CCD扫描检测光束准直度

提出一种检测光束准直度的新方法。在对波面矢高进行定义的基础上，提出CCD轴向扫描检测激光束准直度的方法。利用采样光波在会聚透镜后形成的衍射图样，测量两个相同基准衍射图样之间的距离，即可确定入射光波的波面矢高，进而确定入射光波的准直度。在给出测量原理及模拟基准衍射图样的基础上．进行了实验验证。CCD轴向扫描方法具有结构简单、加工便利、操作方便的特点，是检测光束准直度的有效方法。

A new wavefront analysis method is proposed for collimation testing of laser beam. Based on the definition of wavefront rise wavefront analysis method of CCD scan is introduced. Wavefront rise is obtained by measuring the distance between the two same fiducial diffraction planes of the sampled wave. Therefore, the degree of collimation is determined. The principle of measurement and simulated fiducial diffraction patterns are given before experiment is made. The results demonstrated the feasibility of the method. The method holds a definite advantage in simplicity, and it is applicable for checking the degree of collimation of noncollimated wave.