially molten rocks beneath the Western Cordillera – Altiplano Plateau, and the underthrusting Brazilian Shield beneath the Eastern Cordillera. The low-velocity zone is oblique to the present trench, and possibly indicates the location of the volcanic arcs formed during the steepening of the Oligocene flat slab beneath the Altiplano Plateau.

The Nazca slab changes from normal dipping (~25 degrees) subduction in the southeast to flat subduction in the northwest of the study area. In the flat subduction regime, the slab subducts to ~100 km depth and then remains flat for ~300 km distance before it resumes a normal dipping geometry. The flat part closely follows the topography of the continental Moho above, indicating a strong suction force between the slab and the overriding plate. A high-velocity mantle wedge exists above the western half of the flat slab, which indicates the lack of melting and thus explains the cessation of the volcanism above. The velocity turns to normal values before the slab steepens again, indicating possible resumption of dehydration and ecologitization.

(3) Some unusual signals

Strong higher-mode Rayleigh waves due to the basin structure are observed in the periods less than 5 s. The particle motions provide a good test for distinguishing between the fundamental and higher mode. The precursor and coda waves relative to the interstation Rayleigh waves are observed, and modeled with a strong scatterer located in the active volcanic area in Southern Peru. In contrast with the usual receiver function analysis, multiples are extensively involved in this thesis. In the LA Basin, a good image is only from PpPs multiples, while in Peru, PpPp multiples contribute significantly to the final results.

A novel three-dimensional imaging array recording and computational method by means of coded cameras reconstruction

In this paper, we propose a novel three-dimensional imaging method by which the object is captured by a coded cameras array (CCA) and computationally reconstructed as a series of longitudinal layered surface images of the object. The distribution of cameras in array, named code pattern, is crucial for reconstructed images fidelity when the correlation decoding is used. We use DIRECT global optimization algorithm to design the code patterns that possess proper imaging property. We have conducted primary experiments to verify and test the performance of the proposed method with a simple discontinuous object and a small-scale CCA including nine cameras. After certain procedures such as capturing, photograph integrating, computational reconstructing and filtering, etc., we obtain reconstructed longitudinal layered surface images of the object with higher signal-to-noise ratio. The results of experiments show that the proposed method is feasible. It is a promising method to be used in fields such as remote sensing, machine vision, etc. (c) 2006 Elsevier GmbH. All rights reserved.

椭偏仪的研究进展

主要介绍了椭偏仪的测量原理，比较了不同结构的椭偏仪，并根据具体应用需求介绍了椭偏光谱仪、红外椭偏光谱仪、成像椭偏仪和广义椭偏仪，分析了椭偏仪的数据处理过程，最后展望了椭偏仪的发展趋势。

Multi-channel 2-D pattern transfer model based on imaging optics for submarine laser uplink communication

An optical communication scheme of 2-D pattern transfer based on imaging optics for submarine laser uplink communication (SLUC) is suggested. Unlike the methods aiming at avoiding neighboring crosstalk used in traditional multi-channel optical beam transferring, we make full use of the overlapping of each spreading beam other than controlling divergence effect of each beam to avoid interference noise. The apparent parameters have been introduced to simplify theoretical analysis of optical pattern transfer problem involving underwater condition, with the help of which the complex beam propagation inside two kinds of mediums can be easily reduced to brief beam transfer only inside air medium. In this paper, optical transmission path and receiver terminal optics geometry have been described in detail. The link range equation and system uplink performance analysis have also been given. At last, results of a proof-of-concept experiment indicate good feasibility of the proposed SLUC model. © 2007 Elsevier GmbH. All rights reserved.

One-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency

We propose a novel method of one-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency for full range imaging. The spatial carrier frequency is introduced into the 2-D spectral interferogram in the lateral direction by using a tilted reference wavefront. This spatial-carrier- contained 2-D spectral interferogram is recorded with one shot of a 2-D CCD camera, and is Fourier-transformed in the lateral direction to obtain a 2-D complex spectral interferogram by a spatial-carrier technique. A full-range tomogram is reconstructed from the 2-D complex spectral interferogram. The principle of this method is confirmed by cross-sectional imaging of a glass slip object. (c) 2008 Society of Photo-Optical Instrumentation Engineers.

Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.

Computational Microscopy: Breaking the Limit of Conventional Optics

Computational imaging is flourishing thanks to the recent advancement in array photodetectors and image processing algorithms. This thesis presents Fourier ptychography, which is a computational imaging technique implemented in microscopy to break the limit of conventional optics. With the implementation of Fourier ptychography, the resolution of the imaging system can surpass the diffraction limit of the objective lens's numerical aperture; the quantitative phase information of a sample can be reconstructed from intensity-only measurements; and the aberration of a microscope system can be characterized and computationally corrected. This computational microscopy technique enhances the performance of conventional optical systems and expands the scope of their applications.