实时测量表面形貌的正弦相位调制半导体干涉仪
| Data(s) |
2007
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|---|---|
| Resumo |
提出一种实时测量表面形貌的正弦相位调制半导体激光干涉仪。利用实时相位检测电路，从正弦相位调制干涉信号中解出被测量物体表面形貌的相位。在实验中，测量了楔形光学平板的表面形貌，对表面形貌上的60 A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
何国田;王向朝;曾爱军;唐锋.实时测量表面形貌的正弦相位调制半导体干涉仪,Chin. Opt. Lett.,2007,5(3):164-167 |
| Palavras-Chave | #半导体干涉测量仪 #正弦相位调制 #表面形貌 #实时测量 #鉴相 #Interferometers #Phase modulation #Real time systems #Semiconductor lasers #Signal detection |
| Tipo |
期刊论文 |
