A novel FOCAL technique based on BP-ANN
Data(s) |
2006
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Resumo |
In this paper, the feed-forward back-propagation artificial neural network (BP-ANN) algorithm is introduced in the traditional Focus Calibration using Alignment procedure (FOCAL) technique, and a novel FOCAL technique based on BP-ANN is proposed. The effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. It is proved that the novel FOCAL technique based on BP-ANN is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 Elsevier GmbH. All rights reserved. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Shi WJ;Wang XZ;Zhang DQ;Wang F;马明英.,Optik,2006,117(4):145-150 |
Palavras-Chave | #BP-ANN #FOCAL technique #lithography |
Tipo |
期刊论文 |