Room-temperature remote-plasma sputtering of c-axis oriented zinc oxide thin films

Highly c-axis oriented ZnO films have been deposited at room temperature with high rates (∼50 nm·min -1) using an innovative remote plasma sputtering configuration, which allows independent control of the plasma density and the sputtering ion energy. The ZnO films deposited possess excellent crystallographic orientation, high resistivity (>10 9 Ω·m), and exhibit very low surface roughness. The ability to increase the sputtering ion energy without causing unwanted Ar + bombardment onto the substrate has been shown to be crucial for the growth of films with excellent c-axis orientation without the need of substrate heating. In addition, the elimination of the Ar + bombardment has facilitated the growth of films with very low defect density and hence very low intrinsic stress (100 MPa for 3 μm-thick films). This is over an order of magnitude lower than films grown with a standard magnetron sputtering system. © 2012 American Institute of Physics.

Visual pattern recognition models for remote sensing of civil infrastructure

As-built models have been proven useful in many project-related applications, such as progress monitoring and quality control. However, they are not widely produced in most projects because a lot of effort is still necessary to manually convert remote sensing data from photogrammetry or laser scanning to an as-built model. In order to automate the generation of as-built models, the first and fundamental step is to automatically recognize infrastructure-related elements from the remote sensing data. This paper outlines a framework for creating visual pattern recognition models that can automate the recognition of infrastructure-related elements based on their visual features. The framework starts with identifying the visual characteristics of infrastructure element types and numerically representing them using image analysis tools. The derived representations, along with their relative topology, are then used to form element visual pattern recognition (VPR) models. So far, the VPR models of four infrastructure-related elements have been created using the framework. The high recognition performance of these models validates the effectiveness of the framework in recognizing infrastructure-related elements.

Remote Wireless Communications for Construction Management: A Case Study

The recent advances in urban wireless communications and protocols that spurred the development of city-wide wireless infrastructure motivated this research, since in many cases, construction sites are not conveniently located for wired connectivity. Large scale transportation projects for example, such as new highways, railroad tracks and the networks of utilities (power-lines, phone lines, mobile towers, etc) that usually follow them are constructed in areas where wired infrastructure for data exchange is often expensive and time-consuming to deploy. The communication difficulties that can be encountered in such construction sites can be addressed with a wireless communications link between the construction site and the decision-making office. This paper presents a case study on long-range, wireless communications suitable for data exchange between construction sites and engineering headquarters. The purpose of this study was to define the requirements for a reliable wireless communications model where common types of electronic construction data will be exchanged in a fast and efficient manner, and construction site personnel will be able to interact and share knowledge, information and electronic resources with the office staff.

Visual Pattern Recognition Models for Remote Sensing of Civil Infrastructure

As-built models have been proven useful in many project-related applications, such as progress monitoring and quality control. However, they are not widely produced in most projects because a lot of effort is still necessary to manually convert remote sensing data from photogrammetry or laser scanning to an as-built model. In order to automate the generation of as-built models, the first and fundamental step is to automatically recognize infrastructure-related elements from the remote sensing data. This paper outlines a framework for creating visual pattern recognition models that can automate the recognition of infrastructure-related elements based on their visual features. The framework starts with identifying the visual characteristics of infrastructure element types and numerically representing them using image analysis tools. The derived representations, along with their relative topology, are then used to form element visual pattern recognition (VPR) models. So far, the VPR models of four infrastructure-related elements have been created using the framework. The high recognition performance of these models validates the effectiveness of the framework in recognizing infrastructure-related elements.

High-density remote plasma sputtering of high-dielectric-constant amorphous hafnium oxide films

Hafnium oxide (HfOx) is a high dielectric constant (k) oxide which has been identified as being suitable for use as the gate dielectric in thin film transistors (TFTs). Amorphous materials are preferred for a gate dielectric, but it has been an ongoing challenge to produce amorphous HfOx while maintaining a high dielectric constant. A technique called high target utilization sputtering (HiTUS) is demonstrated to be capable of depositing high-k amorphous HfOx thin films at room temperature. The plasma is generated in a remote chamber, allowing higher rate deposition of films with minimal ion damage. Compared to a conventional sputtering system, the HiTUS technique allows finer control of the thin film microstructure. Using a conventional reactive rf magnetron sputtering technique, monoclinic nanocrystalline HfOx thin films have been deposited at a rate of ∼1.6nmmin-1 at room temperature, with a resistivity of 1013Ωcm, a breakdown strength of 3.5MVcm-1 and a dielectric constant of ∼18.2. By comparison, using the HiTUS process, amorphous HfOx (x=2.1) thin films which appear to have a cubic-like short-range order have been deposited at a high deposition rate of ∼25nmmin-1 with a high resistivity of 1014Ωcm, a breakdown strength of 3MVcm-1 and a high dielectric constant of ∼30. Two key conditions must be satisfied in the HiTUS system for high-k HfOx to be produced. Firstly, the correct oxygen flow rate is required for a given sputtering rate from the metallic target. Secondly, there must be an absence of energetic oxygen ion bombardment to maintain an amorphous microstructure and a high flux of medium energy species emitted from the metallic sputtering target to induce a cubic-like short range order. This HfOx is very attractive as a dielectric material for large-area electronic applications on flexible substrates. A remote plasma sputtering process (high target utilization sputtering, HiTUS) has been used to deposit amorphous hafnium oxide with a very high dielectric constant (∼30). X-ray diffraction shows that this material has a microstructure in which the atoms have a cubic-like short-range order, whereas radio frequency (rf) magnetron sputtering produced a monoclinic polycrystalline microstructure. This is correlated to the difference in the energetics of remote plasma and rf magnetron sputtering processes. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Deposition of low stress amorphous zinc tin oxide at ambient temperature using a remote plasma sputtering process suitable for delicate substrates

ZnxSnyOz thin films (<100nm thickness), deposited by remote sputtering from a metal target using a confined argon plasma and oxygen gas jet near the sample, were investigated for their material properties. No visible deformation or curl was observed when deposited on plastic. Materials were confirmed to be amorphous and range between 5 and 10 at.% Sn concentration by x-ray diffraction, x-ray photoemission spectroscopy and energydispersive x-ray spectroscopy. Factors affecting the material composition over time are discussed. Depletion of the Sn as the target ages is suspected. © The Electrochemical Society.

Design and path planning for a remote-brained service robot

This paper presents a novel robot named "TUT03-A" with expert systems, speech interaction, vision systems etc. based on remote-brained approach. The robot is designed to have the brain and body separated. There is a cerebellum in the body. The brain with the expert systems is in charge of decision and the cerebellum control motion of the body. The brain-body. interface has many kinds of structure. It enables a brain to control one or more cerebellums. The brain controls all modules in the system and coordinates their work. The framework of the robot allows us to carry out different kinds of robotics research in an environment that can be shared and inherited over generations. Then we discuss the path planning method for the robot based on ant colony algorithm. The mathematical model is established and the algorithm is achieved with the Starlogo simulating environment. The simulation result shows that it has strong robustness and eligible pathfinding efficiency.

Design and path planning for a remote-brained service robot

This article introduced an effective design method of robot called remote-brain, which is made the brain and body separated. It leaves the brain in the mother environment, by which we mean the environment in which the brain's software is developed, and talks with its body by wireless links. It also presents a real robot TUT06-B based on this method which has human-machine interaction, vision systems, manipulator etc. Then it discussed the path planning method for the robot based on ant colony algorithm in details, especially the Ant-cycle model. And it also analyzed the parameter of the algorithm which can affect the convergence. Finally, it gives the program flow chat of this algorithm.

Range-Gated Laser Stroboscopic Imaging for Night Remote Surveillance

For night remote surveillance, we present a method, the range-gated laser stroboscopic imaging(RGLSI), which uses a new kind of time delay integration mode to integrate target signals so that night remote surveillance can be realized by a low-energy illuminated laser. The time delay integration in this method has no influence on the video frame rate. Compared with the traditional range-gated laser imaging, RGLSI can reduce scintillation and target speckle effects and significantly improve the image signal-to-noise ratio analyzed. Even under low light level and low visibility conditions, the RGLSI system can effectively work. In a preliminary experiment, we have detected and recognized a railway bridge one kilometer away under a visibility of six kilometers, when the effective illuminated energy is 29.5 mu J.

HFFT算法的大规模集群性能评估及基于CUDA的并行化探索

近些年来，随着计算机硬件技术的高速发展，大规模并行集群系统被越来越多地用于各种科研应用等活动中，而随着多核CPU芯片的技术成熟，多核集群系统对于科学计算的处理能力得到了空前的提高，如何对科学计算中海量数据进行高效地并行计算，评估影响算法性能的相应因素，成为了一个很重要的研究方向。 快速傅立叶变换作为上个世纪公认的最重要的基础算法之一，在包括大规模科学计算处理，数字信号处理，图形图像仿真等众多领域有着广泛的应用，对此，本文结合了2008年中国最快的超级计算机曙光5000A与大规模非规则区域上的快速傅立叶变换算法，深入研究分析了该算法应用在超大规模多核并行环境下的可扩展性测试及影响性能的因素。测试结果表明，该算法在现有的超大规模并行环境下具有较好的性能，在曙光5000A上，算法在8192核的加速比达到了277倍。 本文的另一部分研究工作集中在探索现有HFFT算法在GPGPU上的并行化应用。GPU在处理能力和存储器带宽上相对CPU有明显优势，在成本和功耗上也不需要付出太大代价，这从而为并行数据处理问题提供了新的解决方案。由于图形渲染的高度并行性，使得GPU可以通过增加并行处理单元和存储器控制单元的方式提高处理能力和存储器带宽。 在实际应用中，Nvidia公司的CUDA是用于GPU计算的并行开发环境，是一个全新的软硬件架构，这个架构可以使用GPU来解决商业、工业以及科学方面的复杂计算问题。CUDA是一个完整的GPGPU解决方案，它提供了直接访问硬件的接口。由于目前GPU已在科研领域中得到广泛研究，为了利用GPU的并行数据处理能力，本文探索了一种通过GPU计算提高现有HFFT算法执行速度的途径。之后，本文对CUDA并行算法进行了实际测试，实验结果表明，GPU对并行FFT部分具有20%的加速比，而除去I/O传输后，程序的加速比是34.4倍。