Development of hybrid UV VCSEL with organic active material and dielectric DBR mirrors for medical, sensoric and data storage applications

Lasers play an important role for medical, sensoric and data storage devices. This thesis is focused on design, technology development, fabrication and characterization of hybrid ultraviolet Vertical-Cavity Surface-Emitting Lasers (UV VCSEL) with organic laser-active material and inorganic distributed Bragg reflectors (DBR). Multilayer structures with different layer thicknesses, refractive indices and absorption coefficients of the inorganic materials were studied using theoretical model calculations. During the simulations the structure parameters such as materials and thicknesses have been varied. This procedure was repeated several times during the design optimization process including also the feedback from technology and characterization. Two types of VCSEL devices were investigated. The first is an index coupled structure consisting of bottom and top DBR dielectric mirrors. In the space in between them is the cavity, which includes active region and defines the spectral gain profile. In this configuration the maximum electrical field is concentrated in the cavity and can destroy the chemical structure of the active material. The second type of laser is a so called complex coupled VCSEL. In this structure the active material is placed not only in the cavity but also in parts of the DBR structure. The simulations show that such a distribution of the active material reduces the required pumping power for reaching lasing threshold. High efficiency is achieved by substituting the dielectric material with high refractive index for the periods closer to the cavity. The inorganic materials for the DBR mirrors have been deposited by Plasma- Enhanced Chemical Vapor Deposition (PECVD) and Dual Ion Beam Sputtering (DIBS) machines. Extended optimizations of the technological processes have been performed. All the processes are carried out in a clean room Class 1 and Class 10000. The optical properties and the thicknesses of the layers are measured in-situ by spectroscopic ellipsometry and spectroscopic reflectometry. The surface roughness is analyzed by atomic force microscopy (AFM) and images of the devices are taken with scanning electron microscope (SEM). The silicon dioxide (SiO2) and silicon nitride (Si3N4) layers deposited by the PECVD machine show defects of the material structure and have higher absorption in the ultra violet range compared to ion beam deposition (IBD). This results in low reflectivity of the DBR mirrors and also reduces the optical properties of the VCSEL devices. However PECVD has the advantage that the stress in the layers can be tuned and compensated, in contrast to IBD at the moment. A sputtering machine Ionsys 1000 produced by Roth&Rau company, is used for the deposition of silicon dioxide (SiO2), silicon nitride (Si3N4), aluminum oxide (Al2O3) and zirconium dioxide (ZrO2). The chamber is equipped with main (sputter) and assisted ion sources. The dielectric materials were optimized by introducing additional oxygen and nitrogen into the chamber. DBR mirrors with different material combinations were deposited. The measured optical properties of the fabricated multilayer structures show an excellent agreement with the results of theoretical model calculations. The layers deposited by puttering show high compressive stress. As an active region a novel organic material with spiro-linked molecules is used. Two different materials have been evaporated by utilizing a dye evaporation machine in the clean room of the department Makromolekulare Chemie und Molekulare Materialien (mmCmm). The Spiro-Octopus-1 organic material has a maximum emission at the wavelength λemission = 395 nm and the Spiro-Pphenal has a maximum emission at the wavelength λemission = 418 nm. Both of them have high refractive index and can be combined with low refractive index materials like silicon dioxide (SiO2). The sputtering method shows excellent optical quality of the deposited materials and high reflection of the multilayer structures. The bottom DBR mirrors for all VCSEL devices were deposited by the DIBS machine, whereas the top DBR mirror deposited either by PECVD or by combination of PECVD and DIBS. The fabricated VCSEL structures were optically pumped by nitrogen laser at wavelength λpumping = 337 nm. The emission was measured by spectrometer. A radiation of the VCSEL structure at wavelength 392 nm and 420 nm is observed.

Beyond - Another view on space and landscape

Die Beiträge dieser Veröffentlichung sind aus Vorträgen anlässlich der Postdoc-Konferenz zu Ehren von Prof. Dr. Detlev Ipsen, der sich im September 2010 aus dem Universitätsdienst verabschiedete, entstanden. Das inhaltliche Kernprogramm der Postdoc-Konferenz war bewusst auf sehr unterschiedliche Perspektiven auf den Raum und die Raumwahrnehmung ausgerichtet und bildet sich auch in den Beiträgen dieser Veröffentlichung ab. Elisabeth Heidenreich widmet sich in ihrem Beitrag „Der moderne Dschihad und seine (sakralen) Räume“ den technischen Räumen des islamistischen Terrorismus. Hans-Ulrich Werner zeigt in seinem Beitrag „SoundScapes als Klang und Raum“ verschiedene Begegnungen der Musik- und Klangwissenschaft mit der Stadt- und Umweltplanung auf und setzt sich mit der Bedeutung und Transformation von „Klangräumen“ in der Planung auseinander. Der Beitrag von Susanne Kost „Kulturbedingte Unterschiede im Landschaftsbewusstsein – eine Annäherung“ analysiert, wie und wodurch sich bestimmte Handlungs- und Wahrnehmungsweisen in Kulturen entwickelt haben könnten und ob sich am Beispiel der Niederlande bestimmte Muster der Landschaftswahrnehmung identifizieren lassen. Ilya Maharika erörtert in seinem Beitrag „Urban Gene of Desakota. A Dynamic of Indonesian Urban-Rural Continuum with the Case of Yogyakarta Region” internationale Phänomene und Dynamiken im Stadt-Land-Gefüge.

MEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range

Optische Spektrometer sind bekannte Instrumente für viele Anwendungen in Life Sciences, Produktion und Technik aufgrund ihrer guten Selektivität und Sensitivität zusammen mit ihren berührungslosen Messverfahren. MEMS (engl. Micro-electro-mechanical system)-basierten Spektrometer werden als disruptive Technologie betrachtet, in der miniaturisierte Fabry-Pérot Filter als sehr attraktiv für die optische Kommunikation und 'Smart Personal Environments', einschließlich des medizinischen Anwendungen, zu nennen sind. Das Ziel dieser Arbeit ist, durchstimmbare Filter-Arrays mit kostengünstigen Technologien herzustellen. Materialien und technologische Prozesse, die für die Herstellung der Filter-Arrays benötigt werden, wurden untersucht. Im Rahmen dieser Arbeit, wurden durchstimmbare Fabry Pérot Filter-Arrays für den sichtbaren Spektralbereich untersucht, die als Nano-Spektrometer eingesetzt werden. Darüber hinaus wurde ein Modell der numerischen Simulation vorgestellt, die zur Ermittlung eines optimales geometrisches Designs verwendet wurde, wobei sich das Hauptaugenmerk der Untersuchung auf die Durchbiegung der Filtermembranen aufgrund der mechanischen Verspannung der Schichten richtet. Die geometrische Form und Größe der Filtermembranen zusammen mit der Verbindungsbrücken sind von entscheidender Bedeutung, da sie die Durchbiegung beeinflussen. Lange und schmale Verbindungsbrücken führen zur stärkeren Durchbiegung der Filtermembranen. Dieser Effekt wurde auch bei der Vergrößerung der Durchmesser der Membran beobachtet. Die Filter mit spiralige (engl. curl-bent) Verbindungsbrücken führten zu geringerer Deformation als die mit geraden oder gebogenen Verbindungsbrücken. Durchstimmbare Si3N4/SiO2 DBR-basierende Filter-Arrays wurden erfolgreich hergestellt. Eine Untersuchung über die UV-NIL Polymere, die als Opferschicht und Haltepfosten-Material der Filter verwendet wurden, wurde durchgeführt. Die Polymere sind kompatibel zu dem PECVD-Verfahren, das für die Spiegel-Herstellung verwendet wird. Die laterale Strukturierung der DBR-Spiegel mittels des RIE (engl. Reactive Ion Etching)-Prozesses sowie der Unterätz-Prozess im Sauerstoffplasma zur Entfernung der Opferschicht und zum Erreichen der Luftspalt-Kavität, wurden durchgeführt. Durchstimmbare Filter-Arrays zeigten einen Abstimmbereich von 70 nm bei angelegten Spannungen von weniger als 20 V. Optimierungen bei der Strukturierung von TiO2/SiO2 DBR-basierenden Filtern konnte erzielt werden. Mit der CCP (engl. Capacitively Coupling Plasma)-RIE, wurde eine Ätzrate von 20 nm/min erreicht, wobei Fotolack als Ätzmaske diente. Mit der ICP (engl. Inductively Coupling Plasma)-RIE, wurden die Ätzrate von mehr als 60 nm/min mit einem Verhältniss der Ar/SF6 Gasflüssen von 10/10 sccm und Fotolack als Ätzmasken erzielt. Eine Ätzrate von 80 bis 90 nm/min wurde erreicht, hier diente ITO als Ätzmaske. Ausgezeichnete geätzte Profile wurden durch den Ätzprozess unter Verwendung von 500 W ICP/300 W RF-Leistung und Ar/SF6 Gasflüsse von 20/10 sccm erreicht. Die Ergebnisse dieser Arbeit ermöglichen die Realisierung eines breiten Spektralbereichs der Filter-Arrays im Nano-Spektrometer.

Understanding Recreational Services of Urban Riverfront Space for Planning Purposes

In the process of urbanization, natural and semi-natural landscapes are increasingly cherished as open space and recreational resource. Urban rivers are part of this kind of resource and thus play an important role in managing urban resilience and health. Employing the example of Tianjin, this doctoral dissertation research aims at learning to understand how to plan and design for the interface zones between urban water courses and for the land areas adjacent to such water courses. This research also aims at learning how to link waterfront space with other urban space in order to make a recreational space system for the benefit of people. Five questions of this dissertation are: 1) what is the role of rivers in spatial and open space planning? 2) What are the human needs regarding outdoor open space? 3) How do river and water front spatial structures affect people's recreational activities? 4) How to define the recreational service of urban river and waterfront open space? 5) How might answering these question change planning and design of urban open space? Quantitative and qualitative empirical approaches were combined in this study for which literature review and theoretical explorations provide the basis. Empirical investigations were conducted in the city of Tianjin. The quantitative approach includes conducting 267 quantitative interviews, and the qualitative approach includes carrying out field observations and mappings. GIS served to support analysis and visualization of empirical information that was generated through this study. By responding to the five research questions, findings and lessons include the following: 1) In the course of time rivers have gained importance in all levels and scales of spatial planning and decision making. Regarding the development of ecological networks, mainly at national scale, rivers are considered significant linear elements. Regarding regional and comprehensive development, river basins and watersheds are often considered as the structural link for strategic ecological, economic, social and recreational planning. For purposes of urban planning, particularly regarding recreational services in cities, the distribution of urban open spaces often follows the structure of river systems. 2) For the purpose of classifying human recreational needs that relate to outdoor open space Maslow's hierarchy of human needs serves as theoretical basis. The classes include geographical, safety, physiological, social and aesthetic need. These classes serve as references while analyzing river and waterfront open space and other kinds of open space. 3) Regarding the question how river and waterfront spatial structures might affect people's recreational activities, eight different landscape units were identified and compared in the case study area. Considering the thermal conditions of Tianjin, one of these landscape units was identified as affording the optimal spatial arrangement which mostly meets recreational needs. The size and the shape of open space, and the plants present in an open space have been observed as being most relevant regarding recreational activities. 4) Regarding the recreational service of urban river and waterfront open space the results of this research suggest that the recreational service is felt less intensively as the distances between water 183 front and open space user’s places of residence are increasing. As a method for estimating this ‘Service Distance Effect’ the following formula may be used: Y = a*ebx. In this equation Y means the ‘Service Distance’ between homes and open space, and X means the percentage of the people who live within this service distance. Coefficient "a" represents the distance of the residential area nearest to the water front. The coefficient "b" is a comprehensive capability index that refers to the size of the available and suitable recreational area. 5) Answers found to the questions above have implications for the planning and design of urban open space. The results from the quantitative study of recreational services of waterfront open space were applied to the assessment of river-based open space systems. It is recommended that such assessments might be done employing the network analysis function available with any GIS. In addition, several practical planning and designing suggestions are made that would help remedy any insufficient base for satisfying recreational needs. The understanding of recreational need is considered helpful for the proposing planning and designing ideas and for the changing of urban landscapes. In the course of time Tianjin's urban water system has shrunk considerably. At the same time rivers and water courses have shaped Tianjin's urban structure in noticeable ways. In the process of urbanization water has become increasingly important to the citizens and their everyday recreations. Much needs to be changed in order to improve recreational opportunities and to better provide for a livable city, most importantly when considering the increasing number of old people. Suggestions made that are based on results of this study, might be implemented in Tianjin. They are 1) to promote the quality of the waterfront open space and to make all linear waterfront area accessible recreational spaces. Then, 2), it is advisable to advocate the concept of green streets and to combine green streets with river open space in order to form an everyday recreational network. And 3) any sound urban everyday recreational service made cannot rely on only urban rivers; the whole urban structure needs to be improved, including adding small open space and optimize the form of urban communities, finally producing a multi-functional urban recreational network.

Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

Space System Architecture: Final Report of SSPARC: the Space Systems, Policy, and Architecture Research Consortium (Thrust I and II)

The Space Systems, Policy and Architecture Research Consortium (SSPARC) was formed to make substantial progress on problems of national importance. The goals of SSPARC were to: • Provide technologies and methods that will allow the creation of flexible, upgradable space systems, • Create a “clean sheet” approach to space systems architecture determination and design, including the incorporation of risk, uncertainty, and flexibility issues, and • Consider the impact of national space policy on the above. This report covers the last two goals, and demonstrates that the effort was largely successful.

An Interpolative Analytical Cache Model with Application to Performance-Power Design Space Exploration

Caches are known to consume up to half of all system power in embedded processors. Co-optimizing performance and power of the cache subsystems is therefore an important step in the design of embedded systems, especially those employing application specific instruction processors. In this project, we propose an analytical cache model that succinctly captures the miss performance of an application over the entire cache parameter space. Unlike exhaustive trace driven simulation, our model requires that the program be simulated once so that a few key characteristics can be obtained. Using these application-dependent characteristics, the model can span the entire cache parameter space consisting of cache sizes, associativity and cache block sizes. In our unified model, we are able to cater for direct-mapped, set and fully associative instruction, data and unified caches. Validation against full trace-driven simulations shows that our model has a high degree of fidelity. Finally, we show how the model can be coupled with a power model for caches such that one can very quickly decide on pareto-optimal performance-power design points for rapid design space exploration.

Nonpoint source pollution, space, time and asymetric information - a deposit refund approach

The incorporation of space allows the establishment of a more precise relationship between a contaminating input, a contaminating byproduct and emissions that reach the final receptor. However, the presence of asymmetric information impedes the implementation of the first-best policy. As a solution to this problem a site specific deposit refund system for the contaminating input and the contaminating byproduct are proposed. Moreover, the utilization of a successive optimization technique first over space and second over time enables definition of the optimal intertemporal site specific deposit refund system

Hilbert space on probability density functions with Aitchison geometry

Compositional data analysis motivated the introduction of a complete Euclidean structure in the simplex of D parts. This was based on the early work of J. Aitchison (1986) and completed recently when Aitchinson distance in the simplex was associated with an inner product and orthonormal bases were identified (Aitchison and others, 2002; Egozcue and others, 2003). A partition of the support of a random variable generates a composition by assigning the probability of each interval to a part of the composition. One can imagine that the partition can be refined and the probability density would represent a kind of continuous composition of probabilities in a simplex of infinitely many parts. This intuitive idea would lead to a Hilbert-space of probability densities by generalizing the Aitchison geometry for compositions in the simplex into the set probability densities

Weighted Logratio Biplots, Correspondence Analysis and Spectral Maps

Starting with logratio biplots for compositional data, which are based on the principle of subcompositional coherence, and then adding weights, as in correspondence analysis, we rediscover Lewi's spectral map and many connections to analyses of two-way tables of non-negative data. Thanks to the weighting, the method also achieves the property of distributional equivalence

Vertebrates Limb Geometry in the Simplex space

A novel metric comparison of the appendicular skeleton (fore and hind limb) of different vertebrates using the Compositional Data Analysis (CDA) methodological approach it’s presented. 355 specimens belonging in various taxa of Dinosauria (Sauropodomorpha, Theropoda, Ornithischia and Aves) and Mammalia (Prothotheria, Metatheria and Eutheria) were analyzed with CDA. A special focus has been put on Sauropodomorpha dinosaurs and the Aitchinson distance has been used as a measure of disparity in limb elements proportions to infer some aspects of functional morphology

Improving Label Space Usage for Ethernet Label Switched Paths

Ethernet is becoming the dominant aggregation technology for carrier transport networks; however, as it is a LAN technology, native bridged ethernet does not fulfill all the carrier requirements. One of the schemes proposed by the research community to make ethernet fulfill carrier requirements is ethernet VLAN-label switching (ELS). ELS allows the creation of label switched data paths using a 12-bit label encoded in the VLAN TAG control information field. Previous label switching technologies such as MPLS use more bits for encoding the label. Hence, they do not suffer from label sparsity issues as ELS might. This paper studies the sparsity issues resulting from the reduced ELS VLAN-label space and proposes the use of the label merging technique to improve label space usage. Experimental results show that label merging considerably improves label space usage

Asymmetric tunnels in P2MP LSPs as a label space reduction method

The objective of traffic engineering is to optimize network resource utilization. Although several works have been published about minimizing network resource utilization, few works have focused on LSR (label switched router) label space. This paper proposes an algorithm that takes advantage of the MPLS label stack features in order to reduce the number of labels used in LSPs. Some tunnelling methods and their MPLS implementation drawbacks are also discussed. The described algorithm sets up NHLFE (next hop label forwarding entry) tables in each LSR, creating asymmetric tunnels when possible. Experimental results show that the described algorithm achieves a great reduction factor in the label space. The presented works apply for both types of connections: P2MP (point-to-multipoint) and P2P (point-to-point)