The effects of coil current distribution in a cylindrical electron-cyclotron-resonance reactor

Using a 2-D hybrid model, the authors have found that external currents play an important role in the plasma parameters in the reactor. The plasma density, temperature and electrostatic potential would be significantly influenced by the applied external currents.

Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

Theoretical and experimental researches of post-micro-buckling for fiber-reinforced composites

Post-microbuckling is a fundamental feature of compressive failure process for the unidirectional-fiber-reinforced composites and laminated composites. The post-microbuckling behavior of composites under compression in the light of the Kevlar49-reinforced 648/BF3.400 (brittle epoxy) and EP (flexible epoxy) is studied, theoretically and experimentally. Analytical results of compressive strength are in good agreement with experimental results, qualitatively and quantitatively. By the experimental research, the post-microbuckling feature of the advancing kink band model is clearly displayed.

Evolution of ideal micro-crack system

The ideal micro-cracks are treated with the number-density function; the characteristics of their evolution are investigated; a deterministic model is applied to the discussion of their extension. It is discovered that under certain conditions saturation may occur in the number-density. The main features of the statistical formulation are illustrated by several examples and compared with those observed in experiments.

The induction plasma chemical reactor: Part I. Equilibrium model

A mathematical model is presented for the numerical simulation of the flow, temperature, and concentration fields in an rf plasma chemical reactor. The simulation is performed assuming chemical equilibrium. The extent of validity of this assumption is discussed. The system considered is the reaction of SiCl4 and NH3 for the production of Si3N4.

The induction plasma chemical reactor: Part II. Kinetic model

A kinetic model has been developed for the prediction of the concentration gelds in an rf plasma reactor. A sample calculation for a SiCl4/H2 system is then performed. The model considers the mixing processes along with the kinetics of seven reactions involving the decomposition of these reactants. The results obtained are compared to those assuming chemical equilibrium. The predictions indicate that an equilibrium assumption will result in lower predicted temperature fields in the reactor. Furthermore, for the chemical system considered here, while differences exist between the concentration fields obtained by the two models, the differences are not substantial.

Frente Parlamentar Mista das Micro e Pequenas Empresas : lógica de funcionamento e resultados

Analisa o modo com que os parlamentares se organizam frente à estrutura institucional no Congresso Nacional. Tem como referências para discussão, contribuições de Barry Ames (2003) e Figueiredo e Limongi (2001) que apresentam dois modelos de funcionamento do Parlamento, o distributivista e o partidário. Analisa a atuação da Frente Parlamentar Mista das Micro e Pequenas Empresas. Enfatiza a segunda fase de funcionamento da Frente, os anos de 2008 e 2009, quando trabalhou pela regulamentação da Lei Geral das Micro e Pequenas Empresas (Lei Complementar nº 123/06) nos Estados e Municípios e seus aperfeiçoamentos por meio da aprovação de Leis Complementares nºs 127/07, 128/08 e 133/09.

An Overview on the Field of Micro- and Nanotechnologies for Synthetic Peptide-Based Vaccines

18 p.

Valoración de la Cooperación Inter-empresarial en las Microempresas del Municipio de Murcia, proyectos Micro y e-Micro (2002-2007)

[ES] El marco teórico del trabajo tiene como finalidad explicar los procesos de cooperación diseñados para las microempresas, con el propósito de establecer propuestas y argumentos para la formación de acuerdos, identificar los factores que afectan el desarrollo de los mismos, así como los sistemas de innovación nacional, regional y local para la animación de la cooperación entre firmas. Con ello, se propone una metodología para promover la cooperación entre microempresas, coordinada por agentes locales y la administración pública de los proyectos Micro y e-Micro (2002-2007) de la ciudad de Murcia.