PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE

Autoria(s): Anderson, C.A.; Hopkins, M.B.; Graham, Bill
Data(s)

01/07/1990
Identificador

http://pure.qub.ac.uk/portal/en/publications/plasma-parameters-of-a-radiofrequency-discharge(b68a573b-2014-437c-8cfa-babeee46ddb9).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Anderson , C A , Hopkins , M B & Graham , B 1990 , ' PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE ' Paper presented at INTERNATIONAL CONF ON ION SOURCES , Berkeley, Ca , United States , 01/07/1990 - 01/07/1990 , pp. 448-450 .
Tipo

conferenceObject
Acesso ao item digital