Talbot effect of a grating with different kinds of flaws

The Talbot effect of a grating with different kinds of flaws is analyzed with the finite-difference time-domain (FDTD) method. The FDTD method can show the exact near-field distribution of different flaws in a high-density grating, which is impossible to obtain with the conventional Fourier transform method. The numerical results indicate that if a grating is perfect, its Talbot imaging should also be perfect; if the grating is distorted, its Talbot imaging will also be distorted. Furthermore, we evaluate high-density gratings by detecting the near-field distribution with the scanning near-field optical microscopy technique. Experimental results are also given. (c) 2005 Optical Society of America.

记录结构对体光栅各向异性衍射选择特性研究

以静态体光栅各向异性衍射理论分析模型为基础，将与体光栅厚度有关的记录光强调制度引入到各向异性耦合波方程中．利用耦合波理论分析了光折变晶体中体光栅的各向异性衍射性能，研究了在不同初始记录光强比的条件下，记录光入射角的改变对光折变体光栅各向异性布喇格衍射性能的影响。结果表明：记录光入射角和记录光初始光强比均对体光栅的各向异性衍射具有选择性；与此相比，记录光入射角和记录光初始光强比对于体光栅各向同性衍射不具备选择性。

结构参量对脉冲高斯光束布拉格衍射特性的影响

利用二维耦合波理论，研究了体光栅对时间和空间都为高斯型分布的脉冲激光光束的衍射性质，得到了衍射和透射光振幅的解析表达式。讨论了体光栅的结构参量对衍射光束的空间和频谱强度分布以及衍射效率的影响。结果表明，体光栅的波长选择带宽和衍射光束带宽随着结构参量的增大而增大，衍射效率随着入射脉冲时间宽度的增大而增大，并趋于定值，结构参量值越小，达到饱和的速度越慢，饱和值越大。

深刻蚀高密度熔融石英光栅

深刻蚀高密度熔融石英光栅是一种新型高效的衍射光学元件，具有衍射效率高、成本低、抗损伤，能在高强度激光条件下工作等优点。给出了利用感应耦合等离子体（ICP）技术制作熔融石英深刻蚀光栅的详细过程，并在一定的优化条件下制作了一系列不同周期、开口比和深度的高质量深刻蚀石英光栅。实验得到的最大刻蚀深度为4μm，并且在600l／mm的高密度条件下得到了刻蚀深度为1．9μm的高深宽比石英光栅。光栅侧壁陡直，表面平整，没有聚合物沉积。所制作的熔融石英光栅元件在高强激光环境、光谱仪、高效滤波器和波分复用系统等领域中有非常广

双掺杂LiNbO3：Fe：Mn晶体局域光折变体全息光栅形成及衍射特性

将带输运模型与二维耦合波理论相结合，研究了双掺杂LiNbO3：Fe：Mn晶体中由两束有限宽度平面波干涉产生的局域光折变体全息的动力学机制及其衍射特性。采用三步法联立求解了双中心带输运物质波方程和二维耦合波方程。数值计算结果表明，局域光折变体全息光栅的空间电荷场在空间上呈不均匀分布。当光栅区域较小时空间电荷场较强，随着光栅区域的增大，空间电荷场急剧下降，并降低一个数量级。此外，在接近光束入射边界的区域，空间电荷场时空变化规律与一维无限大光折变体全息光栅的结果相似，随着光栅区域的扩大，边界效应对空间电荷场的影

Anisotropic diffraction of stratified volume holographic grating in photorefractive media

We have studied the anisotropic diffraction properties of the stratified volume holographic gratings recorded in photorefractive media using the anisotropic coupled wave theory. It is shown that the diffraction efficiency of such system exhibit the uniform periodic Bragg selectivity properties. In addition the dependence of the stratified volume holographic optical elements (SVHOEs) diffraction properties on the buffer-layer thickness, grating-layer thickness, number of modulation layers, and total thickness of system are discussed in detail. (c) 2005 Elsevier GrnbH. All rights reserved.

Microoptical research in Shanghai Institute of Optics and Fine Mechanics

This paper summarized the recent research results of Changhe Zhou's group of Information Optics Lab in Shanghai Institute of Optics and Fine Mechanics (SIOM). The first is about the Talbot self-imaging research. We have found the symmetry rule, the regular-rearranged neighboring phase difference rule and the prime-number decamping rule, which is briefly summarized in a recent educational publication of Optics and Photonics News, pp.46-50, November 2004. The second is about four novel microoptical gratings designed and fabricated in SIOM. The third is about the design and fabrication of novel supperresolution phase plates for beam shaping and possible use in optical storage. The fourth is to develop novel femtosecond laser information processing techniques by incorporating microoptical elements, for example, use of a pair of reflective Dammann gratings for splitting the femtosecond laser pulses. The most attractive feature of this approach is that the conventional beam splitter is avoided. The conventional beam splitter would introduce the unequal dispersion due to the broadband spectrum of ultrashort laser pulses, which will affect the splitting result. We implemented the Dammann splitting apparatus by using two-layered reflective Dammann gratings, which generates the almost same array without angular dispersion. We believe that our device is highly interesting for splitting femtosecond laser pulses.

FDTD analysis of Talbot effect of a high density grating

Talbot effect of a grating with different flaws is analyzed with the finite-difference time-domain (FDTD) method. The FDTD method can show the exact near-field distribution of different flaws in a high-density grating, which is impossible to obtain with the conventional Fourier transform method. The numerical results indicate that if a grating is perfect, its Talbot imaging should also be perfect; if the grating is distorted, its Talbot imaging would also be distorted. Furthermore, we can evaluate high density gratings by detecting the near-field distribution.

A novel method to determine the FOCAL energy range

Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Polarizing beam splitter of a deep-etched fused-silica grating

We described a highly efficient polarizing beam splitter (PBS) of a deep-etched binary-phase fused-silica grating, where TE- and TM-polarized waves are mainly diffracted in the -1st and 0th orders, respectively. Tb achieve a high extinction ratio and diffraction efficiency, the grating depth and period are optimized by using rigorous coupled-wave analysis, which can be well explained based on the modal method with effective indices of the modes for TE/TM polarization. Holographic recording technology and inductively coupled plasma etching are employed to fabricate the fused-silica PBS grating. Experimental results of diffraction efficiencies approaching 80% for a TE-polarized wave in the -1st order and more than 85% for a TM-polarized wave in the 0th order were obtained at a wavelength of 1550 nm. Because of its compact structure and simple fabrication process, which is suitable for mass reproduction, a deep-etched fused-silica grating as a PBS should be a useful device for practical applications. (C) 2007 Optical Society of America

90°全息记录衍射效率分析与提高

对光折变全息记录特别是双中心全息记录中90°记录结构下较低的衍射效率进行了研究, 采用局域衍射理论对90°记录结构的衍射进行了分析,表明在同样的折射率变化和2 mm的光束宽度的情况下, 只有当折射率光栅振幅大于10-4时, 90°记录结构衍射效率才能够与小角度透射记录结构的衍射效率大致相当。针对环境干扰导致的干涉条纹振动影响光栅记录, 提出了有效调制度概念, 根据分析90°记录结构的干涉条纹间距很小, 容易受外界环境干扰而导致低的折射率变化率, 因此应采用主动条纹锁定系统。此外在双中心全息记录中, 微观光

Optical generaton of millimeter-wave pulses using a fiber Bragg grating in a fiber-optics system

A scheme is proposed to transform an optical pulse into a millimeter-wave frequency modulation pulse by using a weak fiber Bragg grating (FBG) in a fiber-optics system. The Fourier transformation method is used to obtain the required spectrum response function of the FBG for the Gaussian pulse, soliton pulse, and Lorenz shape pulse. On the condition of the first-order Born approximation of the weak fiber grating, the relation of the refractive index distribution and the spectrum response function of the FBG satisfies the Fourier transformation, and the corresponding refractive index distribution forms are obtained for single-frequency modulation and linear-frequency modulation millimeter-wave pulse generation. The performances of the designed fiber gratings are also studied by a numerical simulation method for a supershort pulse transmission. (c) 2007 Optical Society of America.

基于反射式达曼光栅的频率分辨光学开关装置

采用反射式达曼光栅对飞秒激光进行分束,可以避免材料色散的影响。搭建了利用反射式1×2达曼光栅为基础的频率分辨光学开关(FROG)装置,并把测量结果与传统多发频率分辨光学开关装置的测量结果进行了对比。理论和实验结果表明,当输入脉冲宽度大于50 fs时,用达曼光栅作为分光器和使用分光镜分光的效果是一样的;当输入脉冲的宽度小于50 fs时,用达曼光栅作为分光器引入的展宽量明显小于分光镜引入的展宽量,尤其是当输入脉冲的宽度小于20 fs时用达曼光栅作为分光器的效果更为突出。

双光栅并联匹配解调技术的工程化研究

在分析和综合其他数据处理方案优缺点的基础上,提出了一种基于分区查表法的有效数据处理方案.该方案先确定待处理的电压商值在三段近似线性曲线上所属区域,再执行查表法将其和微应变量一一对应.这种处理方案不但解决了传统单匹配解调技术中的双值和可测试范围小的问题,而且提高了测试准确度.根据实验结果,采用普通的光纤光栅对,系统可传感的应变范围可达525 με,准确度可达±1 με.