Superresolution, extended focal depth or focal shift with electrically controllable radial birefringent filter

In this paper an electrically controllable radial birefringent pupil filter is proposed. It consists of two polarizers and an improved electrically controllable optical azimuth rotator which has two lambda/4 retarders, one electro-optical crystal and one radial birefringent crystal. The evolution and distribution of polarization states of this pupil filter are discussed. The most interesting and useful advantage of such a structure is that the characteristic of transverse superresolution and axial extended focal depth or focal shift can be obtained merely by controlling the applied voltage on the electro-optical crystal. The radial birefringent crystal azimuth angle cooperating with different electrical inductive phase differences will determine the transverse and axial intensity distribution. It is shown that for particular ranges of electrical inductive phase difference it is possible to obtain transverse superresolution along with extended focal depth or with a focal shift.

A novel FOCAL technique based on BP-ANN

In this paper, the feed-forward back-propagation artificial neural network (BP-ANN) algorithm is introduced in the traditional Focus Calibration using Alignment procedure (FOCAL) technique, and a novel FOCAL technique based on BP-ANN is proposed. The effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. It is proved that the novel FOCAL technique based on BP-ANN is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 Elsevier GmbH. All rights reserved.

A novel method to determine the FOCAL energy range

Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

Pure-phase plates for super-Gaussian focal-plane irradiance profile generations of extremely high order

A set of recursive formulas for diffractive optical plates design is described. The pure-phase plates simulated by this method homogeneously concentrate more than 96% of the incident laser energy in the desired focal-plane region. The intensity focal-plane profile fits a lath-order super-Gaussian function and has a nearly perfect flat top. Its fit to the required profile measured in the mean square error is 3.576 x 10(-3). (C) 1996 Optical Society of America

Focal switch in unapertured converging Hermite-cosh-Gaussian beams

Based on the Huygens-Fresnel diffraction integral, analytical representation of unapertured converging Hermite-cosh-Gaussian beams is derived. Focal switch of Hermite-cosh-Gaussian beams is studied detailedly with numerical calculation examples and a physical interpretation of focal switch is presented. It is found that decentered parameter is the dominant factor for the emergence of focal switch, and Fresnel number affects the amplitude of focal switch and the value of critical decentered parameter to determine emergence of focal switch. Physically, the emergence of focal switch of Hermite-cosh-Gaussian beams is resulted from competition between two major maximum intensities and switch of the absolute maximum intensity from a point to another when decentered parameter increases. (C) 2005 Elsevier Ltd. All rights reserved.

Focal shifts in focused Hermite-cosh-Gaussian laser beams

A closed-form propagation equation of Hermite-cosh-Gaussian beams passing through an unapertured thin lens is derived. Focal shifts are analyzed by means of two different methods according to the facts that the axial intensity of some focused Hermite-cosh-Gaussian beams are null and that of some others are not null but the principal maximum intensity may be located on the axis or off the axis. Optimal focusing for the beams is studied, and the condition of optimal focusing ensuring the smallest beam width is also given. (c) 2005 Elsevier GmbH. All rights reserved.

High focal depth with a pure-phase apodizer

High-density optical data storage requires high-numerical-aperture (NA) lenses and short wavelengths, But, with increasing NA and decreasing wavelength, the depth of focus (DOF) decreases rapidly. We propose to use pure-phase superresolution apodizers to optimize the axial intensity distribution and extend the DOF of an optical pickup. With this kind of apodizer, the expected DOF can be 2-4.88 times greater than that of the original system, and the spot size will be smaller than that of the original system. (C) 2001 Optical Society of America.

Phase-shifting apodizers for increasing focal depth

We propose the use of a phase-shifting apodizers to increase focal depth, and we study the axial and radial behavior of this kind of apodizer under the condition that the axial intensity distribution is optimized for high focal depth. (C) 2002 Optical Society of America.

Tunable focal depth of an apodized focusing optical system

The axial intensity distribution and focal depth of an apoclized focusing optical system are theoretically investigated with two kinds of incident light fields: a uniform-intensity-distribution beam and a Gaussian beam. Both a low-numerical-aperture and a high-numerical-aperture optical system are considered. Numerical results show that the depth of focus can be adjusted by changing the geometrical parameters and transmissivity of the apodizer in the focusing optical system. When a Gaussian beam is employed as the incident beam, the waist width also affects the depth of focus. The tunable range of the focal depth is very considerable. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

Tunable focal depth of an apodized focusing optical system

The axial intensity distribution and focal depth of an apoclized focusing optical system are theoretically investigated with two kinds of incident light fields: a uniform-intensity-distribution beam and a Gaussian beam. Both a low-numerical-aperture and a high-numerical-aperture optical system are considered. Numerical results show that the depth of focus can be adjusted by changing the geometrical parameters and transmissivity of the apodizer in the focusing optical system. When a Gaussian beam is employed as the incident beam, the waist width also affects the depth of focus. The tunable range of the focal depth is very considerable. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

Gradient force pattern, focal shift, and focal switch in an apodized optical system

In this paper, the evolution of the gradient force pattern, focal shift, and focal switch induced by a three-portion pure phase-shifting apodizer is numerically investigated in detail. The results show that the proposed apodizer may induce tunable gradient force on the particles in the focal region, focal shift, and focal switch. By adjusting the geometrical parameters of the phase-shifting apodizer, multiple traps may occur with changeable distance between them, and the shape of the optical trap also evolves evidently. More interestingly, for certain geometrical parameters of the proposed apodizer, by changing the phase shift of inner annular portion, the considerable focal shift may occur with focal switch accompanying, which is discussed to show that this kind of apodizer may be a very promising method of transporting trapped particles. © 2005 Elsevier GmbH. All rights reserved.

Focal shift in focused radially polarized ultrashort pulsed laser beams

Beginning with a beam coherence polarization (BCP) matrix, we obtain an analytical intensity expression for radially polarized ultrashort pulsed laser beams that pass through an apertureless aplanatic lens. We also investigate the intensity distribution of radially polarized beams in the vicinity of the focus. The focal shift of these beams is studied in detail. The focal shift depends strongly on Z(F) that coincides with pi times the Fresnel number. (c) 2007 Optical Society of America.

Spectral anomalies of focused hollow Gaussian beams at the geometrical focal plane

On the basis of diffraction integral and the expansion of the hard-aperture function into a finite series of complex Gaussian functions, an approximate expression for spatially fully coherent polychromatic hollow Gaussian beams passing through aperture lens is obtained. Detailed numerical results indicate that remarkable spectral changes always occurs near the points where the field amplitude has zero value. The effects of truncation parameter, Fresnel number and the beam order on spectral shifts and spectral switches are investigated numerically. (C) 2008 Elsevier B.V. All rights reserved.