25 resultados para chemical mechanical polishing

em Deakin Research Online - Australia


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Chemical mechanical polishing technique is more frequently adopted for planarization in integrated circuit fabrication. The silica abrasives in colloidal state are fabricated with the sodium silicate solution as raw materials through the polymerization reaction among silicic acid molecules. By continuous injection of silicic acid into the preexisting silica solution, the diameter of silica nanoparticles increases. The different sized silica nanoparticles are imaged by scanning electron microscopy, and the dried silica are characterized by X-ray diffraction and thermal analysis. The polishing test on silicon wafer with as-fabricated silica abrasives shows that the surface flatness reaches 1.1 nm roughness, however, micro scratches are still present in the surface.

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Carbon Nexus (www.carbonnexus.com.au) is a globally significant research facility at Deakin University focused on the manufacture and use of carbon fibre. Carbon Nexus represents a partnership between Deakin University and the Victorian Centre for Advanced Materials Manufacturing (VCAMM) and houses two production lines capable of manufacturing industrially relevant quantities of aerospace grade carbon fibre. The facility enables scientists to conduct research into the chemical, mechanical and nano-scale characteristics of new carbon fibre materials produced on site. There is a strong focus on evaluating these new carbon fibre products in composite materials, particularly composites cured using out-of-autoclave techniques. This paper will present an overview of the vision for Carbon Nexus as well as the technical capabilities of both the laboratory scale single tow line and the larger pilot line capable of producing up to 50 tons of carbon fibre per year. Both lines are fully operational and able to convert a range of polymer precursors into carbon fibre. They are representative of world's best practice for carbon fibre manufacturing methods and well suited to conducting energy efficiency studies. Highlights from recent research projects will focus on the effect of the surface treatment and sizing of carbon fibre on fibre-matrix adhesion in composite materials. In addition to this, results from studies of the effect of varying processing parameters on the structure and properties of oxidised polyacrylonitrile and carbon fibre will also be presented.

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Micro-porous nickel foams with an open cell structure were fabricated by the space-holding sintering. The average pore size of the micro-porous nickel specimens ranged from 30 μm to 150 μm, and the porosity ranged from 60 % to 80 %. The porous characteristics of the nickel specimens were observed using scanning electron microscopy (SEM). The mechanical properties were studied using compressive tests. For comparison, macro-porous nickel foams prepared by the chemical vapour deposition method with pore sizes of 800 μm and 1300 μm and porosity of 95 % were also presented. Results indicated that the ratio value of 6 and higher for the specimen length to cell size (L/d) is satisfying for obtaining stable compressive properties. The micro-porous nickel specimens exhibited different deformation behaviour and dramatically increased mechanical properties, compared to those of the macro-porous nickel specimens.

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Carbo-thermic reduction of ilmenite (FeTiO3) to TiO2 and/or TiC is traditionally carried out by a high temperature annealing treatment at  ~1500 °C. In this work, electric discharge assisted mechanical milling (EDAMM) has been used to synthesise TiC + Fe3C from FeTiO3 in 5 min. In this study we report of the reduction of FeTiO3 with C that does not require an additional high temperature annealing treatment.

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Group V–VI binary sulfides are semiconductors, and find application in a number of commercial devices. Synthesis of these metal sulfides is problematic, and traditional synthesis techniques utilizing thermal and chemical means have disadvantages such as a long process time, contamination, and the use of toxic substances. In this work, the novel synthesis technique of electric discharge assisted mechanical milling (EDAMM) has been used to rapidly synthesize Bi2S3 and Sb2S3 powders from elemental S and Sb/Bi powders. This technique is shown to be both rapid and successful, and produces crystalline metal sulfide powders with a particle size of approximately 2 μm.

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This work investigated the potential of improving flexural properties of natural fiber (jute) reinforced biocomposites by atmospheric pressure helium plasma treatment. Composites were made by the use of combined hand lay-up and vacuum bagging technique followed by newly developed Australia patented QuickstepTM curing. The physical properties of helium plasma modified fibers were investigated by means of wettability time, coefficient of friction (COF), atomic force microscopy (AFM) and chemical nature of the surface with ATR-FTIR and XPS. There was found a logical correlation between physical and chemical characteristics of the surface of fiber with the fracture mechanical behavior of their resulting biocomposites. In addition, the use of helium atmospheric plasma treatment prior to QuickstepTM process has proved to be a potential way to positively alter the fracture-mechanical behavior of biocomposites. This study will lead to new commercial applications of natural fiber jute for the composite industry that go beyond wrapping and packaging.

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The 1996 Johnson stakeholder review of Australian engineering education recommended the development of a number of broadly defined attributes in all engineering graduates. The Institution of Engineers, Australia (now Engineers Australia) responded swiftly by switching the focus of its engineering course accreditation requirements from course content to graduate attribute outcomes. To maximise the effectiveness of this approach to the mechanical engineering discipline a clear understanding of the relative significance of a more detailed range of attributes to Australian industry is essential, yet the scope of the mechanical engineering profession is broad and views of individual practitioners contributing to debate on attribute requirements are largely influenced by their own often unique professional formation. The research presented in this thesis is unique in using a role based analysis of the relative significance of an extensive range of attributes considered relevant to Australian mechanical engineers. The study covers the six industries found to employ the greatest number of Australian mechanical engineers. The significance of these attributes in the core mechanical engineering roles of each industry are weighted according to the numbers of mechanical engineers employed in those roles. These attribute significance profiles are considered in the context of a study of the formative development of the profession under the extensive influence of 19th and 20th century UK and US practices and recent momentous changes in engineering employment and formation. A wide range of appropriate teaching strategies to develop the most significant attributes through proximal and distance learning are explored and a brief account of the candidate’s work in developing and assessing the use of technology to enhance flexible learning in the field of engineering education is also included in this thesis. Whilst major areas of the mechanical engineers knowledge base are considered as part of the main study, further case study based research is presented to assess in more detail the knowledge base requirements for Australia’s best performing manufacturing industry by ‘industry value added’ - Food, Beverage and Pharmaceuticals and as such provides an indication of the relevance of the content base of Australian mechanical (as well as chemical and electrical) engineering degree programs to an Australian industry sector.

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The strengthening mechanism responsible for the unique combination of ultimate tensile strength and elongation in a multiphase Fe-0.2C-1.5Mn-1.2Si-0.3Mo-0.6Al-0.02Nb (wt%) steel was studied. The microstructures with different volume fractions of polygonal ferrite, bainite and retained austenite were simulated by controlled thermomechanical processing. The interrupted tensile test was used to study the bainitic ferrite, retained austenite and polygonal ferrite behaviour as a function of plastic strain. X-ray analysis was used to characterise the volume fraction and carbon content of retained austenite. Transmission electron microscopy was utilised to analyse the effect of bainitic ferrite morphology on the strain induced transformation of retained austenite and retained austenite twinning as a function of strain in the bulk material. The study has shown that the austenite twinning mechanism is more preferable than the transformation induced plasticity (TRIP) mechanism during the early stages of deformation for a microstructure containing 15% polygonal ferrite, while the transformation induced plasticity effect is the main mechanism when there is 50% of polygonal ferrite in the microstructure. The bainitic ferrite morphology affects the deformation mode of retained austenite during straining. The polygonal ferrite behaviour during straining depends on dislocation substructure formed due to the deformation and the additional mobile dislocations caused by the TRIP effect. Operation of TRIP or twinning mechanisms depends not only on the chemical and mechanical stability of retained austenite, but also on the interaction of the phases during straining.

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The present study examines the influence of different contents and types of process control agent (PCA), i.e., stearic acid (SA) and ethylene-bis-stearamide (EBS), on the microstructural evolution and characteristics of Ti-16Sn-4Nb (wt pct) alloy powders and bulk samples. The characterization of the powders and bulk samples was carried out by using chemical analysis, optical microscopy, scanning electron microscopy (SEM) combined with energy-dispersive spectrometry (EDS), and X-ray diffractometry. Results indicated that the powder recovered from the ball milling containers increased with increasing amounts of SA and EBS. Furthermore, adding more SA or EBS to the powder mixture resulted in a considerably smaller particle size, with a flaky-shaped morphology for the given ball milling time. Also, a slightly higher effectiveness was found for EBS when compared to SA. Meanwhile, the addition of both SA and EBS led to a delay in the alloy formation during mechanical alloying (MA) and caused contamination of the material with mainly carbon (C) and oxygen (O). An optimum amount of 1 wt pct PCA led to a good balance between cold welding and fracturing, and thus favored the formation of the titanium alloy. The microstructural observation of the bulk alloy showed a homogeneous distribution of fine Nb-rich ß-phase colonies within the α-Ti matrix with the addition of PCA less than 1 wt pct.

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The use of materials with otherwise desirable mechanical properties is often problematic in practice as a result of corrosion. Susceptibility may arise for a number of reasons, including an electrochemically heterogeneous surface or destabilisation of a passive film. These shortcomings have historically been overcome through the use of various coatings or claddings. However, a more robust surface layer with enhanced corrosion resistance could possibly be produced via local surface alloying using a fluidised bed. A fluidised bed treatment allows a surface to be alloyed, producing a distinct surface layer up to tens of microns thick. Surface alloying additions can be selected on the basis of whether they are known or suspected to enhance the corrosion resistance of a particular material, whilst at a minimum, surface alloying likely provides a more electrochemically homogeneous surface. Electrochemical evaluations using potentiodynamic polarisations in NaCl electrolytes have shown chromised plain carbon and stainless steel surfaces have decreased rates of corrosion, decreased passive current densities, and ennobled pitting potentials relative to untreated specimens.

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Symmetrically tapered planar IR waveguides have been fabricated by starting with a ZnS coated concave piece of single-crystal Ge, embedding it in an epoxide resin as a supporting substrate, and then grinding and polishing a planar surface until the thickness at the taper minimum is <30 μm. Such tapering is expected to enhance a waveguide's sensitivity as an evanescent wave sensor by maximizing the amount of evanescent wave energy present at the thinnest part of the waveguide. As predicted by theory, the surface sensitivity, i.e., the absorbance signal per molecule in contact with the sensing region, increases with decreasing thickness of the tapered region even while the total energy throughput decreases. The signal-to-noise ratio obtained depends very strongly on the quality of the polished surfaces of the waveguides. The surface sensitivity is superior to that obtained with a commercial Ge attenuated total reflection (ATR) accessory for several types of sample, including thin films (<10 ng) and small volumes (<1 μL) of volatile solvents. By using the waveguides, light-induced structural changes in the protein bacteriorhodopsin were observable using samples as small as ∼50 pmol (∼1 μg). In addition, the waveguide sensors can reveal the surface compositions on a single human hair, pointing to their promise as a tool for forensic fiber analysis.