Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si

Anodic bonding of Pyrex glass/Al/Si is an important bonding technique in micro/nanoelectromechanical systems (MEMS/NEMS) industry. The anodic bonding of Pyrex 7740 glass/Aluminum film/Silicon is completed at the temperature from 300 degrees C to 375 degrees C with a bonding voltage between 150 V and 450 V. The fractal patterns are formed in the intermediate Al thin film. This pattern has the fractal dimension of the typical two-dimensional diffusion-limited aggregation (2D DLA) process, and the fractal dimension is around 1.7. The fractal patterns consist of Al and Si crystalline grains, and their occurrences are due to the limited diffusion, aggregation, and crystallization of Si and Al atoms in the intermediate Al layers. The formation of the fractal pattern is helpful to enhance the bonding strength between the Pyrex 7740 glass and the aluminum thin film coated on the crystal silicon substrates.

射频磁控溅射制备掺Al的纳米Si-SiO_2复合薄膜及其光致发光特性

采用射频磁控技术和退火处理制备掺Al的纳米Si-SiO_2复合薄膜.通过X射线衍射(XRD)、X射线光电子能谱(XPS)和傅里叶变换红外光谱(FTIR)表征了薄膜的结构,组分和成键情况.掺Al在SiO_2中造成氧空位,使薄膜光致发光强度增强,并出现新的发光峰.退火温度对掺Al薄膜的光致发光的峰位和峰强有较大影响.

~(40)Ar~(10+)轰击Al和Si固体表面形成的200～1000nm光谱

报道了利用兰州重离子加速器国家实验室ECR离子源提供的高电荷态离子~(40)Ar~(10+)入射到Al和p型Si表面所产生的Al,Si,Ar原子的200～1000nm特征光谱的实验测量结果。结果表明,低速高电荷态离子与团体表面原子相互作用可有效地激发靶原子和靶离子的特征谱线,而且由于发射二次电子的无辐射退激与辐射光子退激过程的竞争,使得在p型Si表面上Ar原子的光谱强度总体大于在Al表面上的光谱强度。

Amorphous Coatings Deposited on Aluminum Alloy by Plasma Electrolytic Oxidation

Amorphous [Al-Si-O] coatings were deposited on aluminum alloy by plasma electrolytic oxidation (PEO). The process parameters, composition, micrograph, and mechanical property of PEO amorphous coatings were investigated. It is found that the growth rate of PEO coatings reaches 4.44 mu m/min if the current density is 0.9 mA/mm(2). XRD results show that the PEO coatings are amorphous in the current density range of 0.3-0.9 mA/mm(2). EDS results show that the coatings are composed of O, Si and At elements. SEM results show that the coatings are porous. Nano indentation results show that the hardness of the coatings is about 3 - 4 times of that of the substrate, while the elastic modulus is about the same with the substrate. Furthermore, a formation mechanism of amorphous PEO coatings was proposed.

Characterization of the Fracture Work for Ductile Film Undergoing the Micro-Scratch

The interface adhesion strength (or interface toughness) of a thin film/substrate system is often assessed by the micro-scratch test. For a brittle film material, the interface adhesion strength is easily obtained through measuring the scratch driving forces. However, to measure the interface adhesion strength (or interface toughness) for a metal thin film material (the ductile material) by the microscratch test is very difficult, because intense plastic deformation is involved and the problem is a three-dimensional elastic-plastic one. In the present research, using a double-cohesive zone model, the failure characteristics of the thin film/substrate system can be described and further simulated. For a steady-state scratching process, a three-dimensional elastic-plastic finite element method based on the double cohesive zone model is developed and adopted, and the steady-state fracture work of the total system is calculated. The parameter relations between the horizontal driving forces (or energy release rate of the scratching process) and the separation strength of thin film/substrate interface, and the material shear strength, as well as the material parameters are developed. Furthermore, a scratch experiment for the Al/Si film/substrate system is carried out and the failure mechanisms are explored. Finally, the prediction results are applied to a scratch experiment for the Pt/NiO material system given in the literature.

钢基铝镀层转化为陶瓷层的演变规律研究

热浸镀铝钢经等离子体电解氧化（Plasma Electrolytic Oxidation,PEO）处理后,表面铝镀层转化为陶瓷层.实验对阳极电压变化、陶瓷层生长规律、涂层截面形貌和成分等进行了研究.结果表明：在PEO初期,热浸铝试件的阳极电压变化趋势与纯铝试件相同,在PEO后期电压有下降趋势.铝镀层消耗和陶瓷层厚度增长近似为线性变化.当铝镀层完全陶瓷化后,FeAl层参与PEO反应,但陶瓷层生长速率变慢,在界面处出现大量裂纹;陶瓷层主要成分为Al、Si、O元素,相结构主要为γ-Al_2O_3与莫来石相,在PEO后期出现α-Al_2O_3相.复合陶瓷层硬度呈区域性分布,陶瓷层最高硬度可达HV1800.

铸态铝硅合金在磷酸盐电解液中表面陶瓷化行为及结构特征

采用等离子体电解氧化技术在铝硅合金表面制备了陶瓷层,电解液为磷酸盐系列。利用轮廓仪、SEM和XRD对陶瓷层的粗糙度、形貌和相组成进行了研究。结果表明,PEO处理过程可分为4个典型阶段。随处理时间延长,陶瓷层的厚度近似线性增长,表面缺陷增大增多,粗糙度显著增加,达到9.5μm。PEO处理初期只生成γ-Al_2O_3,一定时间后α-Al_2O_3出现,其相对含量逐渐增多.

The mechanism of PEO process on Al–Si alloys with the bulk primary silicon

This study focuses on mechanism of ceramic coating on Al-Si alloys with bulk primary Si using plasma electrolytic oxidation (PEO) technology. Al-Si alloys with 27-32% Si in weight were used as substrates. The morphologies, composition and microstructure of PEO coatings were investigated by scanning electron microscopy (SEM) with energy dispersive X-ray system (EDX). Results showed that the PEO process had four different stages. The effect of bulk Si is greatly on the morphology and composition of coatings at first three stages. Anodic oxide films formed on Al and Si phases, respectively. When the voltage exceeded 40 V, glow appeared and concentrated on the localized zone of interface of Al and Si phase. Al-Si-O compounds formed and covered on the dendrite Si phase surface, and the coating on bulk Si, which was silicon oxide, was rougher than that on other phase. If the treatment time was long enough, the coatings with uniform surface morphologies and elements distribution will be obtained but the microstructure of inner layer is looser due to the bulk Si.

醋酸——醋酸铵缓冲体系中柠檬酸对高岭石的溶解特征

采用间歇法(batch method)模拟研究醋酸-醋酸铵缓冲体系中柠檬酸对高岭石的溶解特征。结果表明:反应液中Al、Si浓度随柠檬酸浓度提高、反应液pH降低及反应时间的推移而增加;且低浓度柠檬酸(1mmol L-1)时,随着酸度的升高,配体促进溶解速率(RL)减小;高浓度柠檬酸(≥5mmol L-1)时,随着酸度的升高,配体促进溶解速率(RL)增加,但增幅随pH的降低而大幅减弱;且随着酸度的升高,配体对高岭石溶解的贡献相对减弱,但相对于质子,本试验柠檬酸浓度及酸度范围内,其对高岭石溶解的贡献仍是主要的。

柠檬酸对高岭石中铝、硅释放的影响

采用间歇法(batch method)模拟研究柠檬酸对水淋洗下高岭石铝、硅释放的影响.结果表明:柠檬酸能显著促进高岭石Al和Si的释放,且Al、Si的释放能力随柠檬酸浓度的增加而增强;高岭石溶解同步性与柠檬酸浓度有关,随着柠檬酸浓度的提高,其溶解的同步性增强,且反应前期高岭石都表现为Al的优先释放,而在反应后期Al、Si趋于同步释放.柠檬酸对高岭石的溶解速率一般较无机酸高1个数量级左右,且其溶解速率表现出对柠檬酸浓度的饱合性.

柠檬酸对酸沉降下高岭石的溶解作用

采用间歇法(batch method)模拟研究酸沉降下的高岭石在柠檬酸溶液中的长期溶解效应。研究表明:柠檬酸能显著促进高岭石Al和Si的释放,且Al、Si的释放能力随柠檬酸浓度的增加而增强;高岭石溶解同步性与柠檬酸浓度有关,随着柠檬酸浓度的提高,其溶解的同步性增强,且反应前期高岭石都表现为Al的优先释放,而在反应后期Al、Si趋于同步释放。柠檬酸对高岭石的溶解速率一般较无机酸高1个数量级左右,且其溶解速率表现出对柠檬酸浓度的饱和性。

Microfabries of lacustrine sediments to pollutant adsorption from a polluted Eutrophic lake, the Yangtze delta region

Two types of microfabrics relating to pollutant adsorption were studied in the scanning electronic microscope (SEM) in a polluted, eutrophic lake, the Yangtze delta region. Agglutinational texture or the aggregates of small particles are composed of clay minerals and fine organic fragments among the silty grains and the coatings with a thickness about 1 mu m were on the surfaces of the silty grains in the sediments. The chemical constituents of the aggregates and the coatings are K, Na, Ca, Mg, Si, Al, O, Fe, Ti, C, N and P determined in X-ray energy spectrometry connected with the SEM. In some cases, Pb was detected in the aggregates in the top sediment. It is suggested that nutrients and metals are adsorbed to the aggregates, which were formed by electrostatic attraction of physicochemical floes. The coatings on the surface of quartz grains were formed by the interaction of dissociated Al, Si, Fe, etc from silicates with dissolved N, P and C nutrients in interstitial water, which was aroused by human pollution to the lake in recent two decades.

Ti/莫来石陶瓷界面反应的俄歇电子能谱研究

结果表明，在淀积过程中，最初淀积的Ti与衬底表面的氧形成Ti-O键，界面区很窄；450℃退火1h后，有少量元素态Al、Si原子析出，界面区有所展宽，但变化不大；650℃退火1h后，界面发生强烈反应，有TiO和Ti-Al、Ti-Si化合物生成。850℃退火1h后，除上述反应产物外又生成了Ti_2O。