Aberration measurement of projection optics in lithographic tools based on two-beam interference theory

The degradation of image quality caused by aberrations of projection optics in lithographic tools is a serious problem in optical lithography. We propose what we believe to be a novel technique for measuring aberrations of projection optics based on two-beam interference theory. By utilizing the partial coherent imaging theory, a novel model that accurately characterizes the relative image displacement of a fine grating pattern to a large pattern induced by aberrations is derived. Both even and odd aberrations are extracted independently from the relative image displacements of the printed patterns by two-beam interference imaging of the zeroth and positive first orders. The simulation results show that by using this technique we can measure the aberrations present in the lithographic tool with higher accuracy. (c) 2006 Optical Society of America.

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

Optimization of Pulse Temporal Contrast in Optical Parametric Chirped Pulse Amplification

In optical parametric chirped pulse amplification (OPCPA), the degradation of temporal contrast of the compressed signal pulse mainly results from spectral clipping in the grating stretcher with finite size of the optics, parametric fluorescence (PF) and the spectral variations transferred from temporal fluctuation of the pump pulse. The temporal contrast of the recompressed amplified pulse in the OPCPA system is studied numerically and a number of solutions are considered and optimized to achieve the highest temporal contrast.

Low temperature growth of c-axis oriented AlN films on gamma-LiAlO2 by radio frequency magnetron sputtering

Aluminum nitride (AlN) films were prepared on gamma-LiAlO2 substrates by radio frequency (rf) magnetron sputtering. The influence of substrate temperature (T-s) and nitrogen (N-2) concentration on film growth was investigated. The X-ray diffraction (XRD) results reveal that highly c-axis oriented AlN films can be obtained in the temperature range from room temperature (RT) to 300 degrees C. A smoother surface and a crystalline quality decrease with increasing N-2 concentration have been observed by XRD and atomic force microscopy (AFM) for the films deposited at lower substrate temperature. On the contrary, the degradation of the surface smoothness and the higher crystalline quality can be observed for the films deposited at a higher substrate temperature with N-2-rich ambient. The growth mechanism which leads to different crystalline quality of the films is discussed. (C) 2008 Elsevier B.V. All rights reserved.

Investigation on thermal stability of TiO2 films for application at high temperature

The thermal stability of electron beam deposited TiO2 monolayers and TiO2/SiO2 high reflectors (HR) during 300 to 1100 degrees C annealing is studied. It is found that the optical loss of film increases with the increase in annealing temperature, due to the phase change, crystallisation and deoxidising of film. Scattering loss dominates the optical property degradation of film below 900 degrees C, while the absorption is another factor at 1100 degrees C. The increase in refractive index and decrease in physical thickness of TiO2 layer shift the spectra of HR above 900 degrees C. The possible crack mechanism on the surface of HR during annealing is discussed. Guidance for application on high temperature stable optical coatings is given.

Reconstruction of original body size and estimation of allometric relationships for the longfin inshore squid (Loligo pealeii) and northern shortfin squid (Illex illecebrosus)

Quantification of predator-prey body size relationships is essential to understanding trophic dynamics in marine ecosystems. Prey lengths recovered from predator stomachs help determine the sizes of prey most influential in supporting predator growth and to ascertain size-specific effects of natural mortality on prey populations (Bax, 1998; Claessen et al., 2002). Estimating prey size from stomach content analyses is often hindered because of the degradation of tissue and bone by digestion. Furthermore, reconstruction of original prey size from digested remains requires species-specific reference materials and techniques. A number of diagnostic guides for freshwater (Hansel et al., 1988) and marine (Watt et al., 1997; Granadeiro and Silva, 2000) prey species exist; however they are limited to specific geographic regions (Smale et al., 1995; Gosztonyi et al., 2007). Predictive equations for reconstructing original prey size from diagnostic bones in marine fishes have been developed in several studies of piscivorous fishes of the Northwest Atlantic Ocean (Scharf et al., 1998; Wood, 2005). Conversely, morphometric relationships for cephalopods in this region are scarce despite their importance to a wide range of predators, such as finfish (Bowman et al., 2000 ; Staudinger, 2006), elasmobranchs (Kohler, 1987), and marine mammals (Gannon et al., 1997; Williams, 1999).

Economic policies and the sustainable development of coastal resources in the Philippines

The link between environmental trends and economic policies is examined. The assessment of the past and present economic policies affecting the use of coastal resources in the Philippines showed that these policies have accelerated the rate of degradation of coastal resources. The current situation demands not only the reorientation of economic policies, but also other related actions to attain sustainable development of coastal resources.

Growth of carbon nanotubes on fully processed silicon-on-insulator CMOS substrates.

This paper describes the growth of Carbon Nanotubes (CNTs) both aligned and non-aligned on fully processed CMOS substrates containing high temperature tungsten metallization. While the growth method has been demonstrated in fabricating CNT gas sensitive layers for high temperatures SOI CMOS sensors, it can be employed in a variety of applications which require the use of CNTs or other nanomaterials with CMOS electronics. In our experiments we have grown CNTs both on SOI CMOS substrates and SOI CMOS microhotplates (suspended on membranes formed by post-CMOS deep RIE etching). The fully processed SOI substrates contain CMOS devices and circuits and additionally, some wafers contained high current LDMOSFETs and bipolar structures such as Lateral Insulated Gate Bipolar Transistors. All these devices were used as test structures to investigate the effect of additional post-CMOS processing such as CNT growth, membrane formation, high temperature annealing, etc. Electrical characterisation of the devices with CNTs were performed along with SEM and Raman spectroscopy. The CNTs were grown both at low and high temperatures, the former being compatible with Aluminium metallization while the latter being possible through the use of the high temperature CMOS metallization (Tungsten). In both cases we have found that there is no change in the electrical behaviour of the CMOS devices, circuits or the high current devices. A slight degradation of the thermal performance of the CMOS microhotplates was observed due to the extra heat dissipation path created by the CNT layers, but this is expected as CNTs exhibit a high thermal conductance. In addition we also observed that in the case of high temperature CNT growth a slight degradation in the manufacturing yield was observed. This is especially the case where large area membranes with a diameter in excess of 500 microns are used.

Methodologies and mechanisms for management of cumulative coastal environmental impacts. Part I: Synthesis, with annotated bibliography; Part II: Development and application of a cumulative impacts assessment protocol

What Are ~umulat iveE ffects? Coastal managers now recognize that many of the most serious resource degradation problems have built up gradually as the combined outcome of numerous actions and choices which alone may have had relatively minor impacts. For example, alteration of essential habitat through wetland loss, degradation of water quality from nonpoint source pollution, and changes in salinity of estuarine waters from water diversion projects can be attributed to numerous small actions and choices. These incremental losses have broad spatial and temporal dimensions, resulting in the gradual alteration of structure and functioning of biophysical systems. In the environmental management field, the term "cumulative effects" is generally used to describe this phenomenon of changes in the environment that result from numerous, small-scale alterations.

Global transcriptional responses of the toxic cyanobacterium, Microcystis aeruginosa, to nitrogen stress, phosphorus stress, and growth on organic matter

Whole transcriptome shotgun sequencing (RNA-seq) was used to assess the transcriptomic response of the toxic cyanobacterium Microcystis aeruginosa during growth with low levels of dissolved inorganic nitrogen (low N), low levels of dissolved inorganic phosphorus (low P), and in the presence of high levels of high molecular weight dissolved organic matter (HMWDOM). Under low N, one third of the genome was differentially expressed, with significant increases in transcripts observed among genes within the nir operon, urea transport genes (urtBCDE), and amino acid transporters while significant decreases in transcripts were observed in genes related to photosynthesis. There was also a significant decrease in the transcription of the microcystin synthetase gene set under low N and a significant decrease in microcystin content per Microcystis cell demonstrating that N supply influences cellular toxicity. Under low P, 27% of the genome was differentially expressed. The Pho regulon was induced leading to large increases in transcript levels of the alkaline phosphatase phoX, the Pst transport system (pstABC), and the sphX gene, and transcripts of multiple sulfate transporter were also significantly more abundant. While the transcriptional response to growth on HMWDOM was smaller (5–22% of genes differentially expressed), transcripts of multiple genes specifically associated with the transport and degradation of organic compounds were significantly more abundant within HMWDOM treatments and thus may be recruited by Microcystis to utilize these substrates. Collectively, these findings provide a comprehensive understanding of the nutritional physiology of this toxic, bloom-forming cyanobacterium and the role of N in controlling microcystin synthesis.

Swimming crab Callinectes amnicola (Decapoda-Portunidae) capture analysis of a lagoon with high continental influence (Aby Lagoon, Cote d'Ivoire, West Africa)

The study describes the main causes of captures and productions decreasing of swimming crab Callinectes amnicola (Decapoda Portunidae) in Aby lagoon complex. For that, docks of two Sub Prefectures of Adiaké and Assini-Mafia respectively including the villages of Adiaké, Anga, Assomlan, Epleman, Aby and Man-Man, M'Bratty, Assini-Ngouankro and Assini-Mafia were studied from 2006 to 2009 and completed with previous results obtained from 1988 to 2005. Field investigators were identified by site/village and they recorded daily activities of fishermen (number of effective fishermen, number of gears and area of fishing, duration of fishing, types and quantity of bait) and landing of swimming crabs. During recent period of the study, total production decreased from 3742 tons in 2006 to 1500 tons in 2009. Matrix correlations and correlation analysis indicated that this downward trend was due to the increase of the number of fishermen, number of fishing gear, the decrease in female crabs capture and degradation of the environment related to gradual closure of the Assini-Mafia channel. Despite this decline, total production in Aby lagoon remained high compared to the productions of some lagoons of the country and the region. Given the importance of fishing swimming crabs in Aby lagoon, since it concerns many young people and it is a source of income, stringent measures for sustainable and responsible management must be taken and implemented as part of a co-management plan involving all stakeholders to sustainably manage the resource

A characterization of community fish refuge typologies in rice field fisheries ecosystems

In rural Cambodia, fish is a source of food and income to millions of people. However, there has been a real threat to fish populations in natural wetlands due to the degradation of aquatic biodiversity and habitat, illegal fishing, increase of population and demand for fish, and the use of harmful pesticides for agriculture. The Rice Field Fisheries Enhancement Project (RFFEP) seeks to rebuild and protect the fish populations through innovative methods. The project works with communities to sustainably strengthen the rice field fisheries near their villages by improving protected habitats called "community fish refuges". This handbook characterizes rice field fisheries that are connected to community fish refuges. Community fish refuges are designated fish conservation areas promoted by the Fisheries Administration of the Royal Cambodian Government. It also examines the characteristics of rain-fed rice field ecosystems that are connected to community fish refuges in order to further refine descriptive criteria and better understand potential benefits and management strategies.

Longitudinal prediction of the operational energy use of buildings

Thus far most studies of operational energy use of buildings fail to take a longitudinal view, or in other words, do not take into account how operational energy use changes during the lifetime of a building. However, such a view is important when predicting the impact of climate change, or for long term energy accounting purposes. This article presents an approach to deliver a longitudinal prediction of operational energy use. The work is based on the review of deterioration in thermal performance, building maintenance effects, and future climate change. The key issues are to estimate the service life expectancy and thermal performance degradation of building components while building maintenance and changing weather conditions are considered at the same time. Two examples are presented to demonstrate the application of the deterministic and stochastic approaches, respectively. The work concludes that longitudinal prediction of operational energy use is feasible, but the prediction will depend largely on the availability of extensive and reliable monitoring data. This premise is not met in most current buildings. © 2011 Elsevier Ltd.

Application of encapsulated nisin and sodium citrate for shelf life increasing of Rainbow trout (Onchorhynchus mykiss) fillet packaged with MAP and their effect on Staphylococcus aureus

Nisin is a widely used naturally occurring antimicrobial effective against many pathogenic and spoilage microorganisms. It has been proposed that reduced efficacy of nisin in foods can be improved by technologies such as encapsulation to protect it from interferences by food matrix components. The aim of this study was using of spray dried encapsulated nisin with zein in concentration of (0.15 and 0.25 g/kg) and sodium citrate (1.5 and 2.5%) and treatments with both of them to extent the shelf life of filleted trouts packaged by Modified Atmosphere Packaging (45% CO2, 50% N2 ,5% O2) and stored at 4±1 °C for 20 days. Furthermore, to evaluate the antimicrobial efficiency of encapsulated nisin and soudium citrate the trouts fillets was inoculated with Staphylococcus aureus as an index pathogenic bacteria. Assessment of chemical spoilage indexes such as (Proxide value, Thiobarbituric acid, total volatile base nitrogen and pH) , microbial parameters (Total Plate Count, Psychrotrophic count, Lactic acid bacteria count), Staphylococcus aureus cont in treatments which were inoculated with 5 logcfu/g of this bacteria and sensory evaluation of fillets including (smell, color, texture and total acceptability) was carried out in days of 0, 4, 8, 12, 16 and 20. The results revealed that treatment with both exposure of nisin and sodium citrate showed significantly lower chemical spoilage indexes in comparison with controls (vaccum packed and MAP) (P<0.05). Furthermore, (nisin 0.25 g/kg sodium citrate 2.5%) treatment which was exposed to the maximal level used of both materials was significantly the lowest treatment with (Proxide value, Thiobarbituric acid, total volatile base nitrogen and pH) of 9.95 (meq O2/kg) , 1.55 (mgMA/kg), 29.65 (mgN/100g) and 6.65 , respectively and according to the maximal recommended level of this indices , shelf life of fillets in this treatment was esstimated 20 days.The control (vaccum packed) treatment was significantly the highest treatment with (Proxide value, Thiobarbituric acid, total volatile base nitrogen and pH) of 15.17 (meq O2/kg), 3.03 (mgMA/kg), 38.4 (mgN/100g) and 6.95 , respectively and according to the maximal recommended level of this indices , shelf life of fillets in this treatment was estimated 11 days. Also, in microbial point of view (nisin 0.25 g/kg- sodium citrate 2.5%) treatment was the lowest treatment with Total Plate Count, Psychrotrophic count, Lactic acid bacteria count and Staphylococcus aureus count of 6.7, 6.83, 5.25 and 6.04 logcfu/g respectively, and conrol (vaccum packed) treatment was the highest treatment with 9.15, 9.41, 7.7 and 9.01 logcfu/g respectively. According to the lower results of chemical and microbial indices and higher sensory evaluated scores assessed in this research for encapsulated nisin in comparison with free nisin , it was concluded that encapsulation of nisin with zein capsules may improve the efficiency of nisin. The measuremented values of Mass yield, Total solids content of capsules, Encapsulation efficiency, In vitro release kinetics in 200 hour for encapsulated nisin in this study was 49.89, 62, 98.31 and 69% respectively and Encapsulated particle size was lower than 674.21 μm for 90% of particles. As a consequence, nisin , in particular encapsulated nisin, and sodium citrate alone or together with and Modified Atmosphere packaging might be considered as effective tools in preventing the quality degradation of the fillets, resulting in an extension of their shelf life.

Effects of exogenous double-stranded RNA on the basonuclin gene expression in mouse oocytes

In plants and less-advanced animal species, such as C.elegans, introduction of exogenous double-stranded RNA (dsRNA) into cells would trigger degradation of the mRNA with homologous sequence and interfere with the endogenous gene expression. It might represent an ancient anti-virus response which could prevent the mutation in the genome that was caused by virus infection or mobile DNA elements insertion. This phenomenon was named RNA interference, or RNAi. In this study, RNAi was used to investigate the function of basonuclin gene during oogenesis. Microinjection of dsRNA directed towards basonuclin into mouse germinal-vesicle-intact (GV) oocytes brought down the abundance of the cognate mRNA effectively in a time- and concentration-dependent manner. This reduction effect was sequence-specific and showed no negative effect on other non-homologous gene expression in oocytes, which indicated that dsRNA can recognize and cause the degradation of the transcriptional products of endogenous basonuclin gene in a sequence-specific manner. Immunofluorescence results showed that RNAi could reduce the concentration of basonuclin protein to some extent, but the effect was less efficient than the dsRNA targeting towards tPA and cMos which was also expressed in oocytes. This result might be due to the long half life of basonuclin protein in oocytes and the short reaction time which was posed by the limited life span of GV oocytes cultured in vitro. In summary, dsRNA could inhibit the expression of the cognate gene in oocytes at both mRNA and protein levels. The effect was similar to Knock-out technique which was based on homologous recombination. Furthermore, hairpin-style dsRNA targeting basonuclin gene could be produced by transcription from a recombinant plasmid and worked efficiently to deplete the cognate mRNA in oocytes. This finding offered a new way to study the function of basonuclin in the early stage of oogenesis by infection of primordial oocytes with the plasmid expressing hairpin-style basonuclin dsRNA.