Reduced-order modelling, circuit-level design and SOI fabrication of microelectromechanical resonators

This thesis deals with two important research aspects concerning radio frequency (RF) microresonators and switches. First, a new approach for compact modeling and simulation of these devices is presented. Then, a combined process flow for their simultaneous fabrication on a SOI substrate is proposed. Compact models for microresonators and switches are extracted by applying mathematical model order reduction (MOR) to the devices finite element (FE) description in ANSYS c° . The behaviour of these devices includes forms of nonlinearities. However, an approximation in the creation of the FE model is introduced, which enables the use of linear model order reduction. Microresonators are modeled with the introduction of transducer elements, which allow for direct coupling of the electrical and mechanical domain. The coupled system element matrices are linearized around an operating point and reduced. The resulting macromodel is valid for small signal analysis around the bias point, such as harmonic pre-stressed analysis. This is extremely useful for characterizing the frequency response of resonators. Compact modelling of switches preserves the nonlinearity of the device behaviour. Nonlinear reduced order models are obtained by reducing the number of nonlinearities in the system and handling them as input to the system. In this way, the system can be reduced using linear MOR techniques and nonlinearities are introduced directly in the reduced order model. The reduction of the number of system nonlinearities implies the approximation of all distributed forces in the model with lumped forces. Both for microresonators and switches, a procedure for matrices extraction has been developed so that reduced order models include the effects of electrical and mechanical pre-stress. The extraction process is fast and can be done automatically from ANSYS binary files. The method has been applied for the simulation of several devices both at devices and circuit level. Simulation results have been compared with full model simulations, and, when available, experimental data. Reduced order models have proven to conserve the accuracy of finite element method and to give a good description of the overall device behaviour, despite the introduced approximations. In addition, simulation is very fast, both at device and circuit level. A combined process-flow for the integrated fabrication of microresonators and switches has been defined. For this purpose, two processes that are optimized for the independent fabrication of these devices are merged. The major advantage of this process is the possibility to create on-chip circuit blocks that include both microresonators and switches. An application is, for example, aswitched filter bank for wireless transceiver. The process for microresonators fabrication is characterized by the use of silicon on insulator (SOI) wafers and on a deep reactive ion etching (DRIE) step for the creation of the vibrating structures in single-crystal silicon and the use of a sacrificial oxide layer for the definition of resonator to electrode distance. The fabrication of switches is characterized by the use of two different conductive layers for the definition of the actuation electrodes and by the use of a photoresist as a sacrificial layer for the creation of the suspended structure. Both processes have a gold electroplating step, for the creation of the resonators electrodes, transmission lines and suspended structures. The combined process flow is designed such that it conserves the basic properties of the original processes. Neither the performance of the resonators nor the performance of the switches results affected by the simultaneous fabrication. Moreover, common fabrication steps are shared, which allows for cheaper and faster fabrication.

Design and Performance Evaluation of Network-on-Chip Communication Protocols and Architectures

The scale down of transistor technology allows microelectronics manufacturers such as Intel and IBM to build always more sophisticated systems on a single microchip. The classical interconnection solutions based on shared buses or direct connections between the modules of the chip are becoming obsolete as they struggle to sustain the increasing tight bandwidth and latency constraints that these systems demand. The most promising solution for the future chip interconnects are the Networks on Chip (NoC). NoCs are network composed by routers and channels used to inter- connect the different components installed on the single microchip. Examples of advanced processors based on NoC interconnects are the IBM Cell processor, composed by eight CPUs that is installed on the Sony Playstation III and the Intel Teraflops pro ject composed by 80 independent (simple) microprocessors. On chip integration is becoming popular not only in the Chip Multi Processor (CMP) research area but also in the wider and more heterogeneous world of Systems on Chip (SoC). SoC comprehend all the electronic devices that surround us such as cell-phones, smart-phones, house embedded systems, automotive systems, set-top boxes etc... SoC manufacturers such as ST Microelectronics , Samsung, Philips and also Universities such as Bologna University, M.I.T., Berkeley and more are all proposing proprietary frameworks based on NoC interconnects. These frameworks help engineers in the switch of design methodology and speed up the development of new NoC-based systems on chip. In this Thesis we propose an introduction of CMP and SoC interconnection networks. Then focusing on SoC systems we propose: • a detailed analysis based on simulation of the Spidergon NoC, a ST Microelectronics solution for SoC interconnects. The Spidergon NoC differs from many classical solutions inherited from the parallel computing world. Here we propose a detailed analysis of this NoC topology and routing algorithms. Furthermore we propose aEqualized a new routing algorithm designed to optimize the use of the resources of the network while also increasing its performance; • a methodology flow based on modified publicly available tools that combined can be used to design, model and analyze any kind of System on Chip; • a detailed analysis of a ST Microelectronics-proprietary transport-level protocol that the author of this Thesis helped developing; • a simulation-based comprehensive comparison of different network interface designs proposed by the author and the researchers at AST lab, in order to integrate shared-memory and message-passing based components on a single System on Chip; • a powerful and flexible solution to address the time closure exception issue in the design of synchronous Networks on Chip. Our solution is based on relay stations repeaters and allows to reduce the power and area demands of NoC interconnects while also reducing its buffer needs; • a solution to simplify the design of the NoC by also increasing their performance and reducing their power and area consumption. We propose to replace complex and slow virtual channel-based routers with multiple and flexible small Multi Plane ones. This solution allows us to reduce the area and power dissipation of any NoC while also increasing its performance especially when the resources are reduced. This Thesis has been written in collaboration with the Advanced System Technology laboratory in Grenoble France, and the Computer Science Department at Columbia University in the city of New York.

Modeling hydrothermal system: deriving observables and hydrothermal instability in volcanic and non-volcanic setting

Hydrothermal fluids are a fundamental resource for understanding and monitoring volcanic and non-volcanic systems. This thesis is focused on the study of hydrothermal system through numerical modeling with the geothermal simulator TOUGH2. Several simulations are presented, and geophysical and geochemical observables, arising from fluids circulation, are analyzed in detail throughout the thesis. In a volcanic setting, fluids feeding fumaroles and hot spring may play a key role in the hazard evaluation. The evolution of the fluids circulation is caused by a strong interaction between magmatic and hydrothermal systems. A simultaneous analysis of different geophysical and geochemical observables is a sound approach for interpreting monitored data and to infer a consistent conceptual model. Analyzed observables are ground displacement, gravity changes, electrical conductivity, amount, composition and temperature of the emitted gases at surface, and extent of degassing area. Results highlight the different temporal response of the considered observables, as well as the different radial pattern of variation. However, magnitude, temporal response and radial pattern of these signals depend not only on the evolution of fluid circulation, but a main role is played by the considered rock properties. Numerical simulations highlight differences that arise from the assumption of different permeabilities, for both homogeneous and heterogeneous systems. Rock properties affect hydrothermal fluid circulation, controlling both the range of variation and the temporal evolution of the observable signals. Low temperature fumaroles and low discharge rate may be affected by atmospheric conditions. Detailed parametric simulations were performed, aimed to understand the effects of system properties, such as permeability and gas reservoir overpressure, on diffuse degassing when air temperature and barometric pressure changes are applied to the ground surface. Hydrothermal circulation, however, is not only a characteristic of volcanic system. Hot fluids may be involved in several mankind problems, such as studies on geothermal engineering, nuclear waste propagation in porous medium, and Geological Carbon Sequestration (GCS). The current concept for large-scale GCS is the direct injection of supercritical carbon dioxide into deep geological formations which typically contain brine. Upward displacement of such brine from deep reservoirs driven by pressure increases resulting from carbon dioxide injection may occur through abandoned wells, permeable faults or permeable channels. Brine intrusion into aquifers may degrade groundwater resources. Numerical results show that pressure rise drives dense water up to the conduits, and does not necessarily result in continuous flow. Rather, overpressure leads to new hydrostatic equilibrium if fluids are initially density stratified. If warm and salty fluid does not cool passing through the conduit, an oscillatory solution is then possible. Parameter studies delineate steady-state (static) and oscillatory solutions.

Multidimensional analysis of complex networks

Complex Networks analysis turn out to be a very promising field of research, testified by many research projects and works that span different fields. Those analysis have been usually focused on characterize a single aspect of the system and a study that considers many informative axes along with a network evolve is lacking. We propose a new multidimensional analysis that is able to inspect networks in the two most important dimensions, space and time. To achieve this goal, we studied them singularly and investigated how the variation of the constituting parameters drives changes to the network as a whole. By focusing on space dimension, we characterized spatial alteration in terms of abstraction levels. We proposed a novel algorithm that, by applying a fuzziness function, can reconstruct networks under different level of details. We verified that statistical indicators depend strongly on the granularity with which a system is described and on the class of networks. We keep fixed the space axes and we isolated the dynamics behind networks evolution process. We detected new instincts that trigger social networks utilization and spread the adoption of novel communities. We formalized this enhanced social network evolution by adopting special nodes (called sirens) that, thanks to their ability to attract new links, were able to construct efficient connection patterns. We simulated the dynamics of the system by considering three well-known growth models. Applying this framework to real and synthetic networks, we showed that the sirens, even when used for a limited time span, effectively shrink the time needed to get a network in mature state. In order to provide a concrete context of our findings, we formalized the cost of setting up such enhancement and provided the best combinations of system's parameters, such as number of sirens, time span of utilization and attractiveness.

Filiera corta: percorsi di innovazione tecnici, organizzativi e sociali nella gestione strategica delle nicchie. Esperienze in Toscana e in Provenza

There is a widening consensus around the fact that, in many developed countries, food production-consumption patterns are in recent years interested by a process of deep change towards diversification and re-localisation practices, as a counter-tendency to the trend to the increasing disconnection between farming and food, producers and consumers. The relevance of these initiatives doesn't certainly lie on their economic dimension, but rather in their intense diffusion and growth rate, their spontaneous and autonomous nature and, especially, their intrinsic innovative potential. These dynamics involve a wide range of actors around local food patterns, embedding short food supply chains initiatives within a more complex and wider process of rural development, based on principles of sustainability, multifunctionality and valorisation of endogenous resources. In this work we have been analysing these features through a multi-level perspective, with reference to the dynamics between niche and regime and the inherent characteristics of the innovation paths. We apply this approach, through a qualitative methodology, to the analysis of the experience of farmers’ markets and Solidarity-Based Consumers Groups (Gruppi di Acquisto Solidale) ongoing in Tuscany, seeking to highlight the dynamics that are affecting the establishment of this alternative food production-consumption model (and its related innovative potential) from within and from without. To verify if and in which conditions they can constitute a niche, a protected space where radical innovations can develop, we make reference to the three interrelated analytic dimensions of socio-technical systems: the actors (i.e. individuals. social groups, organisations), the rules and institutions system, and the artefacts (i.e. the material and immaterial contexts in which the actors move). Through it, we analyse the innovative potential of niches and the level of their structuration and , then, the mechanisms of system transition, focusing on the new dynamics within the niche and between the niche and the policy regime emerging after the growth of interest by mass-media and public institutions and their direct involvement in the initiatives. Following the development of these significant experiences, we explore more deeply social, economic, cultural, political and organisational factors affecting innovations in face-to-face interactions, underpinning the critical aspects (sharing of alternative values, coherence at individual choices level, frictions on organisational aspects, inclusion/exclusion, attitudes towards integration at territorial level), towards uncovering until to the emergence of tensions and the risks of opportunistic behaviours that might arise from their growth. Finally, a comparison with similar experiences abroad is drawn (specifically with Provence), in order to detect food for thought, potentially useful for leading regional initiativestowards transition path.

Smart Sensors For Interoperable Smart Environment

Smart Environments are currently considered a key factor to connect the physical world with the information world. A Smart Environment can be defined as the combination of a physical environment, an infrastructure for data management (called Smart Space), a collection of embedded systems gathering heterogeneous data from the environment and a connectivity solution to convey these data to the Smart Space. With this vision, any application which takes advantages from the environment could be devised, without the need to directly access to it, since all information are stored in the Smart Space in a interoperable format. Moreover, according to this vision, for each entity populating the physical environment, i.e. users, objects, devices, environments, the following questions can be arise: “Who?”, i.e. which are the entities that should be identified? “Where?” i.e. where are such entities located in physical space? and “What?” i.e. which attributes and properties of the entities should be stored in the Smart Space in machine understandable format, in the sense that its meaning has to be explicitly defined and all the data should be linked together in order to be automatically retrieved by interoperable applications. Starting from this the location detection is a necessary step in the creation of Smart Environments. If the addressed entity is a user and the environment a generic environment, a meaningful way to assign the position, is through a Pedestrian Tracking System. In this work two solution for these type of system are proposed and compared. One of the two solution has been studied and developed in all its aspects during the doctoral period. The work also investigates the problem to create and manage the Smart Environment. The proposed solution is to create, by means of natural interactions, links between objects and between objects and their environment, through the use of specific devices, i.e. Smart Objects

Semantic coordination through programmable Tuple spaces

Two of the main features of today complex software systems like pervasive computing systems and Internet-based applications are distribution and openness. Distribution revolves around three orthogonal dimensions: (i) distribution of control|systems are characterised by several independent computational entities and devices, each representing an autonomous and proactive locus of control; (ii) spatial distribution|entities and devices are physically distributed and connected in a global (such as the Internet) or local network; and (iii) temporal distribution|interacting system components come and go over time, and are not required to be available for interaction at the same time. Openness deals with the heterogeneity and dynamism of system components: complex computational systems are open to the integration of diverse components, heterogeneous in terms of architecture and technology, and are dynamic since they allow components to be updated, added, or removed while the system is running. The engineering of open and distributed computational systems mandates for the adoption of a software infrastructure whose underlying model and technology could provide the required level of uncoupling among system components. This is the main motivation behind current research trends in the area of coordination middleware to exploit tuple-based coordination models in the engineering of complex software systems, since they intrinsically provide coordinated components with communication uncoupling and further details in the references therein. An additional daunting challenge for tuple-based models comes from knowledge-intensive application scenarios, namely, scenarios where most of the activities are based on knowledge in some form|and where knowledge becomes the prominent means by which systems get coordinated. Handling knowledge in tuple-based systems induces problems in terms of syntax - e.g., two tuples containing the same data may not match due to differences in the tuple structure - and (mostly) of semantics|e.g., two tuples representing the same information may not match based on a dierent syntax adopted. Till now, the problem has been faced by exploiting tuple-based coordination within a middleware for knowledge intensive environments: e.g., experiments with tuple-based coordination within a Semantic Web middleware (surveys analogous approaches). However, they appear to be designed to tackle the design of coordination for specic application contexts like Semantic Web and Semantic Web Services, and they result in a rather involved extension of the tuple space model. The main goal of this thesis was to conceive a more general approach to semantic coordination. In particular, it was developed the model and technology of semantic tuple centres. It is adopted the tuple centre model as main coordination abstraction to manage system interactions. A tuple centre can be seen as a programmable tuple space, i.e. an extension of a Linda tuple space, where the behaviour of the tuple space can be programmed so as to react to interaction events. By encapsulating coordination laws within coordination media, tuple centres promote coordination uncoupling among coordinated components. Then, the tuple centre model was semantically enriched: a main design choice in this work was to try not to completely redesign the existing syntactic tuple space model, but rather provide a smooth extension that { although supporting semantic reasoning { keep the simplicity of tuple and tuple matching as easier as possible. By encapsulating the semantic representation of the domain of discourse within coordination media, semantic tuple centres promote semantic uncoupling among coordinated components. The main contributions of the thesis are: (i) the design of the semantic tuple centre model; (ii) the implementation and evaluation of the model based on an existent coordination infrastructure; (iii) a view of the application scenarios in which semantic tuple centres seem to be suitable as coordination media.

Tecniche MonteCarlo per l'analisi di sistemi a rete

The assessment of the RAMS (Reliability, Availability, Maintainability and Safety) performances of system generally includes the evaluations of the “Importance” of its components and/or of the basic parameters of the model through the use of the Importance Measures. The analytical equations proposed in this study allow the estimation of the first order Differential Importance Measure on the basis of the Birnbaum measures of components, under the hypothesis of uniform percentage changes of parameters. The aging phenomena are introduced into the model by assuming exponential-linear or Weibull distributions for the failure probabilities. An algorithm based on a combination of MonteCarlo simulation and Cellular Automata is applied in order to evaluate the performance of a networked system, made up of source nodes, user nodes and directed edges subjected to failure and repair. Importance Sampling techniques are used for the estimation of the first and total order Differential Importance Measures through only one simulation of the system “operational life”. All the output variables are computed contemporaneously on the basis of the same sequence of the involved components, event types (failure or repair) and transition times. The failure/repair probabilities are forced to be the same for all components; the transition times are sampled from the unbiased probability distributions or it can be also forced, for instance, by assuring the occurrence of at least a failure within the system operational life. The algorithm allows considering different types of maintenance actions: corrective maintenance that can be performed either immediately upon the component failure or upon finding that the component has failed for hidden failures that are not detected until an inspection; and preventive maintenance, that can be performed upon a fixed interval. It is possible to use a restoration factor to determine the age of the component after a repair or any other maintenance action.

Componentistica avanzata per Impianti di Combustione a Biomassa

In un quadro internazionale di forte interesse verso uno sviluppo sostenibile e sfide energetiche per il futuro, il DIEM, in collaborazione con altri istituti di ricerca ed imprese private, sta progettando l’integrazione di componentistica avanzata su di una caldaia alimentata a biomasse. Lo scopo finale è quello di realizzare una caldaia a biomasse che produca energia in maniera più efficiente e con un impatto ambientale ridotto. L’applicazione è indirizzata inizialmente verso caldaie di piccola-media taglia (fino a 350 kW termici) vista la larga diffusione di questa tipologia di impianto. La componentistica in oggetto è: - filtro sperimentale ad alta efficienza per la rimozione del particolato; - celle a effetto Seebeck per la produzione di energia elettrica direttamente da energia termica senza parti meccaniche in movimento; - pompa Ogden per la produzione di energia meccanica direttamente da energia termica; La finalità dell’attività di ricerca è la progettazione dell’integrazione dei suddetti dispositivi con una caldaia a biomassa da 290 kW termici per la realizzazione di un prototipo di caldaia stand-alone ad impatto ambientale ridotto: in particolare, la caldaia è in grado, una volta raggiunte le condizioni di regime, di autoalimentare le proprie utenze elettriche, garantendo il funzionamento in sicurezza in caso di black-out o consentendo l’installazione della caldaia medesima in zone remote e prive di allaccio alla rete elettrica. Inoltre, la caldaia può fornire, tramite l'utilizzo di una pompa a vapore o pompa Ogden, energia meccanica per il pompaggio di fluidi: tale opportunità si ritiene particolarmente interessante per l'integrazione della caldaia nel caso di installazione in ambito agricolo. Infine, l'abbinamento di un filtro ad alta efficienza e basso costo consente l'abbattimento delle emissioni inquinanti, favorendo una maggiore diffusione della tecnologia senza ulteriori impatti sull'ambiente.

Il fascicolo sanitario elettronico tra Semantic Web e diritto alla privacy

Principale obiettivo della ricerca è quello di ricostruire lo stato dell’arte in materia di sanità elettronica e Fascicolo Sanitario Elettronico, con una precipua attenzione ai temi della protezione dei dati personali e dell’interoperabilità. A tal fine sono stati esaminati i documenti, vincolanti e non, dell’Unione europea nonché selezionati progetti europei e nazionali (come “Smart Open Services for European Patients” (EU); “Elektronische Gesundheitsakte” (Austria); “MedCom” (Danimarca); “Infrastruttura tecnologica del Fascicolo Sanitario Elettronico”, “OpenInFSE: Realizzazione di un’infrastruttura operativa a supporto dell’interoperabilità delle soluzioni territoriali di fascicolo sanitario elettronico nel contesto del sistema pubblico di connettività”, “Evoluzione e interoperabilità tecnologica del Fascicolo Sanitario Elettronico”, “IPSE - Sperimentazione di un sistema per l’interoperabilità europea e nazionale delle soluzioni di Fascicolo Sanitario Elettronico: componenti Patient Summary e ePrescription” (Italia)). Le analisi giuridiche e tecniche mostrano il bisogno urgente di definire modelli che incoraggino l’utilizzo di dati sanitari ed implementino strategie effettive per l’utilizzo con finalità secondarie di dati sanitari digitali , come Open Data e Linked Open Data. L’armonizzazione giuridica e tecnologica è vista come aspetto strategico per ridurre i conflitti in materia di protezione di dati personali esistenti nei Paesi membri nonché la mancanza di interoperabilità tra i sistemi informativi europei sui Fascicoli Sanitari Elettronici. A questo scopo sono state individuate tre linee guida: (1) armonizzazione normativa, (2) armonizzazione delle regole, (3) armonizzazione del design dei sistemi informativi. I principi della Privacy by Design (“prottivi” e “win-win”), così come gli standard del Semantic Web, sono considerate chiavi risolutive per il suddetto cambiamento.