Selective and lithography-independent fabrication of 20 nm nano-gap electrodes and nano-channels for nanoelectrofluidics applications

A new method has been developed to selectively fabricate nano-gap electrodes and nano-channels by conventional lithography. Based on a sacrificial spacer process, we have successfully obtained sub-100-nm nano-gap electrodes and nano-channels and further reduced the dimensions to 20 nm by shrinking the sacrificial spacer size. Our method shows good selectivity between nano-gap electrodes and nano-channels due to different sacrificial spacer etch conditions. There is no length limit for the nano-gap electrode and the nano-channel. The method reported in this paper also allows for wafer scale fabrication, high throughput, low cost, and good compatibility with modern semiconductor technology.

A 10 Gb/s Directly-Modulated 1.3 mu m InAs/GaAs Quantum-Dot Laser

We demonstrate 10 Gb/s directly-modulated 1.3 mu m InAs quantum-dot (QD) lasers grown on GaAs substrates by molecular beam epitaxy. The active region of the QD lasers consists of five-stacked InAs QD layers. Ridge-waveguide lasers with a ridge width of 4 mu m and a cavity length of 600 mu m are fabricated with standard lithography and wet etching techniques. It is found that the lasers emit at 1293 nm with a very low threshold current of 5 mA at room temperature. Furthermore, clear eye-opening patterns under 10 Gb/s modulation rate at temperatures of up to 50 degrees C are achieved by the QD lasers. The results presented here have important implications for realizing low-cost, low-power-consumption, and high-speed light sources for next-generation communication systems.

A COMPARATIVELY LOW-QUALITY SILICON MATERIAL IMPROVED FOR SOLAR-CELL FABRICATION

A comparatively low-quality silicon wafer (with a purity of almost-equal-to 99.9%) was adopted to form a silicon-on-defect-layer (SODL) structure featuring improved crystalline silicon near the defect layer (DL) by means of proton implantation and subsequent annealing. Thus, the SODL technique provides an opportunity to enable low-quality silicon wafers to be used for fabrication of low-cost solar cells.

A High-Efficiency Fiber-to-Waveguide Coupler with Low Polarization Dependence Using a Diluted Waveguide in InP Substrate with a 1.55μm Wavelength

We propose a fiber-to-waveguide coupler for side-illuminated p-i-n photodiodes to obtain high responsivity and low polarization dependence that is grown on InP substrate and is suitable for surface hybrid integration in low cost modules. The fiber-to-waveguide coupler is based on a diluted waveguide,which is composed of ten periods of undoped 120nm InP/80nm InGaAsP （1.05μm bandgap） multiple layers. Using the semi-vectorial three dimensional beam propagation method （BPM） with the central difference scheme,the coupling efficiency of fiber-to-waveguide under different conditions is simulated and studied,and the optimized conditions for fiber-to-waveguide coupling are obtained. For TE-like and TM-like modes,the calculated maximum coupling efficiency is higher than 94% and 92% ,respectively. The calculated polarization dependence is less than 0. ldB,showing good polarization independence.

Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing

A novel pulsed rapid thermal processing (PRTP) method has been used for realizing the solid-phase crystallization of amorphous silicon films prepared by PECVD. The microstructure and surface morphology of the crystallized films are investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicate that this PRTP is a suitable post-crystallization technique for fabricating large-area polycrystalline silicon films with good structural qualities such as large grain size, small lattice microstain and smooth surface morphology on low-cost substrate.

Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching

A diffractive microlens with a cascade focal plane along the main optical axis of the device is fabricated using a low-cost technique mainly including single mask ultraviolet (UV) photolithography and dual-step KOH:H2O etching. Based on the evolutionary behavior of converse pyramid-shaped microholes (CPSMs) preshaped over a {100}-oriented silicon wafer in KOH etchant, the first-step KOH etching is performed to transfer initial square micro-openings in a SiO2 film grown by plasma enhanced chemical vapor deposition (PECVD) and patterned by single mask UV-photolithography, into CPSMs with needed dimension. After completely removing a thinned SiO2 mask, basic annular phase steps with a relatively steep sidewall and scheduled height can be shaped in the overlapped etching region between the neighboring silicon concave-arc microstructures evolved from CPSMs through the second-step KOH etching. Morphological measurements demonstrate a desirable surface of the silicon microlens with a roughness in nanometer scale and the feature height of the phase steps formed in the submicrometer range. Conventional optics measurements of the plastic diffractive microlens obtained by further hot embossing the fine microrelief phase map over the nickel mask made through a common electrochemical method indicate a highly efficient cascaded focusing performance.

21世纪企业的主要模式──敏捷制造企业

２０世纪９０年代以后，由于科学技术的迅猛发展，知识─技术─产品的周期日益缩短，如何加速开发质优价廉的新产品就成为企业竞争的核心内容。２１世纪即将到来，世界无疑将沿着２０世纪的道路继续向前发展，它的趋势是：新产品开发速度日益加快、产品生命周期不断缩短、生产批量越来越小、市场竞争日趋激烈；加上环太平洋地区的兴起，有能力参与这场竞争的企业不断增多。这一切虽给企业带来了机遇，但也给企业造成了严酷的生存环境。为了适应这种环境，１９９１年美国在总结日本、德国和本国经验的基础上，提出把现有企业改造成敏捷制造企业（ＡｇｉｌｅＭａｎｕｆａｃｔｕｒｉｎｇＥｎｔｅｒｐｒｉｓｅ）的模式，并认为这是奠定美国２１世纪经济霸主地位的战略举措。敏捷制造企业是从客观经济发展的实践中总结出来的。我国如何改造企业并和世界经济接轨，敏捷制造企业给我们提出了值得高度重视的发展方向，本文对此作了较为详尽的论述。

广西合山固体废弃物制备地质聚合物胶凝材料

Geopolymer gelatinous material was prepared by ferroalloy slag (signed with NKT in laboratory) and circulating fluidization bed slag (CFB slag, signed with NM in laboratory) produced from Heshan city, Guangxi zhuang autonomous region, China. The mechanical properties of the geopolymer made of high content ferroalloy slag can reach the standard of 42.5# portland blastfurnace-slag cement, and it’s processing technology is more simple and not need of mill and burn and will not produce harmful gas. By means of chemical and XRD analyses, it is concluded that NKT is a kind of acidity water-granulated slag with better activation and fit to be activated by alkali activators. Low-cost industrial gypsum (signed with NG in laboratory), analytic reagent oxide(signed with NH in laboratory) and sulfate(signed with NS in laboratory) were selected as alkali activation in the experiment. The results showed NH is a good alkali activator for NKT. Both NH and NG can activate ferroally slag’s activities, but NS can’t alone. The activation effect of superimposing activation of NH and NG excel by separateness. Based on those experiments, optimization compounds were carried out: (1) NKT: NH: NG = 80: 10: 10 and (2) NM: NKT: NS: NG: NH = 10: 70: 2: 8: 10。. The soundness of the test blocks is good by boiling examination. Through XRD, SEM, IR, NMR analyses of geopolymer, the reaction mechanism of geopolymer prepared by alkalescent activating in solid wastes was discussed in the thesis first. It is point out, there is difference in reaction mechanism between traditional geopolymer preparation and the preparation of alkalescent activating solid wastes because NG is a industry product. There is the similar process of depolymerization and reunion of Si-O bond. The latter preparation process generate new subtance but the former doesn’t. In the experiment, we found a performance of NKT that the water requirement of normal consistency of geopolymer reduces with increasing content of NKT. The result shows NKT has some ability to reduce water requirement. The performance is worthy of further research and utilization. Making use of solid wastes to prepare geopolymer, not only can settle environment problem caused by a great deal of dump of NKT, but also settle the shortage of natural resources. Moreover it could take economic, environmental and social benefits and settle thoroughly contradiction in the environment protection and regional economy development and promote circulation economy development.

New progress in R&D of lower olefin synthesis

This paper gives a brief review of R&D researches for light olefin synthesis directly and indirectly from synthesis gas in the Dalian Institute of Chemical Physics (DICP). The first pilot plant test was on methanol to olefin (MTO) reaction and was finished in 1993, which was based on ZSM-5-type catalyst and fixed bed reaction. In the meantime, a new indirect method designated as SDTO (syngas via dimethylether to olefin) was proposed. In this process, metal-acid bifunctional catalyst was applied for synthesis gas to dimethylether(DME) reaction, and modified SAPO-34 catalyst that was synthesized by a new low-cost method with optimal crystal size was used to convert DME to light olefin on a fluidized bed reactor. The pilot plant test on SDTO was performed and finished in 1995. Evaluation of the pilot plant data showed that 190-200 g of DME were yielded by single-pass for each standard cubic meter of synthesis gas. For the second reaction, 1.880 tons of DME or 2.615 tons of methanol produced 1 ton of light olefins, which constitutes of 0.533 ton of ethylene, 0.349 ton of propylene and 0.118 ton of butene. DICP also paid some attention on direct conversion of synthesis gas to light olefins. A semi-pilot plant test (catalyst 1.8 1) was finished in 1995 with a CO conversion > 70% and a C(2)(=)-C(4)(=) olefin selectivity 71-74% in 1000 h. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

A novel process for converting coalmine-drained methane gas to syngas over nickel-magnesia solid solution catalysts

A novel process is developed in this paper for utilizing the coalmine-drained methane gas that is usually vented straight into the atmosphere in most coalmines worldwide. It is expected that low-cost syngas can be produced by the combined air partial oxidation and CO2 reforming of methane, because this process utilizes directly the methane, air, and carbon dioxide in the coalmine-drained gas without going through the separation step. For this purpose, a nickel-magnesia solid solution catalyst was prepared and its catalytic performance for the proposed process was investigated. It was found that calcination temperature has significant influence on the catalytic performance due to the different extent of solid solution formation in the catalysts. A uniform nickel-magnesia solid solution catalyst exhibits higher stability than the catalysts in which NiO has not completely formed solid solution with MgO. Its catalytic activity and selectivity remain stable during 120 h of reaction. The product H-2/CO ratio is mainly dependent on the feed gas composition. By changing CO2/air ratio of the feed gases, syngas with a H-2/CO ratio between 1 and 1.9 can be obtained. The influences of reaction temperature and nickel loading on the catalytic performance were also investigated. (c) 2004 Elsevier B.V All rights reserved.