Properties of high k gate dielectric gadolinium oxide deposited on Si(100) by dual ion beam deposition (DIBD)

Gadolinium oxide thin films have been prepared on silicon (100) substrates with a low-energy dual ion-beam epitaxial technique. Substrate temperature was an important factor to affect the crystal structures and textures in an ion energy range of 100-500 eV. The films had a monoclinic Gd2O3 structure with preferred orientation ((4) over bar 02) at low substrate temperatures. When the substrate temperature was increased, the orientation turned to (202), and finally, the cubic structure appeared at the substrate temperature of 700 degreesC, which disagreed with the previous report because of the ion energy. The AES studies found that Gadolinium oxide shared Gd2O3 structures, although there were a lot of oxygen deficiencies in the films, and the XPS results confirmed this. AFM was also used to investigate the surface images of the samples. Finally, the electrical properties were presented. (C) 2004 Elsevier B.V. All rights reserved.

Development of high-k gate dielectric materials

The traditional gate dielectric material Of SiO2 can not satisfy the need of the continuous downscaling of CMOS dimensions. High-K gate dielectric materials have attracted extensive research efforts recently and obtained great progress. In this paper, the developments of high-K gate materials were reviewed. Based on the author's background and research work in the area, the latest achievements of high-K gate dielectric materials on the recrystalization temperature, the low-K interface layer, and the dielectric breakdown and metal gate electrode were introduced in detail.

Role of interface dipole in metal gate/high-k effective work function modulation by aluminum incorporation

The interface dipole and its role in the effective work function (EWF) modulation by Al incorporation are investigated. Our study shows that the interface dipole located at the high-k/SiO2 interface causes an electrostatic potential difference across the metal/high-k interface, which significantly shifts the band alignment between the metal and high-k, consequently modulating the EWF. The electrochemical potential equalization and electrostatic potential methods are used to evaluate the interface dipole and its contribution. The calculated EWF modulation agrees with experimental data and can provide insight to the control of EWF in future pMOS technology.

Properties of high k gate dielectric gadolinium oxide deposited on Si(100) by dual ion beam deposition (DIBD)

Gadolinium oxide thin films have been prepared on silicon (100) substrates with a low-energy dual ion-beam epitaxial technique. Substrate temperature was an important factor to affect the crystal structures and textures in an ion energy range of 100-500 eV. The films had a monoclinic Gd2O3 structure with preferred orientation ((4) over bar 02) at low substrate temperatures. When the substrate temperature was increased, the orientation turned to (202), and finally, the cubic structure appeared at the substrate temperature of 700 degreesC, which disagreed with the previous report because of the ion energy. The AES studies found that Gadolinium oxide shared Gd2O3 structures, although there were a lot of oxygen deficiencies in the films, and the XPS results confirmed this. AFM was also used to investigate the surface images of the samples. Finally, the electrical properties were presented. (C) 2004 Elsevier B.V. All rights reserved.

Origin of flat-band voltage sharp roll-off in metal gate/high-k/ultrathin- SiO2/Si p-channel metal-oxide-semiconductor stacks

The origin of the flat band voltage roll-off (V-FB roll-off) in metal gate/high-k/ultrathin-SiO2/Si metal-oxide-semiconductor stacks is analyzed and a model describing the role of the dipoles at the SiO2/Si interface on the V-FB sharp roll-off is proposed. The V-FB sharp roll-off appears when the thickness of the SiO2 interlayer diminishes to below the oxygen diffusion depth. The results derived using our model agree well with experimental data and provide insights to the mechanism of the V-FB sharp roll-off.

Fermi-Level Pinning at Metal/High-k Interface Influenced by Electron State Density of Metal Gate

The Fermi-level pinning (FLP) at the metal/high-k interface and its dependence on the electron state density of the metal gate are investigated. It is found that the FLP is largely determined by the distortion of the vacuum level of the metal which is quantitatively ruled by the electron state density of the metal. The physical origin of the vacuum level distortion of the metal is attributed to an image charge of the interface charge in the metal. Such results indicate that the effective work function of the metal/high-k stack is also governed by the electron state density of the metal.

Projected shell model description for high-spin states in neutron-rich Fe isotopes

A systematic study of neutron-rich even-even Fe isotopes with a neutron number from 32 to 42 is carried out by using the projected shell model. Calculations are performed up to the spin I=20 state. Irregularities found in the yrast spectra and in B (E2) values are discussed in terms of neutron excitations to the high-j orbital g(9/2). Furthermore, the neutron two-quasiparticle structure of a low-K negative-parity band and the proton two-quasiparticle structure of a high-K positive-parity band are predicted to exist near the yrast region. Our study reveals a soft nature for the ground state of N approximate to 40 isotopes and emphasizes the important role of the neutron g(9/2) orbital in determining the structure properties for both low- and high-spin states in these nuclei.

Flourescent Switch Constructed Based on Hemin-Sensitive Anionic Conjugated Polymer and Its Applications in DNA-Related Sensors

Here, a fluorescent switch is constructed combining hemin, hemin aptamer, and a newly synthesized anionic conjugated polymer (ACP), poly(9,9-bis(6'-phosphate-hexyl) fluorenealt-1,4-phenylene) sodium salt (PFHPNa/PFP). In the "off-state", the fluorescence of PFP is sensitively quenched by hemin, with a high K-sv value of similar to 10(7). While in the "on-state", the formation of the aptamer/hemin complex recovers the fluorescence intensity. The fluorescent switch is sensitive and selective to hemin. To testify the universality and practicality of the fluorescent switch, a series of label-free DNA-related sensing platforms are developed, containing three DNA sensing strategies and one ATP recognition strategy. The fluorescent switch developed is simple, sensitive, and universal, which extends applications of the anionic conjugated polymers.

Changes in nitrogen and phosphorus and their effects on phytoplankton in the Bohai Sea

Systematic studies of the changes in dissolved inorganic nitrogen (DIN) and dissolved inorganic phosphorus (DIP) and their effects on phytoplankton over the last 30 years in the Bohai Sea are presented. The amount of sewage disposal, use of fertilizer and the Huanghe River runoff were found to have a significant influence on the DIN or DIP concentrations in the Bohai Sea over the last 30 years. Moreover, the changes in DIN and DIP resulted in changes in the limiting nutrients of phytoplankton in the Bohai Sea from nitrogen in the early 1980s to nitrogen-phosphorus in the late 1980s, and then to phosphorus after the 1990s. In addition, changes in nitrogen and phosphorus had a significant effect on the phytoplankton community structure. The half saturation constant (K (s)) was used to evaluate the effect of nutrients on the phytoplankton community structure in the Bohai Sea over the last 30 years. Cell abundance percentages of dominant phytoplankton species with high K (s) values for phosphorus and low K (s) values for nitrogen have decreased since the 1980s, while those of dominant phytoplankton species with low K (s) values for phosphorus and high K (s) values for nitrogen increased during this period.

大兴安岭北段晚中生代火山岩地球化学特征及其地质意义

This thesis mainly concentrates on the geochronology, prtrology, elemental geochemistry and Sr-Nd-Pb-Hf isotopic geochemistry of the volcanic rocks in north Da’Hinggan Mountain. By analyzing the data obtained in this study and data from other people, this thesis explored the age distribution, petrology and mineralogy and geochemistry characteristics of the volcanic rocks in north Da’Hinggan Mountain. Furthermore, this thesis speculated upon the source characteristics of these volcanic rocks and their implications for the tectonic evolution and crust accretion. According to the twenty Ar-Ar ages, four zircon U-Pb SHRIMP ages and two Zircon U-Pb LA-ICP-MS ages, the duration of the eruption of the Late Mesozoic volcanic rocks in north Da’Hing Mountain was about 160Ma-106Ma. Most of these volcanic rocks belong to early Cretaceous and the late Jurassic volcanic rocks are only restricted in Manzhouli. The bulk of the late Mesozoic volcanic rocks are high-K calc-alkaline rocks. Only a small portion of these volcanic rocks are shoshonites. These rocks are mainly intermediate or acid and the basic rocks usually have higher alkaline contents. Rock types are very complex in this region. These volcanic rocks have a large TiO2 variation and the Al2O3 and alkaline contents are high. From the point of mineralogy, the plagioclases in these volcanic rocks are oligoclases, andesines and labradorites, and the labradorites are more common. Most pyroxenes in these volcanic rocks are augites which belong to clinopyroxene. The source of the Late Mesozoic volcanic rocks was an enriched lithospheric mantle. When the magma en route to the surface it was contaminated by crust material slightly and had some fractional crystallization. These rocks which mainly belong to high-K calc-alkaline series were one of the results of postorogenic tectonic-magmatic activities. The upwelling in late Mesozoic supplied heat to melt the enriched lithospheric mantle which was resulted from the subduction of paleo-Asian Ocean and/or Mengol-Okhotsk ocean. These late Mesozoic volcanic rocks are also important to the upper crustal accretion of north Da’Hinggan Mountain since the late Mesozoic. These volcanics and the contemporary emplacement of granites and the basaltic underplating in combination fulfilled the crust accretion history in north Da’Hinggan Mountain in Late Mesozoic.

华北克拉通孔玆岩系中石榴子石花岗岩的成因：熔体与残留相混合机制的研究

The most widespread rock associations in the Western Block of North China Craton are khondalites distributed mainly in Jining, Liangcheng and Datong. A large quantitiy of garnet-bearing granites are contained in the khondalites. A great deal of research has been carried out on them by previous researchers. Studies of these garnet-bearing granites consist essentially of structural characteristics, petrography and geochemistry, and finally geochronological determinations. Summing up these researches, it will not be difficult to see that all of these authors have regarded these large numbers of garnets (up to 20%) contained in granites as crystallized products from magmas, but they have not proved this from petrological perspective. Theoretically, there are possibly three kinds of petrogenesis as to these garnets. The first one is that they have been transferred to the granites from khondalites by melt when anatexis happened to khondalites, and they, in essence, are residual metamorphic garnets; The second one is that when the khondalites were being melted, these garnets were produced from biotite dehydration melting, and the newly formed garnets intruded together with the melt and eventually molded the garnet-bearing granites. Garnets of this possible kind either showed independent crystals, or garnets from khondalites took place secondary growth under favorable temperature and pressure conditions for their crystallization; The last possibility is that these garnets were crystallized from magmas in which suitable pressure, temperature and composition were available. These garnets, generally, should be fine-grained. The aim of this study is, through examining the mineral chemistry of the garnets and the whole rock chemistry, to ascertain under which kind of mechanism, in the world, did these garnets form? Besides, we try to calculate the temperatures under which khondalites began melting and reactions of the garnets and the cooled melts happened by garnet-biotite thermometry. The whole rock chemistry analyses of the garnet-bearing granites tell us that all the samples are strongly peraluminous (A/CNK greater than 1.1) on the A/NK vs. A/CNK plot. On the SiO2-K2O plot, the granites are mainly constrained to be high-K calc-alkaline and calc-alkaline series, consistent with previous researches. On the ACF（（Al2O3-Na2O-K2O）-FeO(T)-CaO） discrimination plot, all the six garnet-bearing granite samples drop into the area of S-type granites. The relationship between CaO/Na2O and SiO2 shows that the overwhelming majority of garnet-bearing granites have a CaO/Na2O value over 0.3, revealing that they probably come from metagreywacke precursors or mediate-felsic orthogeneisses compositionally similar to them. Detailed EPMA analyses conducted on the garnets contained in the garnet-bearing granites show that all the garnets are dominated by almandine and pyrope, which occupy 92-96% (Weight Percentage) of each garnet analyzed, typical of granulite facies. Their chemical composition is entirely different from those crystallized in magmas, but extremely similar to those of typical granulite facies metapelites in khondalites and typical granulites, indicating all the garnets to be metamorphogenic. In addition, REEs distribution patterns of the garnets are totally different from typical biotite granites and peraluminous granites. In other words, both LREE and HREE of our garnets are evidently lower than those from these two kinds of rocks. Moreover, compared to the REE pattern of the garnets from typical amphibolites, LREE content of our garnets is obviously higher and HREE content is a little lower. However, REE patterns of our garnets are completely in harmony with those of garnets from typical granulites. So, the REE patterns of garnets, again, prove that all the garnets we studied are metamorphogenic. Biotites appear in two forms, being as inclusions in the garnet and as selvages immediately adjacent to the garnet, respectively. Two reactions and their corresponding temperatures, with the help of petrography and Garnet-Biotite geothermometers, could be obtained, which are Bt+ Pl+ Qtz→Kfs+ Opx+ Grt+ melt as positive reaction and Kfs+ Grt+ melt→Bt+ Pl+ Qtz as reverse reaction, respectively. Summing up the discussion above, we declare that the garnet-bearing granites distributed in the Western Block of North China Craton are the mixture of melts and restites resulted from biotite dehydration melting. The garnets contained in the restites are the products from biotite dehydration melting and restites from the khondalites, respectively.

新疆谢米斯台中段地区火山岩特征及其含矿性研究

Central Xiemisitai is located on the northwest edge of the Junggar Basin, bounded on the north by Sawuer Mountain, and southward Junggar Basin. Geotectonically, it is within the Chengjisi-Ximisitai-Santanghu island arc of Late Paleozoic, between Siberian and Junggar plates. The volcanics in this area mainly consist of acidic volcanic lava, rock assemblage of esite, dacite, and rhyolite, and the transitional phase is comparatively developed. Besides, Si2O of volcanics here covers a large range of 53.91-79.28t %, K2O of 1.71-6.94t%, and Na2O of 2.29-5.45t%, which is a set of metaluminous- peraluminous high K calc-alkaline to calc alkaline mid-acidic volcanic series. In addition, the volcanics are potassic to high-potassic assemblage, with slight shoshonite in. The REE curve of volcanics in central Xiemisitai is rightward and smooth, inclining to LREE enrichment, which reveals the characteristics of island-arc volcanics. Through the lithology changing from neutral to acidic, the negative anomaly of Eu is increasing. The volcanics here deplete HFSE such as Nb, Ti, P, etc., but relatively rich in LILE like Rb, K, Th, etc., possessing geochemistry characteristics of arc volcanics, which means that the lava source region is watery, under the meta-somatic contamination of subducted components. Moreover, high Ba and Sr show volcanics in epicontinental arc environment, and their contemporaneous granitoid rocks are also marked with the characteristics of volcanic arc granite. In central Xiemisitai, the volcanics zircon age of volcanic rhyolite is 422.5Ma± 1.9Ma, mid-late Silurian. Only one sample zircon has been measured for the present, not very convincing, so volcanics here might not come from Devonian volcanism. Consequently, further confirming the volcanic age will play a key role in the research on the beginning of volcanism in Xiemisitai area and even North Xinjiang. This area includes three copper mineralization types: a) from andesite fracture; b) from rhyolite fracture broken zone, with the copper mineralization distributed by veins along the fissure; and c) from quartz veins. The mineralization of earth surface in S24 ore spot is intensive, and the primary geochemistry reconnaissance anomaly is fairly good. According to display data, the maximum content of Cu is as high as 0.9% and as low as 0.05%. Also, ore-control fracture structure is having a considerable scale in the strike of fracture both horizontally and vertically downwards, and the result of the geophysics stratagem EH-4 system reveals obvious low-resistivity anomaly. As a result, we believe that the S24 plot is expected to be a volcanic copper deposit target area.

晚中生代松辽盆地形成的大地构造环境及成因机制

Directed by the theory of "Collision Tectonic Facies", the tectonic setting and dynamic mechanism of the formation of Songliao basin in late Mesozoic (J_3-K_1) are studied in the present thesis with the methods of petrology, petrochemistry, geochemistry and isotopic geochronology. The research contents in this paper include as followings. Firstly, the general tectonic frame is made up of different tectonic facies formed from Mid-late Proterozoic to Mesozoic, which are Huabei plate, the Chengde-Siziwangqi melange (Pz_1), the Wenduermiao magmatic arc (Pz_1), the Hegenshan-Chaogenshan melange (Pz_2), the accretion arec (Pz_1-P), the Raohe-Hulin melange (Mz), the magmatic arc (Mz) and the pull-apart basin on the magmatic arc (Mz). Secondly, the volcanic rock assemblages of Songliao basin and its adjacent area in late Mesozoic is the typical calc-alkaline of the magmatic arc. The types of volcanic rocks in the study area include basalts, basaltic andesites, andesites, dacites and rhyolites, and basic-intermediate volcanic rocks have higher alkalinity. The volcanic rock series in this area is the high-K calc-alkaline series. Thirdly, the total REE of volcanic rocks in Songliao basin and its adjacent area is higher than that of the chondrite. The pattern of the REE normalized by the chondrite shows the characteristics similar to that of the typical island arcs or the active continental margins in the earth, that is enrichment of LREE and depletion of Eu. The spider-diagram of the trace element normalized by the primitive mantle also expresses the similar features to that of the typical island arcs or the active continental margins, it has distinctive valleies of Nb, Ta, Sr, P, and Ti, as well as the peaks of La, Ce, Th, U, and K. The incompatible elements show that the high field strength elements, such as Nb, Ta, Ti, and P, are depletion while the low field strength elements, such as K, U, Pb, and Ba, are enrichment. These features are similar to those of orogenic volcanic rocks and imply the formation of the volcanic rocks in this area is related to the subduction. The degrees of both the enrichment of the HFS elements and depletion of the LFS elements become more obvious from basic to acid volcanic rocks, which suggests crustal contamination enhances with the magmatic crystallization and fractionation. The concentration of the compatible elements is W-shape, and anomalies in Cr and Ni suggest there is the contamination during the magmatic crystallization and fractionation. Fourthly, the isotopic age data prove the volcanic activity in the Songliao basin and its adjacent area started in the early-middle Jurassic, and ended in the end of the early Cretaceous-the beginning of the Cretaceous. The volcanism summit was the late Jurassic-the early Cretaceous (100 - 150Ma). Finally, the tectonic setting of volcanism in the late Mesozoic was magmatic arc, which originated the subduction of Raohe-Hulin trench to the northwest Asian plate. The subduction began in the middle Jurassic, and the collision orogenesis between the Sikhote-Alin arc and Asian continent was completed in the end of the early Cretaceous-the beginning of the late Cretaceous. The results of above tectonic processes were finally to format Nadanhada orogenic belt symbolized by the Raohe-Hulin suture or melange belt. The violently oblique movement of the Izanagi plate toward Asian plate in the late Mesozoic was the dynamic mechanism of above tectonic processes. At the same tome, the left-lateral strike-slip shear caused by the oblique movement of the Izanagi plate produced a series of strike-slip faults in east Asian margin, and the large scale displacements of these strike-slip faults then produced the pull-apart basing or grabens on the magmatic arc. Conclusively, the tectonic setting during the formation of the grabens of Songliao basin in the late Mesozoic was magmatic arc, and its dynamic mechanism was the pull-apart. In a word, there was a good coupling relation among the oblique subduction of the oceanic plate, collisional orogene between island arc and continental plate, strike-slip shear of the faults and the formation of the grabens in Songliao basin and its adjacent area in late Mesozoic. These tectonic processes were completed in the unoin dynamic setting and mechanism as above description.

山东莱芜中生代高镁侵入岩及其超镁铁质岩捕掳体的成因研究

In order to know better about the Phanerozoic lithosphere thinning process of Sino-Korea Plate, four Cretaceous intrusion complexes and their ultramafic xenoliths are investigated by this thesis, which are located in Laiwu, Shandong Province, Eastern China, a region far away from plate margin. The four complexes, Kuanshan, Jiaoyu, Jingniushan and Tietonggou, intruded into Archaeozoic granite gneiss and Paleozoic carbonate rocks with scam iron ore at their contact zone. The four complexes can be divided into two magma series, abyssal rocks for the early and hypabyssal rocks for the later. K-Ar dating show that the abyssal rocks intrusion began with 120 ±2 Ma and the hypabyssal rocks intruded about 113 Ma. Abyssal rocks, mainly made up of augite diorites, amphibole diorites and gabbros for the lesser, are chemically characterized with high-Mg (Mg#>0.5) high-K calcalklic rock, which are depleted with Nb, Ta and Ti related to LILE and extremely enriched with Sr and Pb. Comparatively, augite diorites are the most LREE enriched in abyssal rocks, and they show no Eu abnorrnity or weak positive Eu abnormity. Gabbros show the least LREE enrichment with a strong Eu abnormity relatively. In (~(87)Sr/~(86)Sr)_1 -ε Nd(T) diagram, the abyssal rocks show a mixing trend , a rapid change in ε Nd(T) with a relatively small change in (~(87)Sr/~(86)Sr)_1. Low radiogenic Sr and Pb composition with high radiogeic Nd composition indicate that the mixing processes happened in lower crust Melt-rock interactions in lower crust might be the most possible processes to produce these high-Mg and high-K calcalklic magmas. Hypabyssal rocks, mainly made up of granite porphyry and dioritic porphrite, show much higher ε Nd(T) than abyssal rocks. Granite porphyry are distinct with an adakite geochemical characteristics, high (La/Yb)_N, Sr/Y and low Rb/Sr ratio. The adakitic granite porphyry indicates a new lower crust produced by underplating within plate. Ultramafic xenoliths had been found only in augite diorites and amphibole diorites. Field investigations show that ultramafic xenoliths in augite diorites had been inherited from amphibole diorites, so ultramafic xenoliths had been only entrained by hydrous dioritic magma. Ultramafic xenoliths are mainly made up of dunite and harzburgite, orthopyroxenite and bistangite are the lessor. Coarse olivines in dunite often show many chromite exsolution lamellae. Opx in orthopyroxenite often show dense chromite exsolution lamellae. The presence of exsolution minerals indicates that ultramafic xenoliths had cooled before entraining. Metasomatism phenomenons are popular in dunite and harzburgite xenoliths, including two kinds of assemblage, cpx+phlogapite and opx+pl. The first metasomatism assemblage indicates an ancient enrichment. Rb-Sr dating of xenoliths shows that the ancient enrichment happened in 223 ± 7Ma. The second metasomatism assemblage indicates a recent, relatively not deep melt-rock interaction, which might be related with the genesis of the high-Mg high-K calcalklic rocks. Mineralogy and geochemistry indicate that these ultramafic xenoliths might sample the crust-mante transition zone (or the base of lower crust, moho). Investigation of high-Mg intrusions and their ultramafic xenoliths in Laiwu indicate that the thinning processes of Sino-Korea Plate can be divided into two stages. The first stage is lithosphere mantle thinning with crust thickening by underplating in lower crust. The second stage is that the thickened lower crust delaminated into the underlying mantle.

青藏高原东缘新生代富钾碱性岩的年龄与岩石地球化学特征

The Cenozoic high-Potassium alkaline magma rocks are widely distributed in the eastern margin of Qinghai-Xizang (Tibet) plateau, such as Mangkang, Deqin, Jianchuan, Haidong in the western Yunnan Province, Yanyuan, Muli in the western Sichuan province, including syenite, minette and trachyte and lamprophyres, which formaed a large alkaline-rich magmatic rock zone along the Jinshajiang-Ailaoshan fault. Here we present detailed Geochemical and Geochronology study for the Cenozoic high-K alkline magma rocks from Mangkang, Deqin, Jianchuan, Haidong and Muli, Yanyuan, Yanbian, Yaoan (western Yangtze craton). Rocks of our target area include syenite, minette and trachyte. Geochronologic dating and compilation of existing age data suggest magmatism occurred at 32-38Ma and distribute along the Jinsha suture, from Jinping, Daping, Zhenyuan to Haidong, Jianchuan, Deqin, Mangkang, Zaduo to Qiangtang Bandaohu, Zhentouya. They all share same geochemical features such as rich in potassium and alkaline, rich in LREE, slightly negative Eu anomalies, negative anomalies in Nb, Ta, Ti,. These indicate they come from EMU mantle. Geochronologic dating on western Yangtze craton minette surgest minette in Haidong, Yanyuan, Yanbian, Yaoan, Deqin ocurred at 30-37Ma, well minette in Muli ocurred at IMa. Need more detailed geology study to find differece of these two episode magmatism.