一种基于PSD器件的改进型角度测量方法

提出一种基于平行平板干涉仪的改进型角度测量方法。为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。平面反射镜的引入提高了角度测量的分辨率。实验验证了可在近3度的范围内实现被测偏转角度的高精度测量。并且作为一位相调制型干涉仪，其小角位移测量实验的重复精度可达5.5×10^(-8)rad。

基于法布里-珀罗干涉仪的毫米波副载波光学产生方法

在光纤无线电系统(ROF)中，提出了一种利用法布里-珀罗干涉仪来实现将一个光学脉冲转换为毫米波频率调制的光学脉冲的方法。在这种方法中，毫米波调制的频率是由法布里-珀罗干涉仪的腔长来决定的，而脉冲序列振幅衰减和能量转移效率则是由法布里-珀罗干涉仪的腔镜反射率决定的。同时，文中对输出脉冲宽度的扩展所导致的脉冲间的干涉问题也进行了详细阐述。

一种测量光刻机工件台方镜不平度的新方法

提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。以方镜平移补偿量与旋转补偿量为测量目标,使用两个双频激光干涉仪分别测量工件台在x和y方向的位置和旋转量；将方镜不平度的测量按照一定的偏移量分成若干个序列,每一个序列包括对方镜有效区域的若干次往返测量；根据所有序列的测量结果计算出方镜的旋转补偿量；为每一个序列建立临时边界条件,并据此计算出每一序列所测得的方镜粗略平移补偿量；采用三次样条插值与最小二乘法建立每一个序列间的关系,以平滑连接所有测量序列得到精确的方镜平移补偿量。结果表明,该方法用于测量方镜平

实时测量表面形貌的正弦相位调制半导体干涉仪

提出一种实时测量表面形貌的正弦相位调制半导体激光干涉仪。利用实时相位检测电路，从正弦相位调制干涉信号中解出被测量物体表面形貌的相位。在实验中，测量了楔形光学平板的表面形貌，对表面形貌上的60

In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm. (c) 2006 Elsevier GmbH. All rights reserved.

Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry

As there exist some problems with the previous laser diode (LD) real-time microvibration measurement interferometers, such as low accuracy, correction before every use, etc., in this paper, we propose a new technique to realize the real-time microvibration measurement by using the LD sinusoidal phase-modulating interferometer, analyze the measurement theory and error, and simulate the measurement accuracy. This interferometer utilizes a circuit to process the interference signal in order to obtain the vibration frequency and amplitude of the detective signal, and a computer is not necessary in it. The influence of the varying light intensity and light path difference on the measurement result can be eliminated. This technique is real-time, convenient, fast, and can enhance the measurement accuracy too. Experiments show that the repeatable measurement accuracy is less than 3.37 nm, and this interferometer can be applied to real-time microvibration measurement of the MEMS. (C) 2007 Elsevier GmbH. All rights reserved.

ICF中可调法布里-珀罗滤波器间距稳定度研究

在神光Ⅱ第9路ICF高功率激光装置中，采用可调法布里-珀罗（F-P）滤波器对幅度调制效应进行补偿，根据补偿装置的技术要求，提出-种应用nm量级精度的电容式位移传感器对可调F-P滤波器间距稳定度进行监控的系统，详细论述了监控系统的结构与工作原理。给出了电容式位移传感器的驱动电路及数据处理与控制软件的设计方案，并对电容式位移传感器的精度进行了标定。实验结果表明，该位移监控系统能够使可调F—P滤波器的间距稳定度保持在15nm／h以内，使幅度调制效应的调制深度优于4％。

激光稳频的共焦法布里-珀罗干涉仪

针对多普勒激光雷达激光源短期频率漂移低于1 MHz的要求,设计了一种共焦干涉仪作为频率标准进行稳频。通过对三种不同材料制成的共焦法布里-珀罗(Fabry-Perot)干涉仪中心频率随温度漂移情况进行分析对比,选用零膨胀微晶玻璃材料制作共焦法布里-珀罗干涉仪,腔镜和隔离器通过光胶的方式进行组合,并且置于温控精度优于0.01 K的双层密封温控箱中。经过实验测量,共焦法布里-珀罗干涉仪的自由光谱范围为370 MHz,透射谱半峰全宽(FWHM)为1.7 MHz,精细度为220。采用该共焦干涉仪进行稳频,理论稳频精度可达0.15 MHz,满足激光多普勒雷达单频激光源的稳频要求。

Study on eight-pass dual-frequency laser interferometer with nanometer precision

A new dual-frequency laser displacement measurement interferometer with nanometer precision has been developed. An eight-pass optical subdivision technology is proposed to improve resolution based on commercial interferometers. A static positioning error measuring method has been used to examine the precision and repeatability of the laser interferometer. An optical resolution of 1.24 nm and an accuracy of nanometer scale have been achieved.

基于高精度差动干涉仪的微伽重力仪

本文提出的微伽绝对重力仪基于高精度、高稳定的差动干涉仪。详细研究了重力仪的距离测量技术，自由落体运动的距离测量实验表明，本文提出的高精度差动干涉仪可以满足相对不确定度达6.4×10^(-9)的微伽绝对重力仪要求。而且，差动干涉仪比目前广泛应用于绝对重力仪的Mach-Zehnder干涉仪更稳定。

Modelling and simulation of the second-order Doppler error of a laser dual-frequency interferometer

Only the first- order Doppler frequency shift is considered in current laser dual- frequency interferometers; however; the second- order Doppler frequency shift should be considered when the measurement corner cube ( MCC) moves at high velocity or variable velocity because it can cause considerable error. The influence of the second- order Doppler frequency shift on interferometer error is studied in this paper, and a model of the second- order Doppler error is put forward. Moreover, the model has been simulated with both high velocity and variable velocity motion. The simulated results show that the second- order Doppler error is proportional to the velocity of the MCC when it moves with uniform motion and the measured displacement is certain. When the MCC moves with variable motion, the second- order Doppler error concerns not only velocity but also acceleration. When muzzle velocity is zero the second- order Doppler error caused by an acceleration of 0.6g can be up to 2.5 nm in 0.4 s, which is not negligible in nanometric measurement. Moreover, when the muzzle velocity is nonzero, the accelerated motion may result in a greater error and decelerated motion may result in a smaller error.

双频激光干涉仪的最大可测量速度研究

现代制造业对双频激光干涉仪的最大可测量速度提出了越来越高的要求。最大可测量速度是双频激光干涉仪的一项重要指标，它主要受双频激光光源所输出的频差、干涉仪的光学结构以及电子带宽等因素的限制。本文从理论和实验两方面对干涉仪的最大可测量速度进行了研究，搭建了基于自由落体运动的实验装置。实验结果表明，实际最大可测量速度略低于其理论值。另外，文中还分析了上述三种因素对最大可测量速度的影响。实验装置和结果可供工业应用提供参考。

A novel optical subdivision method for dual-frequency interferometer

The theory of optical subdivision techniques of dual-frequency laser interferometers is stated. And a novel optical subdivision technique is proposed originally to enhance resolution of a commercial interferometer by adding some corner-cubes. Then the performance of the interferometer is tested. The interferometer resolution of 1.24 nm and the average error of below 2 nm are achieved by using the technique. The most novel of the optical subdivision technique is without lambda/4 plates. It is less sensitive to environmental changes, it has prodigious potential to improve resolution farther and it can reduce polarization mixing error. (C) 2007 Elsevier GmbH. All rights reserved.

沉积温度对LaF3薄膜性能的影响

abstract {LaF₃ single-layer coatings were prepared by thermal boat evaporation at the deposition temperatures of 189, 255, 277 and 321°C respectively. The crystal structures of the coatings were characterized by X-ray diffraction (XRD). A spectrophotometer was employed to measure its transmittance. Moreover, refractive index, extinction coefficient and cut-off wavelength were obtained from the measured transmittance spectral curve. The residual stress was evaluated by the Stoney's equation and optical interferometer. Laser induce damage threshold (LIDT) was performed by a tripled Nd:YAG laser system. The results show that the crystallization status becomes better with the deposition temperature increasing. Correspondingly, the grain size also gets larger. Meanwhile, the coatings become more compact and the refractive index increases. However, the absorption of coatings seriously rises and the cut-off wavelength drifts to the long wave. In addition, the residual stress also increases and the intrinsic stress plays a determinant role in the coating. The LIDT of the coating also enhances at high temperature.}

DISCRETELY TUNABLE FIBER RING LASER USING FBG TUNABLE FILTER AND MACH-ZEHNDER INTERFEROMETER

A discretely tunable Er-doped fiber-ring laser using a fiber Mach-Zehnder interferometer (MZI) and a tunable fiber Bragg grating (FBG) is proposed. In this scheme, the combination of MZI and FBG acts as a discrete wavelength selector. Analysis of its transmission function shows that discrete wavelength tuning can be realized, and experiments demonstrate 64 single-mode outputs with a mode spacing of 181.7 pm, and the output power is quite stable in the whole tuning range. (C) 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51 2595-2598, 2009; Published online in Wiley InterScience (www. interscience.wiley.com). DOI 10.1002/mop.24690