Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen
| Data(s) |
25/07/2011
|
|---|---|
| Formato |
application/pdf |
| Identificador |
http://dx.doi.org/10.1063/1.3612914 http://pure.qub.ac.uk/ws/files/847014/Zaka_ul_Islam11APL99_041501.pdf |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Zaka-ul-Islam , M , Niemi , K , Gans , T & O'Connell , D 2011 , ' Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen ' Applied Physics Letters , vol 99 , no. 4 , 041501 , pp. 041501 . DOI: 10.1063/1.3612914 |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100/3101 #Physics and Astronomy (miscellaneous) |
| Tipo |
article |
