857 resultados para radio frequency sputtering
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Optical emission spectra from a low-pressure Ar plasma were studied with high spatial resolution. It has been shown that the intensity ratios of Ar lines excited through metastable levels to those excited directly from the ground state are sensitive to the shape of electron energy distribution function. From these measurements, important information on the spatial variation of plasma parameters can be obtained. (C) 1999 American Institute of Physics. [S0003-6951(99)01629-0].
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Electron energy probability functions measured with a passively compensated Langmuir probe in asymmetric capacitively coupled hydrogen and deuterium plasmas exhibit structure. The otherwise relatively continuous distribution appears to have an abrupt peak in electron density near 5 eV. This structure occurs at a higher energy in deuterium than hydrogen and there is a correlation between floating potential and the voltage at which the structure is observed in the second derivative of the I(V) characteristic. While the cause of the structure has yet to be clarified, spectroscopic observations and computer-based hydrogen models indicate that the high energy tail of the distribution is strongly modulated during the radio frequency cycle. The effect of this modulation on plasma properties and probe measurements has yet to be explored. (C) 1999 American Institute of Physics. [S0003-6951(99)00819-0].
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A near-isothermal micro-trickle bed reactor operated under radio frequency heating was developed. The reactor bed was packed with nickel ferrite micro-particles of 110. μm diameter, generating heat by the application of RF field at 180. kHz. Hydrodynamics in a co-current configuration was analysed and heat transfer rates were determined at temperature ranging from 55 to 100. °C. A multi-zone reactor bed of several heating and catalytic zones was proposed in order to achieve near-isothermal operations. Exact positioning, number of the heating zones and length of the heating zones composed of a mixture of nickel ferrite and a catalyst were determined by solving a one dimensional model of heat transfer by conduction and convection. The conductive losses contributed up to 30% in the total thermal losses from the reactor. Three heating zones were required to obtain an isothermal length of 50. mm with a temperature non-uniformity of 2. K. A good agreement between the modelling and experimental results was obtained for temperature profiles of the reactor. © 2013 Elsevier B.V.
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The electron dynamics in a planar coil inductively coupled plasma (ICP) system with a capacitively biased electrode is investigated using space and phase resolved optical emission spectroscopy. The two power source frequencies are exact multiple of each other and phase-locked. In this configuration, the system is investigated when the coil is operated in both E-mode and H-mode. The results show that in a phase synchronized RF biased ICP, the electrode bias power couples with the capacitive contribution of the coil, in both E-mode and H-modes, similar to dual-frequency capacitively coupled plasmas (2f-CCPs). It is also demonstrated that in H-mode, the phase between the electrode bias frequency and the ICP coil frequency influences the electron heating, similar to the electrical asymmetry effect in 2f-CCPs.
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The paper details on-chip inductor optimization for a reconfigurable continuous-time delta-sigma (Δ-Σ) modulator based radio-frequency analog-to-digital converter. Inductor optimisation enables the Δ-Σ modulator with Q enhanced LC tank circuits employing a single high Q-factor on-chip inductor and lesser quantizer levels thereby reducing the circuit complexity for excess loop delay, power dissipation and dynamic element matching. System level simulations indicate at a Q-factor of 75 Δ- Σ modulator with a 3-level quantizer achieves dynamic ranges of 106, 82 dB and 84 dB for RFID, TETRA, and Galileo over bandwidths of 200 kHz, 10 MHz and 40 MHz respectively.
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Thesis (Ph.D.)--University of Washington, 2015
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The carrier transport mechanism of polyaniline (PA) thin films prepared by radio frequency plasma polymerization is described in this paper. The mechanism of electrical conduction and carrier mobility of PA thin films for different temperatures were examined using the aluminium–PA–aluminium (Al–PA–Al) structure. It is found that the mechanism of carrier transport in these thin films is space charge limited conduction. J –V studies on an asymmetric electrode configuration using indium tin oxide (ITO) as the base electrode and Al as the upper electrode (ITO–PA–Al structure) show a diode-like behaviour with a considerable rectification ratio
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As a vital factor affecting system cost and lifetime, energy consumption in wireless sensor networks (WSNs) has been paid much attention to. This article presents a new approach to making use of electromagnetic energy from useless radio frequency (RF) signals transmitted in WSNs, with a quantitative analysis showing its feasibility. A mechanism to harvest the energy either passively or actively is proposed.
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This article reports on a series of experiments with polyethylene terepthalate (PET) treated in a radio frequency plasma reactor using argon and oxygen as a gas fuel, for treatment times equal to 5 s, 20 s, 30 s, and 100 s. The mechanical strength modification of PET fibers, evaluated by tensile tests on monofilaments, showed that oxygen and argon plasma treatment resulted in a decrease in the average tensile strength compared with the untreated fibers. This reduction in tensile strength is more significant for argon plasma and is very sensitive to the treatment time for oxygen plasma. Scanning electron microscopy (SEM) used to analyze the effects of cold plasma treatment on fiber surfaces indicates differences in roughness profiles depending on the type of treatments, which were associated with variations in mechanical strength. Differences in the roughness profile, surveyed through an image analysis method, provided the distance of roughness interval, D-ri. This parameter represents the number of peaks contained in a unit length and was introduced to correlate fiber surface condition, before and after cold plasma treatments, and average tensile strength. Statistical analysis of experimental data, using Weibull cumulative distribution and linear representation, was performed to explain influences of treatment time and environmental effects on mechanical properties. The shape parameter, alpha, and density parameter, beta, from the Weibull distribution function were used to indicate the experimental data range and to confirm the mechanical performance obtained experimentally.