椭偏仪的研究进展

主要介绍了椭偏仪的测量原理，比较了不同结构的椭偏仪，并根据具体应用需求介绍了椭偏光谱仪、红外椭偏光谱仪、成像椭偏仪和广义椭偏仪，分析了椭偏仪的数据处理过程，最后展望了椭偏仪的发展趋势。

The working principle of the ellipsometers is described. Different configurations of ellipsometers are compared. According to different applications, spectroscopic ellipsometer, infrared spectroscopic ellipsometer, imaging ellipsometer and generalized ellipsometer are introduced, respectively. The data processing of ellipsometer is also analyzed. Finally, the future development of ellipsometer is prospected.