频谱泄漏对正弦相位调制干涉测量精度的影响何

在正弦相位调制(SPM)干涉仪中,若调制频率或者采样频率发生变化将使干涉信号出现频谱泄漏,减小了谐波分量的幅值,在测量结果中引入了误差。对频谱泄漏的产生及其对测量精度的影响进行了理论分析,获得了频谱泄漏引入测量误差的计算方法。实验测得频率漂移量在-0.3～0.3 Hz内,得到的频谱泄漏引入的误差为0.3～7.9 nm,当超出这个范围时,频谱泄漏误差将迅速增长。实验结果与模拟分析结果一致。

一种基于平板横向剪切干涉的角位移测量方法

在一种已有的角位移干涉测量技术的基础上,提出一种改进的角位移测量方法。通过选择合适的初始入射角,使从平板前后表面反射的两光束实现剪切干涉。采用一维位置探测器测量光束经透镜会聚后在探测器光敏面上的光点偏移量。根据干涉信号的相位和光点偏移量可以计算出被测物体的角位移。在该测量方案中,引入的一平面反射镜与被测物体的反射面形成光程差放大系统,提高了角位移测量灵敏度。分析了初始入射角对剪切比的影响,并讨论了基于该方案的角位移测量精度。实验结果表明,基于该技术的角位移重复测量精度达到10-8 rad数量级。

一种检测光刻机激光干涉仪测量系统非正交性的新方法

提出一种精确检测光刻机激光干涉仪测量系统非正交性的新方法。将对准标记曝光到硅片表面并进行显影;利用光学对准系统测量曝光到硅片上的对准标记理论曝光位置与实际读取位置的偏差;由推导的位置偏差与非正交因子、坐标轴尺度比例、过程引入误差的线性模型,根据最小二乘原理计算出干涉仪测量系统的非正交性。实验结果表明,利用该方法使用同一硅片在不同旋转角下进行测量,干涉仪测量系统非正交因子的测量重复精度优于0.01 μrad,坐标轴尺度比例的测量重复精度优于0.7×10-6。使用不同的硅片进行测量,非正交因子的测量再现性优于

实时测量表面形貌的正弦相位调制半导体干涉仪

提出一种实时测量表面形貌的正弦相位调制半导体激光干涉仪。利用实时相位检测电路，从正弦相位调制干涉信号中解出被测量物体表面形貌的相位。在实验中，测量了楔形光学平板的表面形貌，对表面形貌上的60

消除正弦相位调制干涉仪中光强调制影响的全光纤干涉仪

在激光二极管(LD)正弦相位调制(LD-SPM)干涉仪中,通过注入电流调制激光二极管波长的同时,光源输出的光强也被调制,成为测量误差的主要来源之一。提出一种新的消除激光二极管正弦相位调制干涉仪中光强调制影响的干涉仪,给出了具体的理论分析。该干涉仪采用全光纤结构,有效减小外界干扰对干涉测量的影响;采用容易实现的前置信号处理电路和实时相位检测器对干涉信号进行处理,消除了激光二极管光强调制产生的测量误差;同时实现了物体微小位移的高精度实时测量,测量的重复精度达到1 nm。实验结果与其他消除光强调制影响的方法测得

Discussions about FFT-based two-step phase-shifting algorithm

An FFT-based two-step phase-shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except pi. By comparison with the visibility-function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a pi-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map by locating the extrema of the combined fringes after removing the respective backgrounds. So combining this method and FFT-based one, one could really implement the TPS with random phase shift. Whereafter, we systematically compare the TPS with single-interferogram analysis algorithm and conventional three-step phase-shifting one. The results demonstrate that the FFT-based TPS algorithm has a satisfactory accuracy. At last, based on the polarizing interferometry, a schematic setup of two-channel TPS interferometer with random phase shift is suggested to implement the simultaneous collection of interferograms. (c) 2007 Elsevier GrnbH. All rights reserved.

A high accuracy image sensor for sinusoidal phase-modulating interferometry

We proposed a high accuracy image sensor technique for sinusoidal phase-modulating interferometer in the field of the surface profile measurements. It solved the problem of the CCD's pixel offset of the same column under two adjacent rows, eliminated the spectral leakage, and reduced the influence of external interference to the measurement accuracy. We measured the surface profile of a glass plate, and its repeatability precision was less than 8 nm and its relative error was 1.15 %. The results show that it can be used to measure surface profile with high accuracy and strong anti-interference ability. (C) 2007 Elsevier GmbH. All rights reserved.

A high-speed image sensing technique with adjustable frame rate based on an ordinary CCD

In the sinusoidal phase modulating interferometer technique, the high-speed CCD is necessary to detect the interference signals. The reason of ordinary CCD's low frame rate was analyzed, and a novel high-speed image sensing technique with adjustable frame rate based on ail ordinary CCD was proposed. And the principle of the image sensor was analyzed. When the maximum frequency and channel bandwidth were constant, a custom high-speed sensor was designed by using the ordinary CCD under the control of the special driving circuit. The frame rate of the ordinary CCD has been enhanced by controlling the number of pixels of every frame; therefore, the ordinary of CCD can be used as the high frame rate image sensor with small amount of pixels. The multi-output high-speed image sensor has the deficiencies of low accuracy, and high cost, while the high-speed image senor with small number of pixels by using this technique can overcome theses faults. The light intensity varying with time was measured by using the image sensor. The frame rate was LIP to 1600 frame per second (f/s), and the size of every frame and the frame rate were adjustable. The correlation coefficient between the measurement result and the standard values were higher than 0.98026, and the relative error was lower than 0.53%. The experimental results show that this sensor is fit to the measurements of sinusoidal phase modulating interferometer technique. (c) 2007 Elsevier GmbH. All rights reserved.

利用脉冲重复率倍增和时域泰伯效应实现毫米波脉冲的产生

我们提出了一种新颖的利用脉冲重复率倍增和时域泰伯效应实现毫米波脉冲信号产生的光学方法。在我们的方案中，一个级联的马赫振德干涉仪被用来实现脉冲重复率倍增，一个线性的啁啾光纤光栅被用来实现时域泰伯效应。文中对这种方法的基本理论进行了分析，并给出了相应的数值模拟的结果。研究结果显示这种灵活的毫米波脉冲信号产生的方案在未来的宽带的Radio over Fiber技术将有一个很好的潜在的应用。

Stabilization of optical Fabry-Perot sensor by active feedback control of diode laser

This paper presents the design and characterization of a fiber Fabry-Perot interferometer (FFPI) acoustic wave detector with its Q point being stabilized actively. The relationship between the reflectivity of the F-P cavity facets and cavity length was theoretically analyzed, and high visibility of 100% was realized by optimized design of the F-P cavity. To prevent the drifting of the Q point, a new stabilization method by actively feedback controlling of the diode laser is proposed and demonstrated, indicating the method is simple and easy operating. Measurement shows that good tracing of Q point was effectively realized. (c) 2008 Elsevier B.V. All rights reserved.

Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry

As there exist some problems with the previous laser diode (LD) real-time microvibration measurement interferometers, such as low accuracy, correction before every use, etc., in this paper, we propose a new technique to realize the real-time microvibration measurement by using the LD sinusoidal phase-modulating interferometer, analyze the measurement theory and error, and simulate the measurement accuracy. This interferometer utilizes a circuit to process the interference signal in order to obtain the vibration frequency and amplitude of the detective signal, and a computer is not necessary in it. The influence of the varying light intensity and light path difference on the measurement result can be eliminated. This technique is real-time, convenient, fast, and can enhance the measurement accuracy too. Experiments show that the repeatable measurement accuracy is less than 3.37 nm, and this interferometer can be applied to real-time microvibration measurement of the MEMS. (C) 2007 Elsevier GmbH. All rights reserved.

大口径干涉仪装置的调整及支承机构

采用蜗轮蜗杆驱动调整机构、使用同步带安装标准镜片方式、正交十字导轨支撑等可有效提高光学精密检测系统中大口径干涉仪装置的镜面面形质量、稳定性和调节准确度，从理论上介绍了蜗轮蜗杆驱动机构等设计原理及其基本公式，并从实验上验证了这些机构对光学精密检测系统稳定性的影响．

Single mode Er-doped pi-phase-shifted distributed feedback fibre grating laser

A novel method incorporating the shielded method and the post-processing method has been proposed to fabricate the pi-phase-shilted fibre grating. Then an Er-doped pi-phase-shifted distributed feedback fibre grating laser has been fabricated using the grating. The laser threshold is 20 mW. When pumped with 90 mW light at 980 nm, the laser gives an output of 1.1 mW. Its signal-to-noise ratio is better than 60 dB. It is demonstrated that the laser is single mode operation by means of a Fabry-Perot scanning interferometer.

透过检测中的准直镜精度容限

在干涉检验过程中, 被检元件的面形误差检测精度受到干涉仪系统结构的影响, 从而降低测量结果的可靠性。为了得到较高的检测精度, 必须对检测系统进行分析, 建立测量误差和系统结构的关联度。根据菲涅耳衍射近似理论, 就菲佐干涉仪中的准直镜和标准镜面形误差对透过检测的影响进行了研究。通过对波前相位传递情况的分析, 得出波前误差和系统结构参量的相关性, 去除空腔系统误差, 优化结构参量, 并建立准直镜误差容限表达式。经计算得出, 当被检面形变误差为0.2λ时, 测试误差可以达到0.02λ, 而对准直镜的面形误差要求

激光稳频的共焦法布里-珀罗干涉仪

针对多普勒激光雷达激光源短期频率漂移低于1 MHz的要求,设计了一种共焦干涉仪作为频率标准进行稳频。通过对三种不同材料制成的共焦法布里-珀罗(Fabry-Perot)干涉仪中心频率随温度漂移情况进行分析对比,选用零膨胀微晶玻璃材料制作共焦法布里-珀罗干涉仪,腔镜和隔离器通过光胶的方式进行组合,并且置于温控精度优于0.01 K的双层密封温控箱中。经过实验测量,共焦法布里-珀罗干涉仪的自由光谱范围为370 MHz,透射谱半峰全宽(FWHM)为1.7 MHz,精细度为220。采用该共焦干涉仪进行稳频,理论稳频精度可达0.15 MHz,满足激光多普勒雷达单频激光源的稳频要求。