88 resultados para 002
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采用脉冲激光沉积工艺在不同条件下以Si(111)为衬底制备了Zno薄膜.通过对不同氧压下(0~50Pa)沉积的样品的室温PL谱测试表明,氧气氛显著地提高了薄膜的发光质量,在50Pa氧气中沉积的ZnO薄膜具有最强的近带边UV发射.XRD测试说明在氧气氛中得到的薄膜结晶质量较差,没有单一的(002)取向.利用-低温(500℃)沉积的ZnO薄膜作缓冲层,得到了高质量的ZnO外延膜.与直接沉积的ZnO膜相比,生长在缓冲层上的ZnO膜展现出规则的斑点状衍射花样,而且拥有更强的UV发射和更窄的UV峰半高宽(98meV).对不同温度下沉积的缓冲层进行了RHEED表征,结果表明,在600~650℃之间生长缓冲层,有望进一步改善ZnO外延膜的质量.
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采用双晶X射线衍射(DC-XRD)研究蓝宝石(0001)衬底上横向外延GaN层中晶面倾斜的形成原因。发现横向生长区的GaN在垂直掩模方向上朝SiNx掩模层弯曲。采用选择性腐蚀逐渐去掉SiNx掩模层,发现XRD中G N(002)ω扫描衍射峰两侧存在与晶面倾斜有关的衍射信息。该衍射信息起初为一个很宽的峰,随着选择性腐蚀的进行,会先分裂为两个峰,最后当SiNx掩模层全部腐蚀掉后,其中一个衍射峰会消失,而只剩下一个很窄的峰。作者证实造成横向外延GaN中晶面倾斜的原因有两个
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尝试用侧向外延(ELOG)方法来降低立方相GaN中的层错密度。侧向外延是在SiO_2/GaN/GaAs图像形底上进行的,对生长所得的立方相GaN外延层用扫描电子显微镜(SEM)和透射电子显微镜(TEM)进行了观察和分析,TEM的平面像表明经过ELOG方法生长后,立方相GaN外延层中的层错密度由侧向外延生长前的5 * 10~9cm~(-2)降低至生长后的6 * 10~8cm~(-2)。双晶X射线衍射(DCXRD)测量给出侧向外延前后外延层ω扫描(002)衍射摇摆曲线的半高宽(FWHM)分别为33’和17.8’,表明晶体质量有了较大改善。对立方相GaN侧向外延过程中层错减少的机制进行了讨论。
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High quality cubic GaN (c-GaN) is grown by metalorganic vapor deposition (MOCVD) at an increased growth temperature of 900 ℃, with the growth rate of 1.6 μm/h. The full width at half maximum (FWHM) of room temperature photoluminescence (PL) for the high temperature grown GaN film is 48meV. It is smaller than that of the sample grown at 830 ℃. In X-ray diffraction (XRD) measurement, the high temperature grown GaN shows a (002) peak at 20° with a FWHM of 21'. It can be concluded that, although c-GaN is of metastable phase, high growth temperature is still beneficial to the improvement in its crystal quality. The relationship between the growth rate and growth temperature is also discussed.
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采用常规磁控溅射方法,通过优化工艺,在Si(100),Si(111)多种基片上沉积ZnO薄膜。利用透射电镜(TEM)、X射线衍射(XRD)和X射线摇摆曲线(XRC),对ZnO薄膜的微区形貌、结晶情况、C轴择优取向进行了详细的测试分析。结果表明,所制备的ZnO薄膜具有理想的结构特性,大多数样品测得ZnO(002)晶面XRC的半高宽(FWHM)1°左右,最小值达0.353°,优于目前国内外同类研究的最佳结果2°。并对ZnO/Si(100)与ZnO/Si(111)衬底的结果进行了比较和讨论。
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以回摆法衍射峰的积分强度为基础,提出了X射线衍射分析单晶体时的多重性因子和衍射几何因子的概念,推导出普遍适用的相含量计算公式。利用双晶X射线多功能四圆衍射仪测绘GaN/GaAs(001)外延层中立方相(002)面、{111}面和六角相{10-10}面的极图和倒易空间Mapping,分析了六角相和立方相微孪晶的各晶面在极图中的分布特征及计算相含量时的多重性因子和衍射几何因子,并根据立方相(002)、立方相微孪晶{111}、六角相{10-11}和{10-10}衍射峰的积分强度,求得外延层中立方相微孪晶和六角相的含量。
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Cubic GaN(c-GaN) films are grown on GaAs(001) substrates by metalorganic chemical vapor deposition (MOCVD). Two GaN samples were grown with different buffer layer, the deposition time of each was 1 and 3 min, respectively. 4-circle X-ray double crystal diffraction (XRDCD) was used to study the secondary crystallographic phases presented in the c-GaN films. The phase composition of the epilayers was determined by X-ray reciprocal space mapping. The intensities of the c-GaN(002) and h-GaN(10 (1) over bar 1) planes detected in the mapping were investigated by omega scans. The content of the hexagonal phase inclusions in the c-GaN films was calculated to about 1.6 and 7.9%, respectively. The thicker buffer layer is not preferable for growing high quality pure c-GaN films. (C) 2000 Elsevier Science S.A. All rights reserved.
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为了从分子水平对中国药用石斛及其混伪品进行鉴定,本文选取了核rDNA ITS 序列和叶绿体DNA 的matK 基因序列进行研究。采用改良的CTAB 法提取石斛的基因组DNA,PCR 产物直接测序法对17 种(共32 份)药用石斛的核糖体内转录间隔区ITS 全序列进行测定,克隆测序法对12 种(共22 份)药用石斛的叶绿体的matK 基因序列进行测定,运用BioEd it,MEGA4.0 等生物软件分析了石斛属植物的rDNA ITS 序列及叶绿体的matK 基因序列的特征,比较了石斛属间、种间、种内不同居群(品种)间的序列碱基差异及遗传距离,应用邻接法构建分子系统树。主要研究结果如下: (1)建立了17 种(共32 份)药用石斛rDNA ITS 区碱基全序列数据库,其中,ITS1 的长度为228~234 bp,GC 含量为45.7%~53.0%,变异位点167 个,占总位点67.34%,信息位点106 个,占总位点42.74%,ITS2 长度为241~247 bp,GC含量为44.8%~55.7%,变异位点165 个,占总位点66.27%,信息位点115 个,占总位点46.18%。 (2)建立了12 种(共22 份)药用石斛的叶绿体matK 基因全序列数据库,叶绿体matK 基因长1410 bp,变异位点51 个,信息位点11 个。除了存在碱基替换的遗传变异外,还存在碱基的插入和缺失。 (3)通过ITS 序列比较分析了各材料间的遗传距离和碱基差异,属间的遗传距离为0.295,石斛种间的平均遗传距离为0.142,碱基相差2~156 个,种内各居群间的平均遗传距离为0.002,碱基相差1~2 个。属间的遗传距离大于种间的遗传距离,种间的遗传距离大于种内不同居群(品种)间的遗传距离。 (4)根据分析石斛叶绿体的matK 基因序列得到,外类群(密花石豆兰)与石斛属间最小遗传距离为0.027,石斛种间的平均遗传距离为0.008,种间最大的遗传距离0.014, 最小的遗传距离为0.003,碱基相差8~20 个。种内不同居群(品种)遗传距离为0.001,相差1~5 个碱基。 (5)利用17 种石斛的全序列数据库及遗传分析软件,通过对待检种rDNA I TS区进行序列测定,成功地对10 个待检种进行了鉴定,并且在原植物开花后得到了验证。 (6)运用12 种石斛的matK 基因全序列数据库及遗传分析软件,成功地对4个待检种进行了鉴定,同样在原植物开花后得到了验证。 (7)本文利用石斛的核糖体内转录间隔区ITS 序列和叶绿体的matK 基因序列数据库分别构建了NJ 树,外类群与石斛属间石斛种间以及种内不同居群(品种)间均能在NJ 树中明显分化开来,二者构建的分子系统树一致,为石斛的分子鉴定提供了依据。 In order to identify Chinese Herba Dendrobii and its adulterant species on molecular level, we studied the sequences of rDNA ITS and chloroplast matK gene. Genomic DNA of Dendrobium was extracted using the modified cetyltrimethyl ammonium bromide (CTAB) method. The PCR products of the rDNA ITS sequences of Dendrobium (32 materia ls) were purified and then sequenced. The PCR products of chloroplast matK gene of Dendrobium (22 materia ls) were purified, cloned and then sequenced. The characteristic of the sequences and the genetic dista nce were compared between Bulbophyllum odoratissimum and Dendrobium, Dendrobium interspecies, and different populations. Phylogenetic trees were constructed using the NJ method by the biology softwares including BioEd it, MEGA4.0 etc. The ma in results as follows: (1) It was built up that the database of rDNA ITS sequences of 17 species of Herba Dendrobii (32 materia ls). The ITS1 was 228~234 bp, the GC content accounting for 45.7%~53.0%. Its variable sites were 167, accounting for 67.34%. The Parsim-Informative positions were 106, accounting for 42.74%. The ITS2 was 241~247 bp, the GC accounting for 44.8%~55.7%. The variable sites were 165, accounting for 66.27%. The Parsim-Informative positions were 115, accounting for 46.18%. (2) The database of the chloroplast matK gene sequences was built up, which contained 12 species of Herba Dendrobii (22 materia ls). The matK gene sequences were about 1410bp in length. There were 51 variable sites and 11 Parsim-Informative sites. And there were nucleotides insertions and deletions in some species , in addition to the nucleotides substitutions. (3) The rDNA ITS sequences were compared and analyzed by the biology softwares. The genetic dista nce between Bulbophyllum odoratissimum and Dendrobium was 0.295. The avera ge genetic dista nce was 0.142 between Dendrobium species, and there were 2~156 variable nucleotides. The avera ge genetic dista nce between different populations was 0.002, and there were 2~156 variable nucleotides. The genetic dista nce between Bulbophyllum odoratissimum and Dendrobium was greater tha n that of Denrobium interspecies. Meanwhile, the genetic dista nce between Denrobium species was also greater tha n that of different populations (variaties). (4) The characteristics of the chloroplast matK gene sequences were obtained after analyzing by the biology softwares. The minima l genetic dista nce was 0.027 between Bulbophyllum odoratissimum and Dendrobium . The ma xima l genetic dista nce was 0.014 between Dendrobium species, and there were 20 variable nucleotides. The minima l genetic dista nce between populations was 0.003, and there were 8 variable nucleotides.The genetic dista nce between populations was 0.001, and there were 1~5 variable nucleotides. (5) The molecular Phylogeny tree was constructed on the database of rDNA ITS the sequences of 17 species of Herba Dendrobii using the biology softwares. Then we authenticated 10 materia ls on molecular level. What’s more, they had been proved when these pla nts flowered. (6) The molecular Phylogeny tree was built up on the database of chloroplast matK gene sequences of 12 species of Herba Dendrobii with the biology softwares.Then 4 materia ls were authenticated on molecular level. Moreover, they had also been proved when these pla nts were in flower. (7) The Phylogenetic trees were separately constructed on the sequences of rDNA ITS and chloroplast matK gene B. odoratissimum and Dendrobium all could be distinguished on the Phylogenetic trees. Meanwhile, the Phylogenetic trees based on two groups of sequences were coincident. rDNA ITS and matK gene sequence could be used as molecular markers for authentication of Herba Dendrobii.
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本文从不同厌氧生境中获得7组(C-2、Y-2、L-2 、NZ、H-3、CZ、L-3)具有纤维素降解能力的复合菌系。经过不断传代、淘汰纤维素降解能力降低的菌系,最后得到一组高效、传代稳定的厌氧纤维素分解复合菌系L-3。该菌系可使滤纸在42 h内溃烂,并能在分解纤维素的同时产氢气。对L-3复合菌系的产酶条件进行了研究,结果表明,在实验范围内该菌系的产酶最适条件为:pH 6.5,温度37 ℃,接种量5 %,最佳碳源为滤纸,最佳氮源为硫酸铵。第10天测得羧甲基纤维素酶(CMCase)、滤纸酶(FPA)、外切葡聚糖酶(C1)、β-葡聚糖苷酶(β-glucodase)的酶活分别为0.216 U/ml、0.101 U/ml、0.132 U/ml、0.002 U/ml,滤纸失重率70.6 %。发酵代谢产物乙醇和丁酸含量分别可达1378 mg/L 、2695 mg/L,发酵产生的气体中氢气含量最高可达70.2 %。DGGE结果表明该菌系主要由14种菌组成,其中有三株菌在发酵前后菌数发生了明显的变化,说明在以滤纸为底物的降解过程中,这三株菌起到了重要作用,对这三株菌进行了分子生物学鉴定,初步定为Clostridium phytofermentans、Clostridium cellulovorans、Desulfovibrio sp。 利用实验室分离得到的纤维素降解菌,最终配制出由10、X-1、X-13、ST-13、L-3组成的好氧-厌氧纤维素降解复合菌剂。以秸秆为发酵底物,菌剂接种量1%,利用复合菌剂预处理后的秸秆,发酵总产气量相对于对照提高了71.62%,甲烷含量最高可达70.08%。 A group of microbial consortia L-3 was isolated from the anaerobic fermentation residue of corn stalk, which could degrade cellulose and produce hydrogen. The CMCase, FPA, C1 and β-glucosidase activity of L-3 could reach to 0.216 U/ml, 0.101 U/ml, 0.132 U/ml and 0.002 U/ml, respectively. In the filter degrading process, the filter paper collapsed in the liquid culture within 42 h and the filter degrading rate could reach to 70.6% in the 13 days, meanwhile, hydrogen was determined and the highest hydrogen content was 70.2%. The optimum cellulase-degrading conditions were filter papaer as the carbon source, (NH4)2SO4 as the nitrogen source, 37 ℃ and pH 6.5 in this experiment. DGGE results showed that the microbial consortia L-3 mainly included 14 strains. The amount of 3 strains were changed during the fermentation. These strains were identified as Clostridium phytofermentans、Clostridium cellulovorans、Desulfovibrio sp by 16S rDNA sequence analysis. The cellulose- degrading microbial agent was composed by 10, X-1, X-13, ST-13, L-3 which were isolated in the laboratory. The straw pretreated by cellulose-degrading microbial agent was used to ferment, the total biogas production increased by 72% comparing to the control. The content of methane could reach to 70.08%。
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本论文研究了利用三孢布拉氏霉(Blakeslea trispora)发酵产β-胡萝卜素的培养条件。主要包括:发酵培养基的确定,发酵条件的优化。还考察了发酵菌丝体中β-胡萝卜素的提取方法及薄层层析等。 首先研究了培养基成分对三孢布拉氏霉发酵产β-胡萝卜素的影响。确立了玉米淀粉作为碳源,黄豆粉(热榨)作为氮源,棉籽油作为植物油的发酵培养基配方,其成分为:玉米淀粉 3%,黄豆粉(热榨) 2%,棉籽油 3%,KH2PO4 0.2%,MgSO4·7H2O 0.2%,维生素B1 0.002%,pH值6.0。 其次,通过比较不同的发酵影响因子,分别得到最适的条件:如三孢布拉氏霉正负菌接种比例为1.3:0.7,培养基pH值为7.0(灭菌后),发酵促进因子为Triton X-100。并采用正交试验法,确定其最佳发酵条件为正负菌接种比例1.3/0.7,发酵培养基pH为7.0,在培养基中添加表面活性基Triton X-100 0.08%。使该菌株产β-胡萝卜素的量达到0.73g/L,较初始发酵条件提高了3.3倍。 研究中还找到一个简便有效的对β-胡萝卜素的提取方法,选用盐酸-热处理法进行细胞破壁,并选用沸程为60~90℃的石油醚进行萃取。 用三孢布拉霉菌丝体内类胡萝卜索的石油醚提取液点样于硅胶G板,以丙酮:石油醚(5:95)为展开剂能将β-胡萝卜素与其它类胡萝卜索分离。该方法简便快速,并有一定实用价值。 The fermentative conditions of β-carotene by Blakeslea trispora have been investigated. These conditions include fermentation medium, the optimization of some fermentation factor. The extracting methods and the TLC of carotenoids were also researched. Firstly, the effects of composition of fermentation medium on the yield of β-carotene were studied. the results showed that the best fermentation medium was corn starch 3%,soybean power 2%,cottonseed oil 3%,KH2PO4 0.2%,MgSO4·7H2O 0.2%,vitamin B1 0.002%,pH value 6.0. Secondly, through compared some factors, such as different proportion of plus and minus strains, pH value, nonionic surfactants, respective best values have been obtained. The best proportion of plus and minus strains is 1.3:0.7, pH value of fermentation medium (sterilized) is 7.0, fermentation accelerant which acts as surfactants is Triton x-100. Farther on, the fermentative conditions were optimized through orthogonal experiment, the optimization showed that proportion of plus and minus strains is 1.3:0.7,pH value is 7.0, content of Triton x-100 is 0.08%. And the yield of β-carotene reached 0.73g/L, which was up to 3.3 times through the fermentation. In the extracting study, it has showed hydrochloric acid-heat treatment is a simple, convenient and effective extracting methods is which was used to destroy the cell wall, and the extracting organic solvent is petroleum ether whose boiling range is 60~90 ℃. In the TLC experiments, extracting contents in the petroleum ether were spotted in the silicagel plate, and the mixed liquor of acetone and petroleum ether (5:95) is developping agent, which can distinguish β-carotene from other carotenoids. It is a simple and quick technique.
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钻井废水是油气井开采钻探过程中产生的废水,钻井废水成分复杂,有机物浓度高、色度高、悬浮物浓度高,水质变化大,排放点分散,不经处理排放会污染环境,破坏生态。随着石油工业的不断发展和国家环保法律法规的日益严格,钻井废水的治理也越来越受到重视。如何采用经济有效的方法处理废弃钻井液,对油气井开采业的可持续发展具有重要意义。本论文以遂宁磨153 井的钻井废水为主要研究对象,在对废水进行絮凝沉降预处理和生物法处理探索的基础上,针对钻井废水可生化性差的特点,采用水解酸化和Fenton 试剂改善钻井废水的可生化性,对反应过程进行了比较详细的考察,对可生化性改善的机理进行了探索。主要研究结论如下:1 用PFS 和PAC 配制的混合混凝剂对钻井废水COD 的去除效果比较显著,在最佳条件下COD 的去除率可达75%,且絮体沉降速度较快,出水pH 保持中性;2 水解酸化法处理钻井废水可显著改善废水的可生化性。经48 小时水解酸化处理,钻井废水的理论BOD5可提高约22 倍,表观BOD5/COD值由0.004 提高到0.034。用接触氧化反应器处理经水解酸化处理后的废水,处理效果比较稳定,COD平均去除率达35.5%;3 研究了Fenton反应中各影响因子对废水COD去除率、BOD5/COD的影响并分析其作用机制,确定了最佳条件:初始pH为4.0,H2O2/Fe2+(摩尔浓度比)为20,H2O2/COD(质量浓度比)为1,反应时间为2 个小时。此条件下,废水的COD去除率约为40%,BOD5/COD值从0.002~0.003 提高至0.15~0.2,可生化性得到很大提高。本论文的主要创新点在于:1 以成分复杂、水质变化大的气井钻井废水为研究对象,从理论BOD 和表观BOD 两方面对水解酸化过程中废水可生化性的变化进行了分析;2 对Fenton 试剂改善钻井废水可生化性的过程、主要影响因素进行了比较详细的考察。本论文的研究成果,可为生物法处理钻井废水的深入研究提供理论依据。Drilling wastewater is produced in the process of oil-gas well drilling,because of its complicated composition, high concentrate of organic compound andsuspended solid, high chroma, levity of water quality and decentralization ofdischarge point, it pollutes environment seriously if discharged without treatment.With the development of petroleum industry and the issuing of more strict laws forenvironmental protection, it has been paid more and more attention on drillingwastewater treatment. It is of great importance for the sustainable development ofoil-gas well drilling to treat drilling wastewater by economical and effective methods.In this paper, drilling wastewater of Mo No.153 well in Suining was studied asthe main object. On the basis of research on pre-treatment with flocculant andbiological treatment, and according to the character of poor biodegradability, thedrilling wastewater was treated by hydrolytic acidification and Fenton’s reagent toimprove its biodegradability. The process and mechanism of biodegradabilitychanging were investigated. The primary conclusions are:1 It is effective to treat drilling wastewater with mixing PFS and PAC asflocculant. The removal rates of COD came up to 75% under optimal conditions, thesedimentation rate of flocculation is rapid, and the pH value of treated water remainedneutral;2 The biodegradability of drilling wastewater was highly improved afterhydrolytic acidification process. The theoretic BOD5 of drilling wastewater increasedby 22 times and its detected BOD5/COD ratio increased from 0.004 to 0.034 afterhydrolytic acidification for 48 hours. The wastewater after hydrolytic acidificationwas treated by biological contact oxidation reactor. Stable treatment performance was achieved, and the average removal rates of COD came up to 35.5%;3 The effects of various affection factors on the removal efficiency of COD andBOD5/COD radio in treating drilling wastewater by Fenton’s reagent wereinvestigated and the mechanism was analyzed. The optimal conditions were: initialpH of solution was 4.0, the molar ratio of H2O2 and Fe2+ was 20, the concentrationratio of H2O2 and COD was 1 and the reaction time was 120 min. Under the aboveconditions, the removal efficiency was about 40% and the ratio of BOD5 and CODincreased from 0.002 ¡« 0.003 to 0.15 ¡« 0.2. The biodegradability of drillingwastewater was greatly improved.The innovations of this thesis are:1 The drilling wastewater was taken as the research object which hascomplicated composition and variational water quality, and the changes ofbiodegradability were analyzed from theoretic BOD and detected BOD aspects duringhydrolytic acidification process;2 The biodegradability changing process and primary affection factors of drillingwastewater treating by Fenton’s reagent were investigated.The results of this study could provide theoretic foundation for further researchon biological treatment of drilling wastewater.
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A modified solution method, successive ionic layer adsorption and reaction(SILAR), was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and X-ray diffraction(XRD), respectively. The optical properties of the films were studied by ultraviolet visible(UV-Vis)spectroscopy. The results show that the obtained samples are polycrystallin...中文文摘:采用一种改进的液相成膜技术——连续离子层吸附与反应(SILAR)法,用锌氨络离子[Zn(NH3)4]2+溶液作为独立的前驱体溶液,以载玻片为衬底,在(125±5)℃的温度下沉积出致密、透明的ZnO薄膜。分别用冷场发射型扫描电镜(FESEM)和X射线衍射(XRD)分析了薄膜样品的表面形貌和结晶状态,用紫外-可见分光光度计(UV-Vis spectroscopy)研究了薄膜样品的发光性能。结果表明:获得样品为六角纤锌矿结构的多晶薄膜材料沿[002]方向择优生长;样品表面均匀、致密,厚度约为550nm;在可见光波段具有高的透射率(>80%)。
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采用一种改进的液相成膜技术——连续离子层吸附与反应(SILAR)法,用锌氨络离子[Zn(NH3)4]2+溶液作为独立的前驱体溶液,以载玻片为衬底,在(125±5)℃的温度下沉积出致密、透明的ZnO薄膜。分别用冷场发射型扫描电镜(FESEM)和X射线衍射(XRD)分析了薄膜样品的表面形貌和结晶状态,用紫外-可见分光光度计(UV-Vis spectroscopy)研究了薄膜样品的发光性能。结果表明:获得样品为六角纤锌矿结构的多晶薄膜材料沿[002]方向择优生长;样品表面均匀、致密,厚度约为550nm;在可见光波段具有高的透射率(>80%)。
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Cobalt nanowires with controlled diameters have been synthesized using electrochemical deposition in etched ion-track polycarbonate membranes. Structural characterization of these nanowires with diameter 70, 90, 120 nm and length 30 mu m was performed by scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction techniques. The as-prepared wires show uniform diameter along the whole length and X-ray diffraction analysis reveals that [002] texture of these wires become more pronounced as diameter is reduced. Magnetic characterization of the nanowires shows a clear difference of squareness and coercivity between parallel and perpendicular orientations of the wires with respect to the applied field direction. In case of parallel applied field, the coercivity has been found to be decreasing with increasing diameter of the wires while in perpendicular case; the coercivity observes lower values for larger diameter. The results are explained by taking into account the magnetocrystalline and shape anisotropies with respect to the applied field and domain transformation mechanism when single domain limit is surpassed.
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室温下用80keVN离子注入ZnO薄膜样品,注量分别为5.01014,5.01015和5.01016ions/cm2,然后用X射线衍射和透射电镜技术对样品的结构特性进行了表征。实验结果表明,由高度(002)择优取向的致密柱状晶构成的薄膜中,注入5.0×1015ions/cm2时,观测到缺陷生成和局域无序化现象,但薄膜总体结构仍保持柱状晶和(002)择优取向;随着注量的增大,晶格常数c和压应力呈增大趋势。对注入N离子对ZnO薄膜结构特性的影响机理进行了简单的讨论。