A novel method to determine the FOCAL energy range
Data(s) |
2005
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Resumo |
Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Dongqing Zhang;王向朝;Weijie Shi.,Chin. Opt. Lett.,2005,3(10):589-592 |
Palavras-Chave | #diffraction and gratings #focal-plane-array image processors #instrumentation #measurement #and metrology #optical devices |
Tipo |
期刊论文 |