合成孔径激光成像雷达(Ⅰ):离焦和相位偏置望远镜接收天线

把合成孔径激光成像雷达的目标衍射区分为三个区域,提出采用离焦或者附加空间相位调制板的光学接收望远镜补偿回波像差。当目标处于菲涅耳衍射区时可采用离焦或偏置望远镜补偿回波二次项离焦像差并产生用于孔径合成的二次项相位历程;目标处于夫琅和费衍射区时可以采用离焦或偏置望远镜补偿回波二次项离焦像差但不产生相位历程;目标处于瑞利-索末菲衍射区域时不可能补偿回波高阶像差。

合成孔径激光成像雷达(Ⅱ):空间相位偏置发射望远镜

报道一种可以进行空间相位偏置的光学望远镜,用作合成孔径激光成像雷达中的光学发射天线。在望远镜内放置相位调制平板,控制望远镜的离焦量和位相调制平板的相位函数,能够在激光望远镜的照明区产生可控制的附加空间相位二次项,灵活改变激光照明波前,以在目标回波接收信号中产生雷达运动方向上的所需的二次项相位历程,因此能够实现特定的方位向成像分辨率。

自由空间激光远距离传输的地面模拟研究

根据透镜的傅里叶变换性质，提出了采用光学傅里叶变换加级联光学成像放大并结合有限口径接收的方法来实现自由空间激光光束远距离传输的实验室模拟。由此原理设计了自由空间激光远距离传输模拟装置，该装置主要由大口径、长焦距的傅里叶变换平行光管和三级成像放大镜所组成，最大等效传输距离达2.4×10^5km，可用于星间激光通信终端综合通信性能的评估，在设定的误码率下测量终端可能的通信距离，或者在设定的作用通信距离下检测通信的误码率。

CCD扫描检测光束准直度

提出一种检测光束准直度的新方法。在对波面矢高进行定义的基础上，提出CCD轴向扫描检测激光束准直度的方法。利用采样光波在会聚透镜后形成的衍射图样，测量两个相同基准衍射图样之间的距离，即可确定入射光波的波面矢高，进而确定入射光波的准直度。在给出测量原理及模拟基准衍射图样的基础上．进行了实验验证。CCD轴向扫描方法具有结构简单、加工便利、操作方便的特点，是检测光束准直度的有效方法。

透镜自重变形引起波像差的有限元分析

在用大口径、长焦距平行光管模拟激光远场特性时，其光组透镜在重力作用下的变形不能忽略，为了分析对出射光束质量的影响，采用有限元分析软件“ANSYS”建立了平行光管光组中声400mm平凸透镜的有限元模型，给出一种分析透镜轴向变形引起的波像差的方法，在不同工况下，计算了平凸透镜在重力作用下轴向变形的峰谷值和均方根值，对轴向变形量均方根值最小工况画出了透镜表面变形的等值线图，计算了声350mm通光口径内的波像差峰谷值和均方根值，对平行光管光组的波像差做出估计，验证了设计的合理性。

A phase-shifting vectorial-shearing interferometer with wedge plate phase-shifter

We present a novel phase-shifting vectorial-shearing interferometer with a wedge plate phase-shifter. The interferometer is based on a modified Mach-Zehnder configuration; the common-path nature makes it capable of testing the wavefront of a short coherence-length light source, such as a laser diode. Vectorial shear (shearing in the x and y directions simultaneously) in an arbitrary direction is introduced by inserting two wedge plates orthogonally in two arms, respectively. One of the wedge plates is split into two parts (parallel part and wedge part); phase shift is produced by moving the wedge part in contact along the parallel part. The moving distance for a 2 pi phase shift is a few millimetres in specific conditions. The wedge plate phase-shifter increases the moving distance for phase shift and makes the control of phase shift relatively easy. We also discuss the lateral shear error and phase shift errors induced by wedge plates. The lateral shear error is small enough to be ignored; the phase shift error is determined mainly by the wedge angle error. Lastly, we give the experimental results of phase-shifting interference fringes in vectorial shear mode.

Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

As a critical dimension shrinks, the degradation in image quality caused by wavefront aberrations of projection optics in lithographic tools becomes a serious problem. It is necessary to establish a technique for a fast and accurate in situ aberration measurement. We introduce what we believe to be a novel technique for characterizing the aberrations of projection optics by using an alternating phase-shifting mask. The even aberrations, such as spherical aberration and astigmatism, and the odd aberrations, such as coma, are extracted from focus shifts and image displacements of the phase-shifted pattern, respectively. The focus shifts and the image displacements are measured by a transmission image sensor. The simulation results show that, compared with the accuracy of the previous straightforward measurement technique, the accuracy of the coma measurement increases by more than 30% and the accuracy of the spherical-aberration measurement increases by approximately 20%. (c) 2006 Optical Society of America.

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

棱镜自重变形对波面影响的研究

采用有限元方法分析了单棱镜在重力作用下三个典型位置的表面变形，对棱镜表面φ425nm通光孔径轴向变形量进行Zernike多项式拟合，画出了相应的波差图，并确定设计方案．进一步选择φ360mm口径光束对双棱镜在几种典型相对位置下进行光线采样、追迹，计算得到不同情况下由于双棱镜自重变形引起的总波差．

利用数字全息干涉术观察RuO2：LiNbO3晶体中畴反转的区域特性

利用马赫-曾德尔干涉光路和V光学透镜系统，以部分畴反转的掺钌铌酸锂晶体（RuO2：LiNbO3）的透射光作为物光来记录全息图，并在数值再现过程对其进行频域滤波以实现物场波前信息的数值重建，检测出在一定电压作用下晶体内部折射率变化的二维分布．检测结果证实;晶体中发生畴反转的区域与发生电色效应的区域严格相符．数字全息干涉术非接触、无干扰、无破坏的优势在准实时监控、检测和分析铌酸锂晶体畴反转方面有很好的应用前景．

Collimation testing using axial intensity

We proposed a new method of measuring the degree of collimation of laser beam using axial intensity information near paraxial focus. Preceding methods for collimation testing are mainly either based on self-imaging or interferometric techniques. The new method is to employ the diffraction behavior of noncollimated wave in circular aperture diaphragm. The principle of the proposed method and experiment results are presented. Due to simplicity of the method and its low cost, it is a promising method for checking the collimation of laser beam. (c) 2005 Published by Elsevier GmbH.

大型干涉仪镜子的支承设计与温度变形分析

在星间激光通信中，涉及对大口径衍射极限激光波面的检测，为保证测量精度，必须严格控制波面十涉仪镜子的自重和温度变形。采用有限元方法对大型干涉仪镜子在不同支承方式下的表面变形进行了分析，结果表明，接触角为180°的钢带支承是较好的支承方式，反射镜表面变形峰-谷(P-V)值仅为1．35nm，均方根(RMS)值为0．363nm根据这一结论，设计了一个同定支承点与浮动支承相结合的超静定钢带支承结构。在该结构下，分析了镜子轴向、径向、周向的温度梯度效应，分析数据表明，镜子的热弹性变形远大于自重变形，建议采取一定的温控

Numerical simulation of wavefronts diffracted by apertures with circular symmetry

The numerical simulation of the wavefronts diffracted by apertures with circular symmetry is realized by a numerical method. It is based on the angular spectrum of plane waves, which ignored the vector nature of light. The on-axial irradiance distributions of plane wavefront and Gauss wavefront diffracted by the circular aperture have been calculated along the propagation direction. Comparisons of the simulation results with the analytical results and the experimental results tell us that it is a feasible method to calculate the diffraction of apertures. (c) 2006 Published by Elsevier GmbH.

One-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency

We propose a novel method of one-shot parallel complex Fourier-domain optical coherence tomography using a spatial carrier frequency for full range imaging. The spatial carrier frequency is introduced into the 2-D spectral interferogram in the lateral direction by using a tilted reference wavefront. This spatial-carrier- contained 2-D spectral interferogram is recorded with one shot of a 2-D CCD camera, and is Fourier-transformed in the lateral direction to obtain a 2-D complex spectral interferogram by a spatial-carrier technique. A full-range tomogram is reconstructed from the 2-D complex spectral interferogram. The principle of this method is confirmed by cross-sectional imaging of a glass slip object. (c) 2008 Society of Photo-Optical Instrumentation Engineers.

Digital holographic aberration compensation in electron holography

This paper proposes a new digital method to compensate for the aberration of an electron objective lens in electron holography. In this method, the object wavefront in the exit pupil plane is numerically reconstructed from a digitized electron hologram, and is corrected by multiplying it with the conjugated phase-error function. Then, an aberration-free image can be obtained by calculating the Fresnel integral of this corrected wavefront. In comparison with traditional methods, this method is much more convenient and accurate. Some verifying experiments are also presented in this paper. (C) 2003 Society of Photo-optical Instrumentation Engineers.