压阻式高量程微加速度计的冲击校准

采用体硅微机械加工技术和扩散技术，制作压阻式高量程微加速度计，设计量程为50000 g_n。芯片材料为单晶硅，采用双列扁平陶瓷封装。为了测量其动态灵敏度，使用Hopkinson杆在约40000 g_n的加速度水平下进行了冲击校准。在电桥电压为6.33V的情况下，被测微加速度计的灵敏度为1.26 μV/g_n。

Multiplex CARS measurements in supersonic H-2/air combustion

H-2 and O-2 multiplex coherent anti-stokes Raman spectroscopy (CARS) employing a single dye laser has been explored to simultaneously determine the temperature and concentrations of H-2 and O-2 in a hydrogen-fueled supersonic combustor. Systematic calibrations were performed through a well-characterized H-2/air premixed flat-flame burner. In particular, temperature measurement was accomplished using the intensity ratio of the H-2 S(5) and S(6) rotational lines, whereas extraction of the H-2 and O-2 concentrations was obtained from the H-2 S(6) and O-2 Q-branch, respectively. Details of the calibration procedure and data reduction are discussed. Quantification of the supersonic mixing and combustion characteristics applying the present technique has been demonstrated to be feasible. The associated detection limits as well as possible improvements are also identified.

A Microtube Viscometer with a Thermostat

The viscometer presented in this paper is suit-able for measuring the viscosity of liquids in micro-litre quantities. It consists of a micro-flow experimental system with a thermostat. Using the measurements of the flow rates and pressure drops of a liquid passing through a microtube, the liquid's viscosity can be calculated from on Hagen-Poiseuille theory. After calibration, the viscometer was used to measure viscosities of deionized water and ethyl alcohol at temperatures ranging from 0 to 40 "C. For both test liquids, the relative deviation of the measured values from those quoted in the literature (obtained using other viscometers) was less than 2.6o/o. The relative uncertainty of the experimental system was reduced to +-l.8% using the relative measuring method. Due to the micro-scale of the test section, only a micro-litre quantity of liquid is needed for a test, this is a potential advantage for measurement of bio-liquid viscosities.

A moving-coil designed micro-mechanics tester with application on MEMS

A moving-coil designed micro-mechanics tester, named as MicroUTM (universal testing machine), is in-house developed in this paper for micro-mechanics tests. The main component is a moving coil suspended in a uniform magnetic field through a set of springs. When a current passes through the coil, the electromagnetic force is proportional to the magnitude of the current, so the load can easily be measured by the current. The displacement is measured using a capacitive sensor. The load is calibrated using a Sartorius BP211D analytical balance, with a resolution/range of 0.01 mg/80 g or 0.1 mg/210 g. The displacement is calibrated using a HEIDENHAIN CT-6002 length gauge with an accuracy of +/- 0.1 mu m. The calibration results show that the load range is +/- 1 N and the displacement range is +/- 300 mu m. The noise levels of the load and displacement are 50 mu N and 150 nm, respectively. The nonlinearity of the load is only 0.2%. Several in-plane load tests of the MEMS micro-cantilever are performed using this tester. Experimental results, with excellent repeatability, demonstrate the reliability of the load measurement as well as the flexible function of this tester.

纳米压痕仪接触投影面积标定方法的研究

基于Oliver与Pharr方法的纳米压痕实验以其简单方便获得广泛的应用,但众多因素对压痕实验结果的影响范围并无明确的结论.其中压痕接触面积的确定是一个重要环节,该因素对实验结果,特别是小深度下的实验结果具有重要影响.仔细分析了Oliver与Pharr方法并进行了几种材料的纳米压痕实验,针对该方法在接触深度确定、不同深度范围下方法的适用性进行了说明.分析结果表明,对所有的材料使用统一的面积公式,只有在大压痕深度时才是适用的,而在小压痕深度时可能带来较大的误差.因此,应慎重使用由Oliver与Pharr方法得到的小压痕深度的硬度数据.

The Development of Biosensor with Imaging Ellipsometry

The concept of biosensor with imaging ellipsometry was proposed about ten years ago. It has become an automatic analysis technique for protein detection with merits of label-free, multi-protein analysis, and real-time analysis for protein interaction process, etc. Its principle, andrelated technique units, such as micro-array, micro-fluidic and bio-molecule interaction cell, sampling unit and calibration for quantitative detection as well as its applications in biomedicine field are presented here.

MODELING EVOLUTION OF INTERNAL WAVES IN SOUTH CHINA SEA

Internal waves are an important factor in the design of drill operations and production in deep water, because the waves have very large amplitude and may induce large horizontal velocity. How the internal waves occur and propagate over benthal terrain is of great concern for ocean engineers. In the present paper, we have formulated a mathematical model of internal wave propagation in a two-layer deep water, which involves the effects of friction, dissipation and shoaling, and is capable of manifesting the variation of the amplitude and the velocity pattern. After calibration by field data measured at the Continental Slope in the Northern South China Sea, we have applied the model to the South China Sea, investigating the westward propagation of internal waves from the Luzon Strait, where internal waves originate due to the interaction of benthal ridge and tides. We find that the internal wave induced velocity profile is obviously characterized by the opposite flow below and above the pycnocline, which results in a strong shear, threatening safety of ocean structures, such as mooring system of oil platform, risers, etc. When internal waves propagate westwards, the amplitude attenuates due to the effects of friction and dissipation. The preliminary results show that the amplitude is likely to become half of its initial value at Luzon Strait when the internal waves propagate about 400 kilometers westwards.

Phase-type quantum-dot-array diffraction grating

A novel phase-type quantum-dot-array diffraction grating (QDADG) is reported. In contrast to an earlier amplitude-type QDADG [C. Wang , Rev. Sci. Instrum. 78, 053503 (2007)], the new phase-type QDADG would remove the zeroth order diffraction at some certain wavelength, as well as suppressing the higher-order diffractions. In this paper, the basic concept, the fabrication, the calibration techniques, and the calibration results are presented. Such a grating can be applied in the research fields of beam splitting, laser probe diagnostics, and so on.

精确标定光弹调制器的新方法

针对现有光弹调制器标定方法的不足，提出了一种精确标定光弹调制器的新方法。首先利用起偏器、波片、光弹调制器和检偏器构成标定光路．通过寻找探测信号基频分量的极大值进行粗略标定，使光弹调制器的峰值延迟量处在1．841rad附近。然后撤走波片形成光弹凋制器的精确标定光路．在检偏器旋转90°前后获得探测信号的直流分量和二次谐波分量。最后利用这两种探测信号的直流分量和二次谐波分量精确地计算出光弹调制器的峰值延迟量。实验验让了此光掸调制器标定方法，实验结果表明其标定误差仅为0．7％。在此光掸凋制器标定方法中．光弹调制器

A novel FOCAL technique based on BP-ANN

In this paper, the feed-forward back-propagation artificial neural network (BP-ANN) algorithm is introduced in the traditional Focus Calibration using Alignment procedure (FOCAL) technique, and a novel FOCAL technique based on BP-ANN is proposed. The effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. It is proved that the novel FOCAL technique based on BP-ANN is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 Elsevier GmbH. All rights reserved.

A four-frame phase shift method insensitive to phase shifter nonlinearity

A four-frame phase shift method and an associated algorithm using unequal phase steps are presented. The unique advantage of this method is that it becomes insensitive to phase shifter nonlinearity because of the performance of a special procedure, in which the phase shifts are shared out between the reference beam and the object beam. By this means, any phase shifter can work as long as one phase shift is accurately known. On the basis of the technique, a simple calibration method for the linear phase shifter is suggested. The influences of phase shifter miscalibration, detector nonlinearity and random noise on the algorithm are investigated, and the optimal phase shifts are given.

A novel method to determine the FOCAL energy range

Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

基于基频分量消光的1/4波片快轴标定方法

提出了一种基于基频分量消光的波片快轴标定方法,并利用琼斯矩阵对其标定原理进行了分析。激光器、起偏器、相位调制器、待标定1/4波片、检偏器和光电探测器构成标定光路,起偏器、检偏器的透光轴与相位调制器的振动轴分别成+45°和0°夹角。准直激光束依次经过起偏器、相位调制器、待标定1/4波片和检偏器,由光电探测器接收。理论分析表明该标定方法标定精度主要取决于检偏器的定位误差。实验验证了该标定方法的有效性,1/4波片快轴标定结果的最大偏差为0.043°,标准差为0.012°,标定精度为0.05°。

基底对光学薄膜弱吸收测量的影响

对表面热透镜技术测量光学薄膜弱吸收低频调制时不同基底对测量的影响进行了理论分析。用Lambda-900分光光度计测量了K9和石英基底的Ti3O5单层膜的吸收值，将该组样品作为定标片；用表面热透镜装置分别测量了BK7和石英空白基底及HfO2，ZnO两组不同基底不同厚度单层膜样品的吸收。通过分析比较同一工艺条件下镀制的不同基底薄膜样品用与其同种和不同种基底定标片定标测量的结果，表明在低频测量时需要用与测量样品同种基底的定标片定标；不同厚度样品的测量结果表明，在不能严格满足热薄条件时，测量结果需引入修正值。

Pharmacokinetics of sifuvirtide, a novel anti-HIV-1 peptide, in monkeys and its inhibitory concentration in vitro

Aim: To study the pharmacokinetics of sifuvirtide, a novel anti-human immunodeficiency virus (HIV) peptide, in monkeys and to compare the inhibitory concentrations of sifuvirtide and enfuvirtide on HIV-1-infected-cell fusion. Methods: Monkeys received 1.2 mg/kg iv or sc of sifuvirtide. An on-line solid-phase extraction procedure combined with liquid chromatography tandem mass spectrometry (SPELC/MS/MS) was established and applied to determine the concentration of sifuvirtide in monkey plasma. A four-I-127 iodinated peptide was used as an internal standard. Fifty percent inhibitory concentration (IC50) of sifuvirtide on cell fusion was determined by co-cultivation assay. Results: The assay was validated with good precision and accuracy. The calibration curve for sifuvirtide in plasma was linear over a range of 4.88-5000 mu g/L, with correlation coefficients above 0.9923. After iv or sc administration, the observed peak concentrations of sifuvirtide were 10626 +/- 2886 mu g/L and 528 +/- 191 mu g/L, and the terminal elimination half-lives (T,12) were 6.3 +/- 0.9 h and 5.5 +/- 1.0 h, respectively. After sc, T-max was 0.25-2 h, and the absolute bioavailability was 49% +/- 13%. Sifuvirtide inhibited the syncytium formation between HIV-1 chronically infected cells and uninfected cells with an IC50 of 0.33 mu g/L. Conclusion: An on-line SPE-LC/MS/MS approach was established for peptide pharmacokinetic studies. Sifuvirtide was rapidly absorbed subcutaneously into the blood circulation. The T-1/2 of sifuvirtide was remarkably longer than that of its analog, enfuvirtide, reported in healthy monkeys and it conferred a long-term plasma concentration level which was higher than its IC50 in vitro.