Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

As a critical dimension shrinks, the degradation in image quality caused by wavefront aberrations of projection optics in lithographic tools becomes a serious problem. It is necessary to establish a technique for a fast and accurate in situ aberration measurement. We introduce what we believe to be a novel technique for characterizing the aberrations of projection optics by using an alternating phase-shifting mask. The even aberrations, such as spherical aberration and astigmatism, and the odd aberrations, such as coma, are extracted from focus shifts and image displacements of the phase-shifted pattern, respectively. The focus shifts and the image displacements are measured by a transmission image sensor. The simulation results show that, compared with the accuracy of the previous straightforward measurement technique, the accuracy of the coma measurement increases by more than 30% and the accuracy of the spherical-aberration measurement increases by approximately 20%. (c) 2006 Optical Society of America.

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Methods and tools for the assessment of daylight transmittance through expanded metal meshes

306 p.

Evaluation of rockfish abundance in untrawlable habitat: combining acoustic and complementary sampling tools

Rockfishes (Sebastes spp.) are an important component of North Pacific marine ecosystems and commercial fisheries. Because the rocky, high-relief substrate that rockfishes often inhabit is inaccessible to standard survey trawls, population abundance assessments for many rockfish species are difficult. As part of a large study to classify substrate and compare complementary sampling tools, we investigated the feasibility of using an acoustic survey in conjunction with a lowered stereo-video camera, a remotely operated vehicle, and a modified bottom trawl to estimate rockfish biomass in untrawlable habitat. The Snakehead Bank south of Kodiak Island, Alaska, was surveyed repeatedly over 4 days and nights. Dusky rockfish (S. variabilis), northern rockfish (S. polyspinis), and harlequin rockfish (S. variegatus) were the most abundant species observed on the bank. Backscatter attributed to rockfish were collected primarily near the seafloor at a mean height off the bottom of 1.5 m. Total rockfish backscatter and the height of backscatter off the bottom did not differ among survey passes or between night and day. Biomass estimates for the 41 square nautical-mile area surveyed on this small, predominantly untrawlable bank were 2350 metric tons (t) of dusky rockfish, 331 t of northern rockfish, and 137 t of harlequin rockfish. These biomass estimates are 5–60 times the density estimated for these rockfish species by a regularly conducted bottom trawl survey covering the bank and the surrounding shelf. This finding shows that bottom trawl surveys can underestimate the abundance of rockfishes in untrawlable areas and, therefore, may underestimate overall population abundance for these species.

Characteristics of the sportsmanship and unsportsmanlike conduct evaluation tools in youth sport

World Conference on Psychology and Sociology 2012