双频激光干涉仪的最大可测量速度研究

现代制造业对双频激光干涉仪的最大可测量速度提出了越来越高的要求。最大可测量速度是双频激光干涉仪的一项重要指标，它主要受双频激光光源所输出的频差、干涉仪的光学结构以及电子带宽等因素的限制。本文从理论和实验两方面对干涉仪的最大可测量速度进行了研究，搭建了基于自由落体运动的实验装置。实验结果表明，实际最大可测量速度略低于其理论值。另外，文中还分析了上述三种因素对最大可测量速度的影响。实验装置和结果可供工业应用提供参考。

There is an increasing demand on the measurable velocity of laser interferometer in manufacturing technologies. The maximum measurable velocity is limited by frequency difference of laser source, optical configuration, and electronics bandwidth. An experimental setup based on free falling movement has been demonstrated to measure the maximum measurable velocity for interferometers. Measurement results show that the maximum measurable velocity is less than its theoretical value. Moreover, the effect of kinds of factors upon the measurement results is analyzed, and the results can offer a reference for industrial applications.