A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Effects of Air Pollution Control on Climate

Urban air pollution and climate are closely connected due to shared generating processes (e.g., combustion) for emissions of the driving gases and aerosols. They are also connected because the atmospheric lifecycles of common air pollutants such as CO, NOx and VOCs, and of the climatically important methane gas (CH4) and sulfate aerosols, both involve the fast photochemistry of the hydroxyl free radical (OH). Thus policies designed to address air pollution may impact climate and vice versa. We present calculations using a model coupling economics, atmospheric chemistry, climate and ecosystems to illustrate some effects of air pollution policy alone on global warming. We consider caps on emissions of NOx, CO, volatile organic carbon, and SOx both individually and combined in two ways. These caps can lower ozone causing less warming, lower sulfate aerosols yielding more warming, lower OH and thus increase CH4 giving more warming, and finally, allow more carbon uptake by ecosystems leading to less warming. Overall, these effects significantly offset each other suggesting that air pollution policy has a relatively small net effect on the global mean surface temperature and sea level rise. However, our study does not account for the effects of air pollution policies on overall demand for fossil fuels and on the choice of fuels (coal, oil, gas), nor have we considered the effects of caps on black carbon or organic carbon aerosols on climate. These effects, if included, could lead to more substantial impacts of capping pollutant emissions on global temperature and sea level than concluded here. Caps on aerosols in general could also yield impacts on other important aspects of climate beyond those addressed here, such as the regional patterns of cloudiness and precipitation.

Job demands, job resources and individual innovation at work : Going beyond Karasek's model?

Resumen tomado de la publicaci??n. Resumen tambi??n en ingl??s

Modelling scenarios of diffusion and control of pandemic influenza, italy

En aquest article es resumeixen els resultats publicats en un informe de l' ISS (Istituto Superiore di Sanità) del desembre de 2006, sobre un model matemàtic desenvolupat per un grup de treball que inclou a investigadors de les Universitats de Trento, Pisa i Roma, i els Instituts Nacionals de Salut (Istituto Superiore di Sanità, ISS), per avaluar i mesurar l'impacte de la transmissió i el control de la pandèmia de grip

Autonomous underwater vehicle control using reinforcement learning policy search methods

Autonomous underwater vehicles (AUV) represent a challenging control problem with complex, noisy, dynamics. Nowadays, not only the continuous scientific advances in underwater robotics but the increasing number of subsea missions and its complexity ask for an automatization of submarine processes. This paper proposes a high-level control system for solving the action selection problem of an autonomous robot. The system is characterized by the use of reinforcement learning direct policy search methods (RLDPS) for learning the internal state/action mapping of some behaviors. We demonstrate its feasibility with simulated experiments using the model of our underwater robot URIS in a target following task

Model-based objects recognition in man-made environments

We describe a model-based objects recognition system which is part of an image interpretation system intended to assist autonomous vehicles navigation. The system is intended to operate in man-made environments. Behavior-based navigation of autonomous vehicles involves the recognition of navigable areas and the potential obstacles. The recognition system integrates color, shape and texture information together with the location of the vanishing point. The recognition process starts from some prior scene knowledge, that is, a generic model of the expected scene and the potential objects. The recognition system constitutes an approach where different low-level vision techniques extract a multitude of image descriptors which are then analyzed using a rule-based reasoning system to interpret the image content. This system has been implemented using CEES, the C++ embedded expert system shell developed in the Systems Engineering and Automatic Control Laboratory (University of Girona) as a specific rule-based problem solving tool. It has been especially conceived for supporting cooperative expert systems, and uses the object oriented programming paradigm

Control de glicèmia en pacients crítics mitjançant CGMS

L’estudi que es realitza en aquest projecte/treball final de carrera queda englobat dins del grup de recerca MICE (Modal Intervals Control and Engeneering), el qual realitza investigacions entorn al control de glucèmia. Aquest grup de recerca vinculat a la Universitat de Girona col•labora amb l’Hospital Universitari Dr. Josep Trueta de Girona. La temàtica principal tractarà de realitzar el control de glucèmia en pacients crítics, que es troben ingressats en la unitat de cures intensives de qualsevol hospital. Com a conseqüència d’aquesta problemàtica, s’ha implementat en un entorn virtual, un pacient el qual simula la situació d’un pacient real en la unitat de cures intensives. El model emprat per a la obtenció del model de pacient virtual és el desenvolupat per Chase et al. (2005), el qual mitjançant variables com l’alimentació enteral i la sensibilitat insulínica, es podien realitzar assajos reals per a validar protocols de control ‘in silico’ per posteriorment realitzar assajos amb població real

Implementation of Response to Intervention (RtI) Model in Spain : An example of a collaboration between Canarian universities and the department of education of the Canary Islands

Resumen tomado de la publicaci??n

Predictive motion control of a mirosot mobile robot

This paper discusses predictive motion control of a MiRoSoT robot. The dynamic model of the robot is deduced by taking into account the whole process - robot, vision, control and transmission systems. Based on the obtained dynamic model, an integrated predictive control algorithm is proposed to position precisely with either stationary or moving obstacle avoidance. This objective is achieved automatically by introducing distant constraints into the open-loop optimization of control inputs. Simulation results demonstrate the feasibility of such control strategy for the deduced dynamic model

A mixed H2/H∞-based semiactive control for vibration mitigation in flexible structures

In this paper, we address this problem through the design of a semiactive controller based on the mixed H2/H∞ control theory. The vibrations caused by the seismic motions are mitigated by a semiactive damper installed in the bottom of the structure. It is meant by semiactive damper, a device that absorbs but cannot inject energy into the system. Sufficient conditions for the design of a desired control are given in terms of linear matrix inequalities (LMIs). A controller that guarantees asymptotic stability and a mixed H2/H∞ performance is then developed. An algorithm is proposed to handle the semiactive nature of the actuator. The performance of the controller is experimentally evaluated in a real-time hybrid testing facility that consists of a physical specimen (a small-scale magnetorheological damper) and a numerical model (a large-scale three-story building)

Análisis de los factores de éxito y fracaso del control social a la gestión pública estatal. Estudio de caso: la experiencia de la Red ciudadana de control social en Bienestar –componente discapacidad en Bogotá D.C

La presente monografía examina los alcances reales del Control Social a la Gestión Pública estatal desde el análisis de factores de éxito y fracaso, tomando como caso de estudio a la Red ciudadana de control social en Bienestar – componente discapacidad en Bogotá D.C. Este tipo de control fue concebido en marco normativo del país para prevenir actos corruptos y para que contribuyera al mejoramiento de la administración pública, haciéndola más acorde a las necesidades de la ciudadanía. Ahora bien, por lo que implica cumplir estas funciones, el control social se enfrenta a múltiples circunstancias que lo influyen positiva y negativamente, que determinan los efectos que pueda producir a nivel estatal y ciudadano. Para cumplir con este objetivo y a la luz del Enfoque Sistémico, se diseñó un modelo que permitiera identificar factores de éxito y fracaso basado en tres elementos básicos (organización, conocimiento y comunicación) que posibilitan caracterizar factores reconocidos en la bibliografía y otros nuevos que los provee el análisis de la experiencia, y que resultan hallazgos importantes por cuanto no se habían incluido hasta el momento en ningún recurso bibliográfico. En conclusión, se demuestra que mediante ciertas prácticas y acciones concretas los ciudadanos pueden incidir lícitamente en las actividades estatales, transformando la gestión pública y produciendo una mayor apropiación de lo público por parte de los ciudadanos.

Self-organized sociopolitical interactions as the best way to achieve organized patterns in human social systems: going beyond the top-down control of classical political regimes

La monografía presenta la auto-organización sociopolítica como la mejor manera de lograr patrones organizados en los sistemas sociales humanos, dada su naturaleza compleja y la imposibilidad de las tareas computacionales de los regímenes políticos clásico, debido a que operan con control jerárquico, el cual ha demostrado no ser óptimo en la producción de orden en los sistemas sociales humanos. En la monografía se extrapola la teoría de la auto-organización en los sistemas biológicos a las dinámicas sociopolíticas humanas, buscando maneras óptimas de organizarlas, y se afirma que redes complejas anárquicas son la estructura emergente de la auto-organización sociopolítica.

Desarrollo de un estado de la cuestión acerca de las interacciones entre el control de gestión y el aprendizaje organizacional.

Las organizaciones en la actualidad deben encontrar diferentes maneras de sobrevivir en un tiempo de rápida transformación. Uno de los mecanismos usados por las empresas para adaptarse a los cambios organizacionales son los sistemas de control de gestión, que a su vez permiten a las organizaciones hacer un seguimiento a sus procesos, para que la adaptabilidad sea efectiva. Otra variable importante para la adaptación es el aprendizaje organizacional siendo el proceso mediante el cual las organizaciones se adaptan a los cambios del entorno, tanto interno como externo de la compañía. Dado lo anterior, este proyecto se basa en la extracción de documentación soporte valido, que permita explorar las interacciones entre estos dos campos, los sistemas de control de gestión y el aprendizaje organizacional, además, analizar el impacto de estas interacciones en la perdurabilidad organizacional. ​

Diferencias individuales y desarrollo de habilidades de liderazgo : el rol del locus de control

El presente proyecto se ha elaborado con la finalidad de encontrar la relación existente entre el liderazgo y el locus de control, por medio de una revisión documental que permita dar una visión más amplia de estos dos fenómenos. De acuerdo con investigaciones realizadas, existen características individuales que afectan el desarrollo de liderazgo, lo cual a su vez tiene un impacto sobre el comportamiento de los individuos dentro de una sociedad. Uno de estos factores es el locus de control, el cual sesta determinado por características del individuo, y por el ambiente en el cual se desenvuelven las personas. Existen diferentes evidencias que soportan ésta relación entre locus de control y liderazgo. En éste estudio documental se describirán estos hallazgos, identificando las características del individuo y del contexto que influyen sobre ellos. Asimismo se pondrá en contexto a través del trabajo las características principales de los líderes y como se presentan las interacciones entre los lideres y seguidores, teniendo en cuenta que no todas las veces los seguidores desarrollan este papel al seguir a su líder, sino que por otro lado y estos pueden tomar parte fundamental en la interacción, influyendo de manera directa sobre el líder. Se recuerda que a los lideres los hacen sus seguidores y que sin estos no podrían desarrollar el papel de líder.