Numerical-simulation of the flow, temperature, and concentration fields in a radiofrequency plasma cvd reactor

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Autoria(s): Guoying Z; Chingwen Z

Data(s)	1986
Identificador	http://dspace.imech.ac.cn/handle/311007/39764 http://www.irgrid.ac.cn/handle/1471x/5228
Idioma(s)	英语
Fonte	Ieee Transactions On Plasma Science.1986,14(4):531-537
Tipo	期刊论文