CMOS integration of AlN based piezoelectric microcantilevers

El gran crecimiento de los sistemas MEMS (Micro Electro Mechanical Systems) así como su presencia en la mayoría de los dispositivos que usamos diariamente despertó nuestro interés. Paralelamente, la tecnología CMOS (Complementary Metal Oxide Semiconductor) es la tecnología más utilizada para la fabricación de circuitos integrados. Además de ventajas relacionadas con el funcionamiento electrónico del dispositivo final, la integración de sistemas MEMS en la tecnología CMOS reduce significantemente los costes de fabricación. Algunos de los dispositivos MEMS con mayor variedad de aplicaciones son los microflejes. Estos dispositivos pueden ser utilizados para la extracción de energía, en microscopios de fuerza atómica o en sensores, como por ejemplo, para biodetección. Los materiales piezoeléctricos más comúnmente utilizados en aplicaciones MEMS se sintetizan a altas temperaturas y por lo tanto no son compatibles con la tecnología CMOS. En nuestro caso hemos usado nitruro de alumino (AlN), que se deposita a temperatura ambiente y es compatible con la tecnología CMOS. Además, es biocompatible, y por tanto podría formar parte de un dispositivo que actúe como biosensor. A lo largo de esta tesis hemos prestado especial atención en desarrollar un proceso de fabricación rápido, reproducible y de bajo coste. Para ello, todos los pasos de fabricación han sido minuciosamente optimizados. Los parámetros de sputtering para depositar el AlN, las distintas técnicas y recetas de ataque, los materiales que actúan como electrodos o las capas sacrificiales para liberar los flejes son algunos de los factores clave estudiados en este trabajo. Una vez que la fabricación de los microflejes de AlN ha sido optimizada, fueron medidos para caracterizar sus propiedades piezoeléctricas y finalmente verificar positivamente su viabilidad como dispositivos piezoeléctricos. ABSTRACT The huge growth of MEMS (Micro Electro Mechanical Systems) as well as their presence in most of our daily used devices aroused our interest on them. At the same time, CMOS (Complementary Metal Oxide Semiconductor) technology is the most popular technology for integrated circuits. In addition to advantages related with the electronics operation of the final device, the integration of MEMS with CMOS technology reduces the manufacturing costs significantly. Some of the MEMS devices with a wider variety of applications are the microcantilevers. These devices can be used for energy harvesting, in an atomic force microscopes or as sensors, as for example, for biodetection. Most of the piezoelectric materials used for these MEMS applications are synthesized at high temperature and consequently are not compatible with CMOS technology. In our case we have used aluminum nitride (AlN), which is deposited at room temperature and hence fully compatible with CMOS technology. Otherwise, it is biocompatible and and can be used to compose a biosensing device. During this thesis work we have specially focused our attention in developing a high throughput, reproducible and low cost fabrication process. All the manufacturing process steps of have been thoroughly optimized in order to achieve this goal. Sputtering parameters to synthesize AlN, different techniques and etching recipes, electrode material and sacrificial layers are some of the key factors studied in this work to develop the manufacturing process. Once the AlN microcantilevers fabrication was optimized, they were measured to characterize their piezoelectric properties and to successfully check their viability as piezoelectric devices.

Synthesis and Characterisation of Functional Magnetic and Plasmonic Nanomaterials

The main aim of this thesis is the controlled and reproducible synthesis of functional materials at the nanoscale. In the first chapter, a tuning of morphology and magnetic properties of magnetite nanoparticles is presented. It was achieved by an innovative approach, which involves the use of an organic macrocycle (calixarene) to induce the oriented aggregation of NPs during the synthesis. This method is potentially applicable to the preparation of other metal oxide NPs by thermal decomposition of the respective precursors. Products obtained, in particular the multi-core nanoparticles, show remarkable magnetic and colloidal properties, making them very interesting for biomedical applications. The synthesis and functionalisation of plasmonic Au and Ag nanoparticles is presented in the second chapter. Here, a supramolecular approach was exploited to achieve a controlled and potentially reversible aggregation between Au and Ag NPs. This aggregation phenomena was followed by UV - visible spectroscopy and dynamic light scattering. In the final chapters, the conjugation of plasmonic and magnetic functionalities was tackled through the preparation of dimeric nanostructures. Au - Fe oxide heterodimeric nanoparticles were prepared and their magnetic properties thoroughly characterised. The results demonstrate the formation of FeO (wustite), together with magnetite, during the thermal decomposition of the iron precursor. By an oxidation process that preserves Au in the dimeric structures, wustite completely disappeared, with the formation of either magnetite and / or maghemite, much better from the magnetic point of view. The plasmon resonance of Au results damped by the presence of the iron oxide, a material with high refractive index, but it is still present if the Au domain of the nanoparticles is exposed towards the bulk. Finally, remarkable hyperthermia, also in vitro, was found for these structures.

Correlação entre microestrutura e comportamento de corrosão em duas ligas do sistema Al-Fe-Si produzidas pelos processos industriais de lingotamento contínuo e semi-contínuo.

As chapas de ligas de alumínio trabalháveis são produzidas atualmente por dois processos, o método de vazamento contínuo conhecido TRC (Twin Roll Continous Casting) ou pelo método tradicional de vazamento de placas DC (Direct Chill). A fabricação de ligas de alumínio pelos dois processos confere características microestruturais diferentes quando comparadas entre si, o que se reflete em suas propriedades. Além disto, ocorrem variações microestruturais ao longo da espessura, especialmente nas chapas produzidas pelo processo TRC. Neste sentido, é importante estudar a evolução microestrutural que ocorre durante o seu processamento e sua influência com relação à resistência à corrosão. Dessa forma foi realizado neste trabalho um estudo comparativo do comportamento de corrosão, bem como das microestruturas do alumínio de alta pureza AA1199 (99,995% Al) e das ligas de alumínio AA1050 (Fe+Si0,5%) e AA4006 (Fe+Si1,8%) produzidas pelos processos industriais de lingotamento contínuo e semi-contínuo. Os resultados obtidos evidenciaram que as microestruturas das ligas AA4006 DC e AA4006 TRC são distintas, sendo observada maior fração volumétrica dos precipitados na liga fabricada pelo processo TRC comparativamente ao DC. Para caracterizar o comportamento de corrosão foram realizados ensaios de Espectroscopia de Impedância Eletroquímica e Polarização Potenciodinâmica, que mostraram a maior resistência à corrosão localizada para a liga fabricada pelo processo TRC em comparação ao processo DC. Além disso, foi verificada, em ordem decrescente, uma maior resistência à corrosão do alumínio AA1050, seguida pela superfície da liga AA4006 e por fim, pelo centro da chapa desta última. Os resultados obtidos por espectroscopia de impedância eletroquímica para as ligas AA4006 fabricadas pelo processo TRC apresentaram melhor desempenho que o processo DC, principalmente em intervalos de 2 a 12 horas de imersão na solução de sulfato de sódio contaminada com íons cloreto. Para tempos de imersão acima de 4 horas foi observado comportamento indutivo em baixas frequências para os dois tipos de processamento investigados, o que foi associado à adsorção de espécies químicas, principalmente íons sulfato e oxigênio, na interface metal/óxido. As curvas de polarização anódica mostraram maior resistência à corrosão localizada para a liga fabricada pelo processo viii TRC em comparação ao processo DC. Este comportamento foi associado às diferentes características microestruturais, observadas para liga AA4006 obtida pelos dois processos.

Novel Ti/Ta2O5-SnO2 electrodes for water electrolysis and electrocatalytic oxidation of organics

Mixed metal oxide (MMO) electrodes have been applied to different technologies including chlorine production, organic compounds oxidation, water electrolysis, electroplating, etc. due to their catalytic, optical and electronic properties. Most of the existing MMO electrodes contain either toxic metals or precious metals of the platinum group. The aim of this study was to develop environmentally friendly and cost-effective MMO electrodes for water and organic compounds oxidation. Ti/Ta2O5-SnO2 electrodes of different nominal composition were prepared, and electrochemically and physically characterized. For water oxidation, Ti/SnO2 electrode with 5 at.% of Ta produced the highest electroactivity. Ti/SnO2 electrode with 7.5 at.% of Ta showed the best performance for the oxidation of methylene blue (MB). The electrocatalytic activity of the Ti/Ta2O5-SnO2 electrodes increased with the number of active layers. The maximum current of water oxidation reached 3.5 mA at 2.5 V when the electrode was covered with ten layers of Ta2O5. In case of the oxidation of 0.1 mM MB, eight and ten active layers of Ta2O5 significantly increased the electrode activity. The prepared electrodes have been found applicable for both water electrolysis and organic compounds oxidation.

(Bio)funcionalização de superfícies nanoestruturadas para eletrocatálise e desenvolvimento de biossensores eletroquímicos e óticos

Tese de doutoramento, Química (Química Física), Universidade de Lisboa, Faculdade de Ciências, 2016

Design of diagnosable MOS networks /

"UILU-ENG 79 1745"--Cover.

Synthesis of logic networks with MOS complex cells.

Vita.

Magnetite-doped polydimethylsiloxane (PDMS) for phosphopeptide enrichment

Reversible phosphorylation plays a key role in numerous biological processes. Mass spectrometry-based approaches are commonly used to analyze protein phosphorylation, but such analysis is challenging, largely due to the low phosphorylation stoichiometry. Hence, a number of phosphopeptide enrichment strategies have been developed, including metal oxide affinity chromatography (MOAC). Here, we describe a new material for performing MOAC that employs a magnetite-doped polydimethylsiloxane (PDMS), that is suitable for the creation of microwell array and microfluidic systems to enable low volume, high throughput analysis. Incubation time and sample loading were explored and optimized and demonstrate that the embedded magnetite is able to enrich phosphopeptides. This substrate-based approach is rapid, straightforward and suitable for simultaneously performing multiple, low volume enrichments. © the Partner Organisations 2014.

Why is it possible to detect doped regions of semiconductors in low voltage SEM:a review and update

There is an urgent need for fast, non-destructive and quantitative two-dimensional dopant profiling of modern and future ultra large-scale semiconductor devices. The low voltage scanning electron microscope (LVSEM) has emerged to satisfy this need, in part, whereby it is possible to detect different secondary electron yield values (brightness in the SEM signal) from the p-type to the n-type doped regions as well as different brightness levels from the same dopant type. The mechanism that gives rise to such a secondary electron (SE) contrast effect is not fully understood, however. A review of the different models that have been proposed to explain this SE contrast is given. We report on new experiments that support the proposal that this contrast is due to the establishment of metal-to-semiconductor surface contacts. Further experiments showing the effect of instrument parameters including the electron dose, the scan speeds and the electron beam energy on the SE contrast are also reported. Preliminary results on the dependence of the SE contrast on the existence of a surface structure featuring metal-oxide semiconductor (MOS) are also reported. Copyright © 2005 John Wiley & Sons, Ltd.

Structure-reactivity correlations in the selective aerobic oxidation of cinnamyl alcohol:in situ XAFS

The structural evolution of a Pd/C catalyst during the liquid phase selective aerobic oxidation of cinnamyl alcohol has been followed by in situ XAFS and XPS. The fresh catalyst comprised highly dispersed, heavily oxidised Pd particles. Cinnamyl alcohol oxidation resulted in the rapid reduction of surface palladium oxide and a small degree of concomitant particle growth. These structural changes coincided with a large drop in catalytic activity. Prereduced Pd/C exhibited a significantly lower initial oxidation rate demonstrating the importance of surface metal oxide in effecting catalytic oxidation. Use of a Pd black model system confirmed that the oxide→metal transformation was the cause, and not result, of catalyst deactivation.

Assembly of a high-dielectric constant thin TiOX layer directly on H-terminated semiconductor diamond

A high-dielectric constant (high-k) TiOx thin layer was fabricated on hydrogen-terminated diamond (H-diamond) surface by low temperature oxidation of a thin titanium layer in ambient air. The metallic titanium layer was deposited by sputter deposition. The dielectric constant of the resultant TiOx was calculated to be around 12. The capacitance density of the metal-oxide-semiconductor (MOS) based on the TiOx/H-diamond was as high as 0.75 µF/cm2 contributed from the high-k value and the very thin thickness of the TiOx layer. The leakage current was lower than 10-13 A at reverse biases and 10-7A at the forward bias of -2 V. The MOS field-effect transistor based on the high-k TiOx/H-diamond was demonstrated. The utilization of the high-k TiOx with a very thin thickness brought forward the features of an ideally low subthreshold swing slope of 65 mV per decade and improved drain current at low gate voltages. The advantages of the utilization high-k dielectric for diamond MOSFETs are anticipated.

Pabively Q-switched erbium-doped fiber laser using Fe3O4-nanoparticle saturable absorber

We experimentally demonstrate pabively Q-switched erbium-doped fiber laser (EDFL) operation using a saturable absorber (SA) based on Fe3O4 nanoparticles (FONPs). As a type of transition metal oxide, the FONPs have a large nonlinear optical response and fast response time. The FONPbased SA pobebes a modulation depth of 8.2% and nonsaturable absorption of 56.6%. Stable pabively Q-switched EDFL pulses with an output pulse energy of 23.76 nJ, a repetition rate of 33.3 kHz, and a pulse width of 3.2 μs were achieved when the input pump power was 110mW. The laser features a low threshold pump power of > 15mW.

Progress in the development of mesoporous solid acid and base catalysts for converting carbohydrates into platform chemicals

This chapter provides a general overview of recent studies on catalytic conversion of fructose, glucose, and cellulose to platform chemicals over porous solid acid and base catalysts, including zeolites, ion-exchange resins, heteropoly acids, as well as structured carbon, silica, and metal oxide materials. Attention is focused on the dehydration of glucose and fructose to HMF, isomerization of glucose to fructose, hydrolysis of cellulose to sugar, and glycosidation of cellulose to alkyl glucosides. The correlation of porous structure, surface properties, and the strength or types of acid or base with the catalyst activity in these reactions is discussed in detail in this chapter.